User guide

NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
20 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
Reference
PART CONSTRUCTION MATERIALS
Wetted parts:
Body: PTFE
Diaphragms: PTFE
Sensor interface: PFA or CTFE
O-rings: Kalrez® 4079
Nonwetted parts: Polypropylene cover and base plate, Viton® plugs
Connection type: Flaretek® tube fitting
Enclosure: NEMA 5/IP54
Power Cable Specifications
DeviceNet
TM
Cable Specifications
Input voltage: 24 VDC, ±10%
Input current: 1.0 A nominal, 1.2 A peak
Electrical connection: 6′, 12′ lengths with 22 ga wire
PVC-jacketed wire
Input voltage: 24 VDC, ±10%
Input current: 150 mA nominal
Electrical connection: 6′, 12′ lengths with 22 ga wire
PVC-jacketed wire
NOTE: Specifications are subject to change without notice. Please consult the
factory for the most current information.
Performance Specifications
Flow accuracy: ±1.0% FS at 20% to 100% of flow range,
±2.5% FS at 10% to 20% of flow range.
Accuracy defined for 10 seconds average,
using DI water at 73°F (23°C).
Accuracy not specified 0% to 10% of flow range.
Pressure accuracy: ±1.0% FS (full scale is 60 PSIG [414 kPa])
Repeatability: ±0.5% FS at 20% to 100% of flow range
±1.0% FS at 10% to 20% of flow range
Response time: <3 seconds to within 5% of new set point value
Process temperature: 50° to 149°F (10° to 65°C)
Storage temperature: -40° to 122°F (-40° to 50°C)
Operating pressure: 10 to 60 PSIG (69 to 414 KPA)
Over-pressure limit: 100 PSIG (690 KPA)
Physical Specifications
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