User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
FUNCTION PIN ASSIGNMENT COLOR
Drain 1 Bare wire
V+ 2 Red
V- 3 Black
CAN_H 4 White
CAN_L 5 Blue
LSD
MSD
Data rate
DeviceNet
TM
Cable
Cable materials are constructed
with 22 AWG wire and a PVC jacket.
The connector is a 5-pin, micro-style,
12 mm, male type.
NOTE: The allowable torque on the
8-32 ×
1
⁄2” PVDF screws used to
secure the clear switch access cover
is 7 Newton-centimeters.
ENT48906 10/15/04 8:12 AM Page 13