User guide

NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
42 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
ATT. RE- SUP- ACCESS DATA ATTRIBUTE
ID QUIRED PORTED RULE NV NAME TYPE DESCRIPTION VALUES
35 Optional Yes Set NV Gas Cali- UINT Indicates which 00 = Disabled
bration Gas Calibration 01 = Enable [default]
Object object instance NOTE: This
Instance is active for default is a
this object. DeviceNet™
compliance
variance.
99 Cond. Yes Get NVC Subclass UINT Identifies 01 = Flow
Instance Subclass diagnostics
100 Vendor Yes Set NV Damping USINT Low-pass filter 0 = disabled
specific Coefficient coefficient 1–6 = n
τ ≈ 62.5ms* 2
n
[default] =
2 (τ ≈ 0.25 sec)
7-255 = reserved
SERVICES 31.1 - INSTANCE SERVICES - S-ANALOG SENSOR OBJECT 1
PARAMETER
CODE REQUIRED SUPPORTED NAME PARAMETERS DESCRIPTION VALUES
0E
hex
Required Yes Get_Attribute_ Attribute ID Retrieves an 1–255
Single (USINT) attribute value
10
hex
Required Yes Set_Attribute_ Attribute ID Sets an Attribute ID = 1–255
Single (USINT): Value attribute value Value = attribute
specific
4B
hex
Optional Yes Zero_Adjust None Causes the
device to
begin a re-
zero process.
32
hex
Vendor Yes Stop_Zero None Terminates
Specific _Adjust the re-zero
process.*
*NOTE: Upon termination of Zero Adjust, if the Actuator Override is set to Hold,
the Actuator will resume to hold at the value just prior to the initiation of the
Zero Adjust.
Hence, the FFC device can be made to jump-start the position of the valve at the outset of
the control algorithm by the following sequence:
1. Leave set point at a desired value
2. Actuator Override = Hold (the valve freezes in its current position)
3. Sensor Zero_Adjust (closes the valve and, after a settling period, begins the zeroing)
4. Sensor Stop_Zero_Adjust (valve returns to previously held position)
5. Actuator Override = Normal (the device begins normal control)
ENT48906 10/15/04 8:12 AM Page 42