Contents ADP/ADS User’s manual A - Introduction ■ ■ ■ A 10 ...................... A 20 ADP/ADS Series One ............................................. The various versions of ADP Series One ADP/ADS Serie One Dry pumps A Types of monitoring systems ...................................... A Dry pump operational principle ................................. A The accessories ....................................................... A Technical characteristics.............................................
Contents ADP/ADS User’s manual C - Operation ■ Start-up of the M3 monitoring system............................ C 10 ■ Setting the M3 monitoring system parameters ................ C 20 ■ M3 Monitoring system function table............................ C 30 ■ Use of the M3 monitoring system ................................ C 40 ■ Use of the M1 monitoring system ................................ C 50 ■ Safety instructions related to maintenance .....................
Contents ADP/ADS User’s manual E - Maintenance instructions ■ Maintenance precautions (Service centers) .................... E 10 ■ Pump draining ......................................................... E 20 ■ Silencer maintenance ................................................ E 30 ■ Electropneumatic valve maintenance (withdrawal) ........... E 40 ■ Freeing up the ADP ..................................................
ADP/ADS Series One dry pumps Dear Customer, you have just purchased an Alcatel dry pump. We thank you and are proud to include you in our customers. This product has benefited from Alcatel’s many years of experience in “semiconductor” processes and dry pumping. For optimum performance and to obtain full satisfaction from this equipment, we recommend that you study this manual before any intervention on your pump, in particular, the chapter on installation and start up.
A 10 ADP/ADS Series One Multi-stage pump with Roots technology Sealed motor with liquid cooling Edition 03 - May 97 Genuinely dry pump - well-known technology - reliability - no fan (clean room compatible) safe : no gas leak quiet multi-voltage, bi-frequency 50/60 Hz - guaranteed by design - guaranteed by testing Residual gas spectrum free from hydrocarbon peaks Vertical pumping Reliability Easy maintenance Pump designed for all processes 2 versions MTBF > 50 000 hours - interchangeables parts - may
A 20 The various versions of ADP/ADS Series One Standard version The Standard Series pumps are fully integrated in a compact and covered frame which includes: the monitoring system,the flowmeter panel, the facilities panel, an OEM interface panel and the RS 232/485 serial link.
A 20 The various versions of ADP/ADS Series One Standard version (continued) 1 - PUMPING SYSTEMS : ADP or ADS* * In an ADS, a Roots pump is combined with an ADP. 2 - Silencer with check valve function 3 - Compact frame May be equipped with anti-vibration pads. 4 - Utilities panel with Quick Connectors for all utilities : Water, gas purge, power. 1 5 2 6 3 6 - Flowmeter panel with water and purge gas flow rate settings.
A 20 The various versions of ADP/ADS Series One Modular Version For specific uses, Alcatel has developped a modular version from the series One which offers in addition of standard version the following characteritics • Footprint and volume minima • Total flexibility of use due to its modular possibilities of installation • No cover for easy integration • Guaranteed accessibility for preventive maintenance and repair.
A 30 ADP/ADS Series One dry pumps for semi-conductor’s industry The ADP / ADS range is designed for three types of applications : Clean processes This concerns all applications for clean pumping (particle-free) and non-corrosive gases (load lock pumping for example). No nitrogen purge needed.
A 30 ADP/ADS Series One dry pumps for semi-conductor’s industry Corrosive processes The nitrogen injection system This concerns all applications for pumping chlorinated, fluorinated, crystallizable or condensable gases, (for example : ion implantation, etching, epitaxy...). This version contains a nitrogen injection system in all the pump’s stages.
A 30 ADP/ADS Series One dry pumps for semi-conductor’s industry Very corrosives processes “TC“ CVD type Several models are available for the CVD processes which are generating lots of quantities of particles and condensable gases (BPSG, TEOS, LPCVD nitride…). Compared to the previous version, the main differences are the following: - nitrogen injection and cooling circuit are optimized to avoid deposition and condensation. - ADP temperature controlled device.
A 40 Types of monitoring systems 2 types of monitoring system Monitoring system M1 M1 Remote monitoring system M1 Solid-state monitoring without neutral gas control, M3 monitoring driven by a microprocessor . Parameters monitored : • Water flow failure • Electrical overloading Monitoring system M1 can be remote controlled. This is a unit separated from the frame (5 or 10 meters cable) for the remote control and monitoring of the pump.
A 50 Dry pump operational principle Multi-stage Roots principle The ADP pump consists of 5 Roots type stages. The two rotors rotate without touching each other. The three stages on the low pressure side are called “LP stages” and the two stages on the high pressure side are called “HP stages”.
A 50 Dry pump operational principle Tightness with environment Tightness at low pressure side The pump bearings on the low pressure side are fitted with ceramic ball bearings lubricated with fluorinated grease which resists high temperatures and the possible corrosion due to the application. An overpressure zone is created around the bearing by injecting a neutral gas (Purge LP1). The grease works in a less severe vacuum and thus lasts longer.
A 50 Dry pump operational principle Tightness at motor side (shaft passage) The vacuum tightness is ensured by the motor design with built-in jacket. 2 This system provides total safety regarding leaks outside the pump and requires no maintenance. 3 1 1 - Built-in jacket 2 - Motor housing 3 - Electrical rotor Tightness at shutdown The pump is fitted with a antisuckback valve in the silencer, preventing the exhaust being sucked back.
A 60 The accessories Isolation valve at pump inlet Principle : This valve avoids a reverse flow of particles to the chamber and increases tightness when the pump is switched off. It allows also to isolate the running pump from the process. Part Number : Several models are available in Alcatel catalog (Manual valve, electropneumatic...). Consult us. Fitting : See section B 90 Anti-vibration pads Principle : This device significantly reduces the vibration rate transmitted to the floor.
A 70 ( Modifications reserved ) Technical characteristics Characteristics Units Nominal flow-rate (50/60 Hz) m3/h l/mn cfm 25/30 68/80 140/165 270/310 460/510 680/750 950/1000 418/501 1136/1336 2338/2756 4509/5177 7682/8517 11356/12525 15835/16670 15/18 40/47 82/97 160/182 271/300 400/442 560/589 Rotation speed rpm 3000/3600 Ultim. pressure* (50 Hz) maximale mbar torr 4.10-2 3.10-2 Ultim. pressure* (60Hz) maximale mbar torr 1.10-2 7 x 10-3 Max. cont.
A 70 Technical characteristics Dimensions Standard version Inlet G H F E ASPIRATION Exhaust REFOULEMENT 95 I J D B A C DIMENSIONS IN MILLIMETERS ADP ADP ADS ADS ADS ADS ADS 31 81 151 301 501 801 1001 A B C D E F G H I J 1027 1177 1177 1177 1177 1368 1510 975 1125 1125 1125 1125 1331 1445 340 340 398 398 398 398 398 170 170 199 199 199 199 199 680 680 875 875 875 960 1050 650 650 830 830 830 913 945 350 375 520 520 520 650 720 711 711 909 909 909 995 1050 250 250 278 278
A 70 Technical characteristics Dimensions Modular version INLET INLET 200 F G B A 45 EXHAUST J C E 15 H D I DIMENSIONS IN MILLIMETERS PUMP Edition 04 - May 98 ADP ADP ADS ADS ADS 31MD 81MD 151MD 301MD 501MD A B C D E F G H I J 557 557 733 805 805 794 861 861 290 290 290 290 290 160 160 160 160 160 320 320 320 320 320 710 710 710 710 710 400 400 400 400 400 135 135 135 135 135 730 840 840 840 840 223 223 223 223 223 DIMENSIONS IN INCHES PUMP ADP ADP ADS ADS ADS 31MD 81M
B 00 Safety instructions • The machines must be connected to an electrical installation in compliance with the decree 88-1056 dated 14 Novembre 1988. • Our products are designed to comply with current EEC regulations. Any modification of the product made by the user is liable to lead non-compliance with the regulations, or even to put into doubt the EMC (ElectroMagnetic Compatibility) performance and the safety of the product. ALCATEL declines any responsability for such operations.
B 00 Safety instructions • The EMO device is a pump EMO, not a system EMO, so it shuts only this part of the equipment. To allow the pump to start, turn the EMO button clockwise and pull it. To control the system EMO, it is necessary to wire the corresponding contacts on the "Emergency" plug (see B 140). Either, you can stop the pump from the system EMO by wiring the terminals on "Remote" connector (see B 140).
B 10 Unpacking / Storage Risk of tilting: Even when compliance with EEC safety rules is guaranted (normal range ± 10°), it is recommended to take precautions as regards the risk of tilting during product handling, installation and operation. C A Outer crate Inner crate B Pump (Standard) Palett mm ± 50 (inch ± 2) B C A ADP 31/81 SD and MD 1350 (53) 500 (38) 980 (19.7) ADS 151/301/601 St and MD 1350 (53) 1150 (45) 520 (20.1) ADS 801/1001 1900 (74.
B 10 Unpacking / Storage For all equipment handling, use the devices provided for this purpose (lifting rings, handle, etc.) . Prepare the pump It is highly recommended to used a hoist. Lift the pump by its three hoisting rings. Apply just enough upward tension to take the weight off the base of the pump.
B 20 Positioning the pump in the pumping installation • Pump performance will depend on the kinds of accessories used and the quality of the mechanical connections such as pump fittings. • As these pumps are typically used in a corrosive atmosphere, their reliability will depend on proper installation and maintenance. When assembling the vacuum circuit, make sure to provide necessary maintenance accessories such as shut-off valves on the inlet, exhaust, and purge lines.
B 20 Positioning the pump in the pumping installation Remove pump covers • Unfasten the toggle joints located on the top of the cover (1). • Unfasten the lateral fastening and raise the cover by the handles (2).
B 20 Positioning the pump in the pumping installation Risk of tilting: Even when compliance with the EEC safety rules is guaranteed (normal range ± 10°), it is recommended to take precautions as regards of the risk of tilting during product handling, installation and operation. Removing the shipping braces • The shipping braces hold the pump to the frame during shipment. They are painted yellow, for easy identification. Release the pump(s) from the frame before use.
B 30 Installing anti-vibration pads (Accessories) Anti-vibration pads ADP/ADS Standard version The ADP/ADS pumps can be equipped with anti-vibration pads which are mounted beneath the pump, near the locking feet. • Remove the covers as described in section B 20. • Raise the pump using the 4 screws jacks. • Screw into the previous holes the 4 anti-vibration pads. • Screw the screw jacks so that the machine rests on the pads. Force transmitted to the ground by each support: < 0.
B 40 Modular version - Layout Main modules layout (electrical box, flowmeter panel, water and gas utilities, customer interface) fit the customer choice among factory set configurations. Other layouts are possible, see the following page. Sensor box To modify the modules layout, some rules have to be followed : - Pump(s) cannot change its(their) orientation with respect to the frame. - The sensor box, located under the pump, has to be set facing the silencer.
B 40 Modular version - Layout 5 basics modules for 8 pumps configurations Exhaust Exhaust E A Inlet Inlet Pump block with frame F B Inlet Inlet Control box with integrated monitor G C Inlet Inlet OEM interface Utilities panel H D Inlet Inlet Some location examples EXHAUST POWER SUPPLY EXHAUST WATER & N2 SUPPLIES WATER & N2 SUPPLIES POWER SUPPLY MOTOR INLET MOTOR CONTROL BOX FLOWMETER PANEL CONFIGURATION A 2/2 CONTROL BOX CONFIGURATION F Alcatel - High Vacuum Technology -
B 50 Filling the machine oil housings Caution ! The pumps are delivered without an oil charge: the oil is found in separate containers. Similarly, it is recommended to drain the pump before redispatching the equipment. For machines wich use lubricants, it is recommended to request the manufacturer for the safety data sheets concerning the product used. The pump is tested using synthetic fluid Alcatel 113. When pumping corrosive gases, we recommend synthetic fluid Alcatel 113.
B 50 Filling the machine oil housings Location 1 2 3 4 5 1 - Filling front Roots housing 6 2 - Front Roots housing level sight glass 4 - ADP housing oil level sight glass 5 - Rear Roots housing filling 6 - Roots housing oil level sight glass 2/2 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS Edition 04 - May 98 3 - ADP filling
B 60 Connection to the cooling circuit Water characteristics In order to limit corrosion and fouling of the motor cooling coils, it is recommended to use cooling water with the following characteristics : ■ ■ ■ ■ ■ ■ ■ ■ Treated fresh water or non-aggressive industrial water pH between 7.5 and 11 Hardness < 7 milli-equivalent/dm3 Resistivity > 1500 Ω.cm Solid pollution < 100 mg/dm3 Temp.
B 60 Connection to the cooling circuit Modular version connections REAR VIEW N2 OUT N2 OUT IN IN Waterflowrate adjustment } Water IN/OUT N2 FLOW Flowmeter panel PRESSURE WATER FLOW Needle tap The water flow will be adjusted according to the processes with the needle tap (see section B120).
B 70 Inert gas purge connection (N2 plug) Nitrogen characteristics A filtered dry nitrogen supply is required. It should have the following characteristics : ■ ■ ■ ■ ■ Dew point < 22° C Dust < 1µ.m Oil < 0,1 PPM Pressure between 3 and 7 bar absolute. Flowrate per pump: 100 l/min.
B 70 Inert gas purge connection (N2 plug) N2 flowrate adjustment The N2 flowrate will be adjusted with the pressure regulator according to the process (see section B 120). The flowmeter is used to display the overall purge flow rate.
B 80 Nitrogen purge flow sensor Function Operation Location This sensor is used to warn the user when the N2 flow comes under a preset value during harsch processes using dangerous gases (SiH4 for example). The gas flow rate through the detector carries along a float which acts on the contact of the electrical box. This contact closes when the flow rate value is higher than the flow rate set on the sensor. Otherwise the contact opens and set off an alarm “PURGE FLOW“.
B 90 Connection to the pumping circuit In order to prevent moisture from entering the pump before its installation, it is pressurized beforehand with nitrogen and sealed with blank-off flanges. The vacuum pump is also a compressor: incorrect use may be dangerous. Study the user manual before commissioning the pump At the exhaust pump Preliminary precautions First of all, remove the plug at the exhaust.
B 90 Connection to the pumping circuit Exhaust connection At inlet pump DN40 ISO KF Pneurop. Several fitting accessories are available in Alcatel catalog. Make sure that the parts or containments connected to the inlet of our pumps withstand a negative pressure of 1 bar with reference to the atmospheric pressure. In order to prevent foreign bodies from entering the pump, leave the blank-off flange in place at the pump inlet and remove it at the time of use. (see section B 130).
B 110 Pump Power supply Study the preliminary precautions (See B 00) All the electrical connections required for operation have been done in the factory. However, the user must make the electrical connection of the main power supply, connect the remote monitoring system options.
B 110 Pump Power supply Standard version The pump is supplied with a female connector which is connected to the electrical connector at the lower part of the frame. Connect the mains to the power supply connector using a 4 x 4 mm2. Then connect the connector on the pump frame. Ground phase 3 phase 2 phase 1 Y/G Female connector (6 pins + Ground) Rear of pump Check the rotational direction of the pump at the first pump start-up (See section B 130).
B 110 Pump Power supply Connectors of remote set electrical box Remote set electrical box is connected by means of a 5 meters extension cable. 1 3 2 4 7 8 6 5 1 Mains connector 2 Roots supply (ADS) 3 Remote control 4 Sensors information (n° 1) 5 RS 232 / RS 485 6 Interface connector 7 ADP supply 8 Sensors information (n° 2) Edition 04 - May 98 Check the rotational direction of the pump at the first start-up (See B 130).
B 120 Water flowrate and gas purge according to main semiconductor processes 100l/h non CVD non CVD non CVD No *20l/mn (0.2 bar) No 25l/mn (0.3 bar) 25l/mn (0.3 bar) 100l/h 60l/h 60l/h non CVD 25l/mn (0.3 bar) 60l/h non CVD 35l/mn (0.6 bar) 40l/h non CVD non CVD non CVD non CVD CVD CVD 35l/mn (0.6 bar) 35l/mn (0.6 bar) 45l/mn (1 bar) 35l/mn (0.6 bar) 50l/mn (1 bar) 50l/mn (1 bar) 60l/h 40l/h 100l/h 60l/h 60l/h 60l/h CVD 50l/mn (1 bar) 60l/h CVD 70l/mn (1.5 bar) 40l/h CVD CVD 70l/mn (1.
B 120 Water flowrate and gas purge according to main semiconductor processes “TC“ Pump setting • Silicon oxide and doped oxide (BPSG) PECVD using TEOS • Silicon oxide and doped oxide (BPSG) LPCVD using TEOS • Silicon nitride PECVD • Silicon nitride LPCVD cold trap at the oulet of the furnace can be useful - no heating of the line between the cold trap and the pump. * Should the layer be thick (>1500A), please contact Alcatel Worldwide Technical Support for dry pumps.
B 130 Checking the rotational direction Study the preliminary precautions (See B 00) Before using the pump, check that the connections defined in the start-up chapter have been made. Also, make sure that all the oil levels are visible at the center of the indicator. • Remove the guards blocking the intake and exhaust (and, if applicable, purge) holes; these components prevents foreign bodies from entering the pump during transport and storage. It is dangerous to leave them on a pump in operation.
B 140 Remote control plug connection (M3 monitoring) Study the preliminary precautions (See B 00) When units containing control circuits are equipped with dry contact outputs, it is the responsibility of the customer to use these outputs in compliance with safety standards. Remote control function allows to : • Remote control of pumping functions “START/STOP/Emergency stop/PURGE”. • Copy out with dry contacts (250V - 1A - 100VA) the monitoring parameters. These contacts can be used to control automatisms.
B 140 Remote control plug connection (M3 monitoring) 0V Control (Inputs) Monitoring system M3 17 1 18 19 20 21 22 23 41 34 Wiring customer supplied 24 33 25 47 44 50 Arrêt d'urgence Emergency stop S1 S2 S3 S4 +12V NOTE : The contact is considered to be closed if the DC voltage between 5 and 30 V is applied. These contacts can be supplied by terminals 47 (OV) and 49 (+12V).
B 140 Remote control plug connection (M3 monitoring) Available outputs of Monitoring system M3 Dry contacts : 250 V - 1 A - 100 VA Contact These contacts open in the presence of a fault.
B 141 Remote control plug connection (M1 monitoring) Study the preliminary precautions (See B 00) When units containing control circuits are equipped with dry contact outputs, it is the responsibility of the customer to use these outputs in compliance with safety standards. M1 Monitoring system M1 Remote monitoring Remote control «REMOTE» Remote control function allows to : • Remote control of pumping functions “START/STOP/Emergency stop/PURGE”.
B 141 Remote control plug connection (M1 monitoring) Emergency stop Arrêt d'urgence With external power supply : 13 12 25 - 24 11 10 9 8 23 22 21 20 7 6 5 4 19 18 17 3 2 1 16 15 14 + 24V Dry contacts : 250 V - 1 A - 100 VA These contacts open in the presence of a fault. Two contacts available for each fault type.
B 141 Remote control plug connection (M1 monitoring) M1 Monitoring system on modular ADP Remote control «REMOTE» If the remote control is not used, put (REMOTE plug) the cover plug wired like : 1 2 18 19 3 4 5 6 7 8 9 13 14 15 16 17 10 11 12 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 Control (Inputs) Monitoring system M1 Without inhibition of remote control buttons : 1 2 18 19 3 4 5 46 47 48 49 50 ON Marche 6 7 8 9 10 11 12 20 21 22 23 24 25
B 141 Remote control plug connection (M1 monitoring) With external power supply : 1 2 3 18 19 4 5 6 7 8 9 13 14 15 16 17 10 11 12 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 - + Arrêt d'urgence Emergency stop 24VDC Dry contacts : 250 V - 1 A - 100 VA These contacts open in the presence of a fault. Two contacts available for each fault type.
B 150 RS 232 or RS 485 link wiring At the first power-on, the user will find the initial configuration set at factory. The settings can be modified through the M3 corresponding menu.
B 150 RS 232 or RS 485 link wiring Examples of possible connection Link RS232 with a single monitoring system M3 Multiple serial link RS232 1 1 6 6 5 9 5 9 Several M3 monitoring systems may be connected on a single link. The multiple link is obtained by creating a loop: 6 6 9 1 5 6 9 1 5 6 9 1 5 9 1 5 6 1 6 9 5 1 6 9 5 1 9 5 Connect terminals 7 and 8 when the monitoring system is at the end of the line.
B 170 Installation of silencer heating kit Consult the safety instructions (see B 00) To avoid the condensation of pumped gases, and therefore, the clogging of the silencer during the pump operation wich processes such as: Aluminum etching, Polysilicon, LPCVD or PECVD Nitrid, Alcatel proposes a silencer heating kit including: • two heating belts (1) • two insulation sleeves (2) • a connection box (3) • a mains cable (4).
B 170 Installation of silencer heating kit Installation and electrical connection During the silencer heating kit installation, take all the necessary precautions regarding the pumped gases before to open the exhaust circuit of the pump. Refer also to the safety instructions related to maintenance Section D 00. The electrical power supply of the kit is not monitored by the M3 controller (in case of an emergency stop, the belt stays powered). Take the necessary precautions related to electrical safety.
C 10 Start-up of the M3 monitoring system Study the safety instructions (see B 00) The keyboard is used to control the pump and configure the parameters. The pump’s manual control keys are located Manual control manuel keys Touches de pilotage on the top line of the keyboard.
C 10 Start-up of the M3 monitoring system The M3 monitoring system has been configured in the factory according to the options and accessories defined during the order. Action / Observations Display / Observations Power ON : (Main switch of M3 to I) Display of the pump running time, the pump status and the date when the monitoring have been set for transport.
C 10 Start-up of the M3 monitoring system Setting / Observations Initializing the equipment by updating the clock. Action / Observations Press the key repeatedly to have access to the SETTING MENU Validate with the key With the key move through the menu to DATE/TIME Validate with the key Display / Observations ENTER ENTER Decrease or increase the selected parameter using the keys Edition 04 - May 98 PURGE PRESS.
C 20 Setting the M3 monitoring system parameters Edition 04 - May 98 Purpose of sensors Purge sensor Signals insufficient gas purge during an alert time, and stops pumping at the end of the alarm time. Signals exhaust overpressure when the pressure reaches 1450 mbar (silencer clogged) and stops the pump at 1990 mbar.
C 20 Setting the M3 monitoring system parameters Summary table of monitoring parameters Max. and Min. thresholds : SENSORS UNIT THRESHOLD FACTORY CONFIGURATION Mini Maxi mbar 600 min 0 Purge sensor Alert 900 60 { 0 < 20° > 160° Alarm 860 Disabled - Gas temperature sensor °C 0 170 Pump θ° sensor (TC)* °C 20 130 110 120 Motor power sensor W 500 5000 2500 4000 E. analogical sensor mV 0 E1. logic sensor min 0 60 Disabled Disabled E2.
C 30 M3 Monitoring system function table Initial configuration (bold) DEFINITION INLET VALVE OPTION ANA. INPUT SELECT E1 LOGIC INPUT E2 LOGIC INPUT SYSTEM SELECTION AUTOMATIC RESTARTING ROOTS CONTROL BUZZER CONTROL SELECT. PURGE CONTROL SELECT.
C 30 M3 Monitoring system function table Other menus next page PURGE FLOW SENSOR Alert time Alarm time TEMP. SENSOR If Thermo controlled “Disabled“: Alert 1 threshold Alert 2 threshold If Thermo controlled “valid“: Alert threshold Alarm threshold 0 to 60 min/Disabled 0 to 60 min/Disabled 0 to Alert 2 Alert 1 to 170° C 20° to Alarm threshold Alert threshold to 130°C ADP POWER SENSOR Alert threshold Alarm threshold 500 to Alarm threshold Alert to 5000 W ANA.
C 30 M3 Monitoring system function table MAINTENANCE MENU OPERATING TIME MAINTENANCE TIME OVERHAUL ADP ADP LP BEARINGS INSPECT SILENCER OVERHAUL ROOTS 1000/34000 1000/17000 1000/17000 1000/34000 h h h h Initial Config : 8500 h 8500 h 2500 h 8500 h DISPLAY STORAGE CHANGE CODING INPUT THE NEW CODE: Using and Edition 04 - May 98 input the new code and valide with LAST ALERTS DISPLAY LAST 10 ALERTS LAST ALARMS DISPLAY LAST 10 ALARMS CONFIGURATION LIST OF CUSTOMIZED PARAMETERS key, ENTER ( Te
C 40 Use of the M3 monitoring for pumping operation Study the safety precautions (voir B 00) Check the rotational direction of the pump, upon first start-up (See B 130) STOP SET START PURGE ROOTS ENTER The performances and the operational safety of this product are guaranteed provided that it is used in normal operating conditions. • Pre-adjustements : - to ensure a gas purge as soon as the pumping starts, set the ‘’Select.
C 40 Use of the M3 monitoring for pumping operation Operation monitoring During operation, the user is warned of an operating incident by : - one or more fault are displayed on the screen, alternating with monitoring parameters. When these faults are parameter programmable, the monitoring system triggers the alert phase followed by the alarm phase. The period for these phases is programmable. - indicators light and buzzer sounded, if option selected.
C 50 Use of the M1 monitoring system Study the safety precautions (see B 00) For the first pump start-up, check the rotational direction of the pump (see B 130) Pump equipped with the M1 monitoring system and in local mode • Set the main switch to I, actuate the START switch : the pumping starts, the water valve opens and the green indicator light goes on. (The hour counter is only increased when the pump is operating). • Adjust the water flow rate (see section B 120).
C 50 Use of the M1 monitoring system The remote control function is performed by means of the “REMOTE” remote control connector at the rear of each fixed monitoring unit. It is used for : • The remote control of the pump “START/STOP/ Emergency Stop” functions. • Copying monitoring parameters in dry contact form (250 V - 1 A - 100 VA). These contacts may be used for controlling automatic control systems. (see section B 140).
D 00 Safety instructions related to maintenance This chapter describes the main preventive maintenance operations and provides a guide for first diagnosis in the event of an incident. Standard precautions before any maintenance operation : Before performing a maintenance operation, switch off the pump by setting the main switch to “0” and disconnect the mains cable.
D 00 Safety instructions related to maintenance • Certain gases can become corrosives and toxic when trapped in oil. Always wear protective gloves when handling used and dirty pump oil, drain it into a closable container, and do not breathe the fumes of the oil. Always use fully self-contained breathing apparatus. • When the silencer is maintained, avoid any contact with the reaction by-products (deposit, powder..) strongly corrosive: wear gloves even a breathing mask.
D 10 First level of maintenance Study the safety instructions related to maintenance (See D 00).
D 10 First level of maintenance Preventive maintenance with monitoring system M1 The overall operating time of the machine can be read on the front of the monitoring units (M1). This is also used to calculate the operating time of the various components which require maintenance. The replacement frequency of certain components depends directly on the type of process used.
D 20 Maintenance frequency Edition 04 - May 98 ADP 31 - ADP 81 Roots 151 - 301 - 601 Roots 1001/1501 C B A Description 8500 H 13000 H 25000 H For processes 1 (See section B 120) Time required Equipment required Part Description number LP bearing replacement Minor kit 30 min (31/81) Full overhaul 10 H* Major kit (31) 12 H* Major kit (81) ALCATEL 113 oil (0.
D 20 Maintenance frequency Time required Equipment required Part Description number Silencer cartridge control (1) 15 min Silencer cartridge 040095 LP bearing replacement Minor kit 30 min (31/81) 090576 Full overhaul 10 H* Major kit (31) 12 H* Major kit (81) ALCATEL 113 oil (0.
D 20 Maintenance frequency ADP 31 - ADP 81 Roots 151 - 301 - 601 Roots 1001 - 1501 Edition 04 - May 98 C B A Description 2100 H 4200 H 8500 H For processes 3 (See section B 120) Tme required Equipment required Part Description number Silencer cartridge control 15 min Silencer cartridge 040095 LP bearing replacement Minor kit 30 min (31/81) 090576 Full overhaul 10 H* Major kit (31) 12 H* Major kit (81) ALCATEL 113 oil (0.
D 30 Diagnosis and troubleshooting D 40 The pump is running and then is showing an alert or alarm message (followed by the pumps stopping) . . . . . . . . . . D 50 The pump is running (no message) . . . . . . . . . D 60 Edition 03 - May 97 Pump does not start . . . . . . . . . . . . . . . . . . .
D 40 Pump does not start INCIDENT CAUSE The display is not lighting up or no display No mains TROUBLESHOOTING Check power supply NO Isolating switch is off NO CB1 breaker switched off Switch it on Version before 96/12: Push on the red button untill zero and release. Since 97/01 Push on the blue button untill zero.
D 40 Pump does not start INCIDENT CAUSE TROUBLESHOOTING Pressing on “Start“ does not start-up the pump Roots is not running Bad M3 configuration Configure for “ADS“ and/or disable Roots NO Command “Roots valid“ not programmed Check the setting NO Press on key “Roots“ Roots does not run and “Roots“ message is displayed No * presence near Roots Check presence or connect jumper plug RP NO “Roots “J3 plug bad connected Check the connection ADP does not run Problem on M3 Call Alcatel customer
D 40 Pump does not start INCIDENT CAUSE TROUBLESHOOTING Pump in storage mode Set the main switch on “0“, then set it again on “1“. On Remote mode Check the connection of J7. See section B 140. Messages on the display Message “STOCK“ Message “REM“ No RP plug or bad connection NO Alarm “Breaker KM2“ Problem on M3 Call Alcatel customer service Roots KM2 Contactor Check the condition and the connection of the contactor (See D 70 ).
D 40 Pump does not start INCIDENT Alarm “Breaker KM1“ CAUSE TROUBLESHOOTING ADP KM1 Contactor Check the condition and the connection of the contactor (See D 70 ). NO Alarm “Breaker EMO“ Emergency switch Switch it on (See D 70 ). NO Exhaust pressure ≥ 1450 mbar “Starting phase“ Main power is not correct No message displayed on the screen 4/4 Problem on M3 See D 80 Check the main power.
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT Alert “Pressure“ CAUSE Exhaust pressure = 500 mbar TROUBLESHOOTING Check the connection (See D 80) NO See D 80 Exhaust pressure > 1990 mbar See D 80 Edition 04 - May 98 Alert “Pressure“ Exhaust pressure > 1450 mbar Alcatel - High Vacuum Technology - User’s Manual ADP/ADS 1/9
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Gas Temp.
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Water flow“ Alert CAUSE Insufficent water flow TROUBLESHOOTING See D 110 NO Sensor not connected Check the connection NO Edition 04 - May 98 Sensor out of order Call Alcatel customer service Unreadable flowmeter graduation (blocked ball) Deposits in the flowmeter Clean the flowmeter “Power supply“ Alert Mains voltage variation (± 15%) Check the voltage NO Problem on M3 Alcatel
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Pump temp.“ Alert CAUSE Pump θ higher than alert threshold TROUBLESHOOTING See D 91 NO “Pump temp.
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Motor temp.“ Alert θ ADP motor ≥ 52° CAUSE Cooling problems TROUBLESHOOTING See D 110 NO ADP mechanical problems See E 50 NO Defect does not disappear “Motor temp.
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT CAUSE TROUBLESHOOTING Alert or alarm “Purge N2“ Alert and alarm are switched on according to the delays programmed in M3 configuration Without flow purge sensor option Exhaust pressure P = 500 mbar See D 80 NO See D 80 No nitrogen See D 80 Edition 04 - May 98 With flow purge sensor option 500 mbar < P < Pres.
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Analogic input“ Alert or alarm CAUSE Valid input after configuration and not used TROUBLESHOOTING Reset M3 configuration NO Problem on the display/voltage Thresholds not properly set Check the corresponding voltage (See D 130) Set the thresholds NO Connection problems Edition 04 - May 98 “E1 logic“ or “E2 logic“ Alert or alarm Valid input after configuration and not used Check the co
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Valve option“ Alert CAUSE Valid option after configuration and not used TROUBLESHOOTING Reset M3 configuration NO Valve does not close when pump is stopping Check the compressed air supply. Check the valve condition.
D 50 The pump is running and then is showing an alert or alarm message (followed by the pump stopping) INCIDENT “Variator“ Alert CAUSE Valid option (ADP 81V, ADS 801/1001 or ADS 501V) when it is not necessary TROUBLESHOOTING Reset M3 configuration. NO Pump is stopped Check variator parameter on ADS 801.
D 60 The pump is running - No message INCIDENT Bad vacuum or no vacuum CAUSE TROUBLESHOOTING Polluted or filled in pumps Maintenance ADP Call Alcatel customer service NO Mechanical noise Internal oil leaks Maintenance ADP Call Alcatel customer service Damaged ball bearings Maintenance ADP Call Alcatel customer service NO Rotors seizing Maintenance ADP Call Alcatel customer service NO Edition 04 - May 98 Unsynchronized gears No N2 purge Bad configuration Alcatel - High Vacuum Technology -
D 70 “Breaker …“ Alarm “Breaker KM2“ Alarm Roots KM2 Contactor “Breaker RT1“ Alarm ADP RT1 Breaker • Check the breaker CB2, on M3 rear panel • If the message still remains, call Alcatel customer service RT 1 breaker is not in position 1 NO No wattmeter plug and its strap between 4 & 6 - Check its position - Check ADP mechanical condition (See E 50) - Check that the silencer is not clogged (See E 30).
D 70 “Breaker …“ Alarm “Breaker KM1“ Alarm ADP KM1 contactor • Check CB2 breaker at the rear of M3. (see D 10 ). • Check the strap presence between the pins 41, 42, 43 and 44 on remote plug. (see B 140). • If the defect still remains, call Alcatel customer service. “Breaker EMO“ Alarm Emergency stop • Check that the emergency stop button is not tripped (unlock it by rotating 1/4 of turn). Edition 04 - May 98 • If the defect still remains, call Alcatel customer service.
D 80 “Pressure“ Alert and alarm “N2 Purge“ Alert and alarm Exhaust pressure higher than threshold “Pressure“ Alert and alarm • Check the nitrogen pressure setting according to section B 120. • Check that the silencer, the pipe to exhaust are not clogged. Edition 04 - May 98 • If the defect still remains, call Alcatel customer service.
D 80 “Pressure“ Alert and alarm “N2 Purge“ Alert and alarm Exhaust pressure level between 500 mbar and threshold set “N2 Purge“ Alert and alarm Without Nitrogen flow sensor option - Either check the connection, the display and nitrogen pressure setting (idem exhaust pressure too high see page 1/2). - If there is no N2 pressure, check nitrogen supply, connections, electrovalve and the coil and its connection.
D 90 “Gas temp.“ Alert - Check the thresholds. - Check the flowrate, the kind and the concentration of pumped gases. - Check that the exhaust pipe is not clogged. - Check the display : • θ ambient when pump is stopped. • θ : 100°C in continuous operation. - Check the wiring and the sensor : the resistance between pins 1 & 2 of J6 must be between 100 and 160 Ω.
D 91 “Pump temp.“ Alert - Check the thresholds. - Check the display : • θ ambient when pump is stopped. • θ : 100°C in continuous operation. - Check the wiring and the sensor : the resistance between pins 1 & 2 of J6 must be between 100 and 160 Ω. (J6 unpluged) • • • • • • 0°C 20°C 50°C 80°C 100°C 157°C : : : : : : 100 Ω 107,8 Ω 119,4 Ω 130,9 Ω 138,5 Ω 160 Ω - Check the cooling circuit. Edition 01 - May 98 - If the sensor is OK, there is another problem on the M3: call Alcatel customer service.
D 100 “Consumption“ Alert and alarm Consumed power higher than alert or alarm thresholds - Check the threshold setting. - Check the flowrate, the kind and the concentration of pumped gases. - Check that exhaust pipe are not clogged. - Check that there is no mechanical problem (seizing), or filling in in the pumping line. - Check LP bearings. - Check the rotational direction of the pump. - If the incident is still present, call Alcatel customer service.
D 110 “Water flowrate“ Alert CAUSE Insufficent water flow TROUBLESHOOTING - Check the flowmeter setting according to section B 120. - Check that the electrovalve, the flowmeter or the pipes are not clogged. - Check that there is no leak. No water flow - Either check the water supply and the connections. - Check the connection and the water valve coil condition.
D 120 “Motor temp.“ Alert or alarm ADP motor temperature higher than the thresholds - Check the water flowrate in the pump (see D 110). - Check the motor temperature. Case of an alert - Check the sensor and the wiring by shunting pins 21 & 22 of J5. The defect disappears Remake the wiring or change the sensor NO Problem on M3 Case of an alarm Call Alcatel customer service. - Check the sensor and the connection by shunting pins 19 & 20 of J5.
D 130 “Analogic input“ Alert or alarm Wiring or display problem Check the threshold setting See C 30 Check the display according to the DC input voltage between pins 14 & 15 of J6 (15 = 0V) Call Alcatel customer service.
D 140 “E1 logic“ Alert or alarm or “E2 logic“ Alert or alarm Sensor or connection problem E1 logic Check the threshold setting See C 30 Shunt the sensor The defect disappears NO Problem on M3 E2 logic Call Alcatel customer service. Call Alcatel customer service. Unplug the sensor The defect disappears Edition 04 - May 98 Remake the wiring : it must be continuity between pins 11 and 12 of J5. Check the sensor status. Remake the wiring : it must not be continuity between pins 23 and 25 of J5.
D 150 “Valve option“ Alert and alarm Contact problem Alert Check the configuration of M3 parameters ( See C 30) Check the wiring by shunting pins 7 & 8 of J5. No defect at pump stop Remake the wiring and check valve contact condition. NO Problem on M3 Alarm Call Alcatel customer service. Check the wiring by shunting pins 5 & 6 of J5. No defect at pump start up Remake the wiring and check valve contact condition. NO Call Alcatel customer service.
D 160 “Variator“ Alarm Check the configuration of M3 parameters (See C 30) Configure on ADS 801/1001, ADS 501V or ADP 81V NO Call Alcatel customer service.
E 20 Pump draining (Roots : front and rear casings) Study the safety precautions before intervention. (See sheet D 00) Certain gases become corrosive and toxic when trapped in oil. Always wear protective gloves when handling used and dirty pump oil, drain into a closable container, and do not breathe the fumes of the oil. Always use fully self-contained breathing apparatus.
E 30 Silencer maintenance Consult the standard precautions before intervention - see Section D 00 For quicker interventions and special precaution during cleaning, it is recommended to replace all the parts (equipped silencer and outlet tube) and repair the replaced parts on a bench. When the silencer is maintained, avoid any contact with the reaction by-products (deposit powder..) strongly corrosive : wear gloves even a breathing mask.
E 30 Silencer maintenance Refer to the special precautions before any intervention - see Section D 00 PART CLEANING AND CARTRIDGE REPLACEMENT ,,,,, ,,,,, Complete silencer (with cartridge)- Part No.: 100210 1 ■ Parts to be replaced Silencer maintenance kit 2 3 4 5 6 Part No. 040095 (items 2, 3, 4) Separate the outlet tube from the silencer. Remove the cover assembly.
E 30 Silencer maintenance RESSETTING MAINTENANCE PARAMETERS AFTER SILENCER MAINTENANCE OPERATION When the maintenance of an element has been done, it is necessary to reset its meter to stop the warning and reset the functionnal delay of this element.
E 50 Freeing up the ADP If, after a prolonged stop, the ADP does not restart using the function START because of sub-products deposed inside the pump, it is possible to free it up manually. Consult the standard precautions before intervention. (See Section D 00) • ACCESS THE DRIVING SHAFT BEARING Remove the protective cover (1) and remove the O-ring by removing the three M4 x 10 CHc screws.
