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SMU INSTRUMENTS

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A Greater Measure of Conﬁdence

The Series 2600B System SourceMeter SMU Instruments are the industry’s leading current/voltage

source and measure solutions, and are built from Keithley’s third generation SMU technology. The

Series 2600B offers single- and dual-channel models that combine the capabilities of a precision

power supply, true current source, 6½-digit DMM, arbitrary waveform generator, pulse generator,

and electronic load – all into one tightly integrated instrument. The result is a powerful solution that

significantly boosts productivity in applications ranging from bench-top I-V characterization through

highly automated production test. For bench-top use, Series 2600B SMU instruments feature built-

in, Java-based software that enables plug & play I-V testing through any browser, on any computer,

from anywhere in the world. For automated system applications, the Series 2600B’s Test Script

Processor (TSP

) runs complete test programs from inside the instrument for industry-best through-

put. In larger, multi-channel applications, Keithley’s TSP-Link

Technology works together with TSP

Technology to enable high-speed, SMU-per-pin parallel testing. Because Series 2600B SourceMeter

SMU Instruments have fully isolated channels that do not require a mainframe, they can be easily

reconfigured and re-deployed as your test applications evolve.

Java-based Plug & Play I-V Test Software

The Series 2600B are the only SMU instruments to feature built-in, Java-based test software that

enables true plug & play I-V characterization through any browser, on any computer, from anywhere

in the world. This unique capability boosts productivity across a wide range of applications such as

R&D, education, QA/FA, and more. Simply connect the 2600B to the internet via the supplied LAN

cable, open a browser, type in the 2600B’s I.P. address, and begin testing. Resulting data can be

downloaded to a spreadsheet such as Excel for further analysis and formatting, or for inclusion in

Summary of content (15 pages)

PAGE 1
Series 2600B System SourceMeter® SMU Instruments • Family of models offer industry’s widest dynamic range: 10A pulse to 0.1fA and 200V to 100nV • Built-in, Java-based test software enables true plug & play I/V characterization and test through any browser.
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Scalable, integrated source and measure solutions 2601B Single-channel System SourceMeter SMU Instrument (3A DC, 10A Pulse) 2602B Dual-channel System SourceMeter SMU Instrument (3A DC, 10A Pulse) 2604B Dual-channel System SourceMeter SMU Instrument (3A DC, 10A Pulse, Benchtop Version) 2611B Single-channel System SourceMeter SMU Instrument (200V, 10A Pulse) 2612B Dual-channel System SourceMeter SMU Instrument (200V, 10A Pulse) 2614B Dual-channel System SourceMeter SMU Instrument (200V, 10A Pulse, Benchtop
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System SourceMeter® SMU Instruments The Series 2600B SMU instrument design supports two modes of operation for use with a variety of loads. In normal mode, the SMU instrument provides high bandwidth performance for maximum throughput. In high capacitance (high-C) mode, the SMU instrument uses a slower bandwidth to provide robust performance with higher capacitive loads. Table 1.
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System SourceMeter® SMU Instruments Typical Applications I-V functional test and characterization of a wide range of devices, including: –– Two-leaded – Sensors, disk drive heads, metal oxide varistors (MOVs), diodes, zener diodes, sensors, capacitors, thermistors –– Three-leaded – Small signal bipolar junction transistors (BJTs), field-effect transistors (FETs), and more • Simple ICs – Optos, drivers, switches, sensors, converters, regulators • Integrated devices – small scale integrated (SSI) and large s
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System SourceMeter® SMU Instruments Series 2600B specifications SPECIFICATION CONDITIONS ADDITIONAL SOURCE SPECIFICATIONS This document contains specifications and supplemental information for the Models 2601B, 2602B, and 2604B System SourceMeter® SMU instruments. Specifications are the standards against which the Models 2601B, 2602B, and 2604B are tested. Upon leaving the factory, the 2601B, 2602B, and 2604B meet these specifications.
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2601B, 2602B, 2604B System SourceMeter® SMU Instruments METER SPECIFICATIONS VOLTAGE MEASUREMENT ACCURACY 16, 17 PULSE SPECIFICATIONS Series 2600B specifications Region 1 1 2 3 4 Maximum Pulse Width 12 DC, no limit DC, no limit 100 ms 4 ms 1.8 ms Maximum Duty Cycle 13 100% 100% 25% 4% 1% MINIMUM PROGRAMMABLE PULSE WIDTH 14, 15: 100µs. NOTE: Minimum pulse width for settled source at a given I/V output and load can be longer than 100µs. Pulse width programming resolution: 1µs.
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2601B, 2602B, 2604B System SourceMeter® SMU Instruments Voltage Source Output Settling Time: Time required to reach 0.1% of final value after source level command is processed on a fixed range. Current limit = 1A. Voltage Source Range Settling Time with Cload = 4.7μF 100 mV 200 μs (typical) 1 V 200 μs (typical) 6 V 200 μs (typical) 40 V 7 ms (typical) Current Measure Settling Time: Time required to reach 0.1% of final value after voltage source is stabilized on a fixed range.
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System SourceMeter® SMU Instruments ADDITIONAL SOURCE SPECIFICATIONS This document contains specifications and supplemental information for the Models 2611B, 2612B, and 2614B System SourceMeter® SMU instruments. Specifications are the standards against which the Models 2611B, 2612B, and 2614B are tested. Upon leaving the factory the 2611B, 2612B, and 2614B meet these specifications. Supplemental and typical values are non-warranted, apply at 23°C, and are provided solely as useful information.
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2611B, 2612B, 2614B System SourceMeter® SMU Instruments SOURCE SPECIFICATIONS (continued) METER SPECIFICATIONS PULSE SPECIFICATIONS (continued) VOLTAGE MEASUREMENT ACCURACY 17, 18 Quadrant Diagram: +10A Range 200 mV 2 V 20 V 200 V 4 3 3 2 +0.1A 0A –0.1A 2 Pulse 2 –1A –1.5A 2 3 Pulse 3 CURRENT MEASUREMENT ACCURACY 18, 21 Pulse 4 Range 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA 100 mA 1 A 1.5 A 10 A 24 –10A –200V –180V –20V 0V –5V +5V +20V +180V +200V NOTES 12.
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2611B, 2612B, 2614B System SourceMeter® SMU Instruments METER SPECIFICATIONS (continued) 17. Add 50µV to source accuracy specifications per volt of HI lead drop. 18. De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table below. Series 2600B specifications NPLC Setting 0.1 0.01 0.001 200mV Range 0.01% 0.08% 0.8 % 2V–200V Ranges 0.01% 0.07% 0.6 % 100nA Range 0.01% 0.1% 1% 1μA–100mA Ranges 0.01% 0.05% 0.5 % 1A–1.5A Ranges 0.01% 0.
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System SourceMeter® SMU Instruments Series 2600B specifications SPECIFICATION CONDITIONS ADDITIONAL SOURCE SPECIFICATIONS This document contains specifications and supplemental information for the Models 2634B, 2635B, and 2636B System SourceMeter® SMU instruments. Specifications are the standards against which the Models 2634B, 2635B, and 2636B are tested. Upon leaving the factory the 2634B, 2635B, and 2636B meet these specifications.
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System SourceMeter® SMU Instruments SOURCE SPECIFICATIONS (continued) METER SPECIFICATIONS NOTES VOLTAGE MEASUREMENT ACCURACY 16, 17 Range 200 mV 2 V 20 V 200 V Range *100 pA 22, 23 1 nA 22, 24 10 nA 100 nA 1 µA 10 µA 100 µA 1 mA 10 mA 100 mA 1 A 1.5 A 10 A 25 Start toff 10% 10% ton toff 12. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equations in the Reference Manual for more information. 13. Voltage source operation with 1.5 A current limit.
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2634B, 2635B, 2636B System SourceMeter® SMU Instruments METER SPECIFICATIONS (continued) GENERAL 16. Add 50µV to source accuracy specifications per volt of HI lead drop. 17. De-rate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table below. Series 2600B specifications NPLC Setting 0.1 0.01 0.001 200mV Range 0.01% 0.08% 0.8 % 2V–200V Ranges 0.01% 0.07% 0.6 % 100nA Range 0.01% 0.1% 1% 1A–1.5A Ranges 0.01% 0.05% 1.1 % 18.
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Series 2600B System SourceMeter® SMU Instruments Applicable to Models 2601B, 2602B, 2604B, 2611B, 2612B, 2614B, 2634B, 2635B, and 2636B.
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Series 2600B System SourceMeter® SMU Instruments Applicable to Models 2601B, 2602B, 2604B, 2611B, 2612B, 2614B, 2634B, 2635B, and 2636B. FRONT PANEL INTERFACE: Two-line vacuum fluorescent display (VFD) with keypad and rotary knob.