User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
Mechanical Installation
The standard NT
®
Integrated Flow
Controller must be used with the
proper tubing size and fittings.
To prepare the fluid lines, begin by
sliding the supplied nuts onto the
fluid tube.
NOTE: Flare each tube end prior to
installation onto the valve fitting.
CAUTION!
Over-tightening of the nuts will
result in damage to the fitting.
Prepare Fluid Lines
Connect Fluid Lines
Process fluid tube
Process fluid tube
Flare each tube end
prior to installation
Slide the nut onto the tube
ENT48906 10/15/04 8:12 AM Page 11