User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
Flow Accuracy
The accuracy of the flow measure-
ment is ±1% of full scale from 20-
100% of the flow range. The accuracy
of the flow measurement is ±2.5% of
full scale from 10-20% of the flow
range. The accuracy specification in-
cludes the effects of linearity, hys-
teresis and repeatability, using
deionized water at 73°F (23°C). The
accuracy between 0-10% of full scale
flow range is not specified.
Flow accuracy is verified by testing
the unit at stable conditions for a
period of 20 seconds or longer.
To meet the accuracy specification, a
re-zero is required for every 10 PSIG
(69 kPa) change in line pressure.
Response Time
Response time is defined as the
length of time required for the mea-
sured flow rate to be within the full
scale (FS) accuracy specification.
The typical response time is within
3 seconds.
The flow controller will respond to
set point changes within 50 msec of
receiving the new set point value.
When power is first applied to the
unit, such as during a start-up
sequence, the flow rate will be
controlled to within 1% FS of the
set point value within 10 seconds.
Pressure Measurement Accuracy
The accuracy of the pressure output
is ±1% of full scale. These calcula-
tions include the effects of linearity,
hysteresis and repeatability, mea-
sured at 73°F (23°C).
Minimum Operating Pressure
The unit will operate within specifi-
cation at any inlet pressure within
the range of 10-60 PSIG (69 to 414
kPa) and a minimum pressure drop
of 10 PSID (69 kPa).
Pulsating Inlet Pressure
Some applications use pumps (di-
aphragm pumps for example) that
can cause significant and rapid
change in pressure. The flow con-
troller shall meet the accuracy speci-
fication under the following condi-
tions: pressure pulsation frequency
0-2 Hz, pressure pulsation amplitude
10 PSIG (69 kPa) and 60 second
batch test.
Temperature Increase of Flow
Controller Enclosure
The temperature increase within the
unit enclosure will be less than 86°F
(30°C). The temperature increase at
the exterior of the unit cover will be
less than 77°F (25°C).
The temperature increase of the
process fluid will be less than 5°F
(3°C) at 10% of flow and less than
0.9°F (0.5°C) at 100% of flow range
for T1, T2, T3 and T4 flow ranges.
For all other flow ranges, the tem-
perature rise of the process fluid is
negligible, less than 0.9°F (0.5°C),
at all flows. Under extended static
flow conditions (i.e., no flow for >24
hours) the temperature increase of
the process fluid will be less than
27°F (15°C).
ENT48906 10/15/04 8:12 AM Page 15