User guide

Unit Operation
Operating Environment
Operating Temperature
The flow controller is designed to
operate in ambient temperature,
cleanroom environments. The unit
is specified to operate at tempera-
tures between 50° and 149°F (10°
and 65°C).
When the process fluid is above
ambient temperatures 73°F (23°C),
the system will experience slight
accuracy errors due to instrument
warm-up and changes in viscosity
and specific gravity of the liquid.
The unit must be re-zeroed after
any temperature change. Please
see the Maintenance Section on
page 19 to perform the re-zero.
Effects of Fluid Viscosity and
Specific Gravity
The flow controller has been factory
calibrated using deionized water.
Fluids with viscosities and/or specif-
ic gravity different from the calibra-
tion fluid (water) will cause slight
accuracy errors. Correction factors
for viscosity and specific gravity
changes may be obtained from
Entegris by calling or following the
sensing and control product links at
entegrisfluidhandling.com.
Power-up Characteristics
When power is first applied to the
flow controller, the flow will be
within 2% of the set point value in
less than 10 seconds and within
specification after 5 minutes. As
part of the power-up routine, the
unit will perform a homing routine
that re-establishes the unit’s fully
closed position. This routine requires
the valve to shut completely for no
more than 8 seconds, then to the po-
sition dictated by the set point input.
Unit Enclosure
The standard NT
®
Integrated Flow
Controller cover is factory sealed
and should not be tampered with or
opened. Spray-down or temporary
immersion will not compromise the
performance of the unit.
NOTE: Any attempt to remove,
tamper or open the flow controller
cover will void the warranty.
Performance
Operating Pressure Requirements
The flow rate is calculated using
Entegris’ differential pressure flow
technology. The minimum operating
pressure is 10 PSIG (69 kPa). The
minimum pressure drop (differential
pressure) required for the flow con-
troller is 10 PSID (69 kPa).
CAUTION!
The flow controller may be
damaged if it is subjected to
any level of vacuum pressure
(less than atmospheric pressure).
NOTE: To perform within specifica-
tion, the available inlet pressure
must be 10 PSID (69 kPa) greater
than the outlet pressure (10 PSID
[69 kPa] differential pressure).
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
14 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
ENT48906 10/15/04 8:12 AM Page 14