User guide

Mount the Unit
The flow controller and base
bracket assembly must be
mounted to a solid surface
to ensure stability. Verify the
valve and the electrical cable
are free from mechanical stress
from the surrounding equipment.
NOTE: The flow controller
requires mounting in the
direction of the fluid flow.
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
10 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
Mounting Requirements
The flow controller may be mounted
in any orientation. The unit does not
require straight lengths of tubing at
the inlet or the outlet connection.
Recommended hardware
#10 (M4)
Pan head
#10 (M4)
Flat washer
ENT48906 10/15/04 8:12 AM Page 10