User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
Factory Configured
The standard NT
®
Integrated Flow
Controller is pre-configured from the
factory for the flow range specified
by the user. The specified flow range
is found on the label of the unit.
The unit control algorithm uses
pressure and flow measurements
to ensure proper operation within
specification.
Control Mode Functions
There are two types of control mode
functions defined for this product:
Normal Operation: A set point input
of <5% of full scale will cause the
valve to close to a leak tight seal.
This is for batch applications where
the user is dispensing a given flow
rate for a given period of time.
Actuator Override: An actuator
override DeviceNet
TM
communica-
tion message is sent to suspend
control and leave the valve in its
present position, regardless of set
point input value.
Autozero Function
If autozero is enabled and the set
point is set to <5%, the valve closes
and the flowmeter will enter into
the re-zero routine. Upon application
of a set point greater than or equal
to 5%, a new differential pressure
(DP) zero value will be stored in
non-volatile memory and the unit
will immediately resume operation.
Autozero is a selectable option
through DeviceNet
TM
communication
messaging with a default setting of
‘enabled’. It will not increase system
response time. The autozero routine
will determine DP zero values based
on a weighted average routine.
Calibration Reference
Conditions
Unless otherwise noted, the specifi-
cations listed for the NT
®
Integrated
Flow Controller with DeviceNet
TM
communication are referenced under
the following operating conditions:
PARAMETER REFERENCE CONDITION
Process fluid Deionized water
Process 73°F, ± 5°F
temperature (23°C, ± 3°C)
Ambient 73°F, ± 5°F
temperature (23°C, ± 3°C)
Relative humidity 50% RH, ± 10% RH
Process pressure 20-30 PSIG
(138–207 kPa)
Supply voltage 24 VDC, ± 10%
Warm-up time 5 minutes
Orientation Horizontal
Operation Flowmeter zeroed
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