User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
CODE FLOW RANGE
T0 0-50 ml/min.
T1 0-125 ml/min.
T2 0-250 ml/min.
T3 0-500 ml/min.
T4 0-1250 ml/min.
T5 0-2.5 l/min.
T6 0-5 l/min.
T7 0-10 l/min.
T8 0-20 l/min.
T9 0-40 l/min.*
MODEL PRODUCT DESCRIPTION
6500 Integrated Flow Controller
Ordering Information
CODE PROCESS CONNECTION
F02
1
⁄4˝ Flaretek® tube fitting
F03
3
⁄8˝ Flaretek® tube fitting
F04
1
⁄2˝ Flaretek® tube fitting
F06
3
⁄4˝ Flaretek® tube fitting
CODE ELECTRICAL CONNECTOR TYPE
AM6 PVC-jacketed 6′ cable set
AM12 PVC-jacketed 12′ cable set
CODE SET POINT INPUT SIGNAL,
CONTROLLER TYPE
D DeviceNet™ communication
CODE SENSOR INTERFACE
P1 CTFE
P2 PFA
CODE PRIMARY / SECONDARY SEAL
U1 Kalrez® 4079 / Viton® (default)
U2 Kalrez® 1050 LF / Viton®
U3 Kalrez® 6375 UP / Viton®
FLOW RANGE T0 T1 T2 T3 T4 T5 T6 T7 T8 T9
1
⁄4″ F02 ✓✓✓✓✓—— — — —
3
⁄8″ F03 ✓✓✓✓✓✓✓ ———
1
⁄2″ F04 — — — ✓✓✓✓ ✓ ✓ —
3
⁄4″ F06 — — — — — — — ✓✓✓
* Please consult factory for operating pressure requirement.
Allowed process connection and flow range combinations:
ENT48906 10/15/04 8:12 AM Page 21