User guide

NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
8 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
Dimensions
NT® Integrated Flow Controller with DeviceNet™ Communication
FITTING A B C D
1
⁄4″ 4.63″ 4.89″ 0.76″ 9.60″
F02 (117.5 mm) (124.2 mm) (19.4 mm) (243.8 mm)
3
⁄8″ 4.63″ 4.89″ 0.76″ 9.75″
F03 (117.5 mm) (124.2 mm) (19.4 mm) (247.7 mm)
1
⁄2″ 4.72″ 4.98″ 0.85″ 9.91″
F04 (119.9 mm) (126.5 mm) (21.6 mm) (251.7 mm)
3
⁄4″ 5.02″ 5.28″ 1.01″ 10.15″
F06 (127.5 mm) (134.1 mm) (25.7 mm) (257.8 mm)
7.78″ (197.6 mm)
8.53″ (216.7 mm)
9.05″ (229.9 mm)
D
0.28″ (7.1 mm)
1.85″ (47.03 mm)
Flared nut (2)
A
B
C
2.58″
(65.5 mm)
2.87″ (72.9 mm)
ENT48906 10/15/04 8:12 AM Page 8