User guide

NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
16 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
Warm-up Time
The flow controller requires a warm-
up time of 10 minutes after power is
applied. Warm-up time is typically
not required if the unit was operated
within 3 hours.
Reliability Information
Redundant Process Seals
All internal process wetted seals are
redundant, i.e., there is a secondary
seal that prevents process fluid from
reaching the interior of the device in
the case of a primary seal failure.
Weep holes are provided from the
secondary containment regions.
Long-term Reliability
The valve system can withstand
3.5 million open/close cycles before
the control performance is compro-
mised.
Enclosure Integrity
Momentary immersion and spray
down of the flow controller will not
affect the performance per NEMA 5
and IP56.
Drop and Topple
If the unit topples over from a 45-
degree angle onto a bench top, the
performance will not be compro-
mised and the unit will not be exter-
nally damaged.
Cable Pull
The cable will withstand a static pull
test of 20 lbs (9.1 kg) straight and
10 lbs (4.5 kg) at 90 degrees without
being damaged.
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