Datasheet

SMU INSTRUMENTS
www.keithley.com
1.888.KEITHLEY
(U.S. only)
A Greater Measure of Confidence
ADDITIONAL SOURCE SPECIFICATIONS
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value
after source level command is processed on a fixed range.
Range Settling Time
200 mV <50 µs (typical)
2 V <50 µs (typical)
20 V <110 µs (typical)
200 V <700 µs (typical)
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value after
source level command is processed on a fixed range. Values below for I
out
· R
load
= 2V unless noted.
Current Range Settling Time
1.5 A – 1 A <120 µs (typical) (R
load
> 6W)
100 mA – 10 mA <80 µs (typical)
1 mA <100 µs (typical)
100 µA <150 µs (typical)
10 µA <500 µs (typical)
1 µA <2 ms (typical)
100 nA <20 ms (typical)
10 nA <40 ms (typical)
1 nA <150 ms (typical)
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC.
REMOTE SENSE OPERATING RANGE
10
: Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum
1W per source lead).
20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum
1W per source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into a 200kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R
load
(typical
– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling
Time for additional test condtions.
PULSE SPECIFICATIONS
Region
Maximum
Current Limit
Maximum
Pulse Width
11
Maximum
Duty Cycle
12
1 100 mA @ 200 V DC, no limit 100%
1 1.5 A @ 20 V DC, no limit 100%
2 1 A @ 180 V 8.5 ms 1%
3
13
1 A @ 200 V 2.2 ms 1%
4 10 A @ 5 V 1 ms 2.2%
MINIMUM PROGRAMMABLE PULSE WIDTH
14, 15
: 100µs. NOTE: Minimum pulse width for
settled source at a given I/V output and load can be longer than 100µs.
PULSE WIDTH PROGRAMMING RESOLUTION: 1µs.
PULSE WIDTH PROGRAMMING ACCURACY
15
: ±5µs.
PULSE WIDTH JITTER: 50µs (typical).
QUADRANT DIAGRAM:
+1.5A
+10A
–10A
–1A
+1A
+0.1A
–0.1A
–1.5A
+200V+5V
–5V
+20V–20V 0V
0A
+180V–180V–200V
DC
Pulse
Pulse
Pulse
2
2
2
2
4
4
1
3
3
3
3
SPECIFICATION CONDITIONS
This document contains specifications and supplemental information for the Models 2634B,
2635B, and 2636B System SourceMeter
®
SMU instruments. Specifications are the standards against
which the Models 2634B, 2635B, and 2636B are tested. Upon leaving the factory the 2634B, 2635B,
and 2636B meet these specifications. Supplemental and typical values are non- warranted, apply at
23°C, and are provided solely as useful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2634B,
2635B, and 2636B) or SourceMeter CHANNEL B (2634B, 2636B) terminals under the following
conditions:
1. 23°C ± 5°C, <70% relative humidity.
2. After 2 hour warm-up
3. Speed normal (1 NPLC)
4. A/D auto-zero enabled
5. Remote sense operation or properly zeroed local sense operation
6. Calibration period = 1 year
SOURCE SPECIFICATIONS
VOLTAGE SOURCE SPECIFICATIONS
VOLTAGE PROGRAMMING ACCURACY
1
Range
Programming
Resolution
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
Typical Noise
(peak-peak)
0.1Hz–10Hz
200 mV 5 µV 0.02% + 375 µV 20 µV
2 V 50 µV 0.02% + 600 µV 50 µV
20 V 500 µV 0.02% + 5 mV 300 µV
200 V 5 mV 0.02% + 50 mV 2 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
2
: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS
3
: 30.3W per channel maximum.
±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV pk-pk (typical), <3mV rms (typical), 20V range.
CURRENT LIMIT/COMPLIANCE
4
: Bipolar current limit (compliance) set with single value.
Minimum value is 100pA. Accuracy is the same as current source.
OV ERSHOOT: <±(0.1% + 10mV) typical (step size = 10% to 90% of range, resistive load,
maximum current limit/compliance).
GUARD OFFSET VOLTAGE: <4mV (current <10mA).
CURRENT SOURCE SPECIFICATIONS
CURRENT PROGRAMMING ACCURACY
Range
Programming
Resolution
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
Typical Noise
(peak-peak)
0.1Hz–10Hz
1 nA 20 fA 0.15% + 2 pA 800 fA
10 nA 200 fA 0.15% + 5 pA 2 pA
100 nA 2 pA 0.06% + 50 pA 5 pA
1 µA 20 pA 0.03% + 700 pA 25 pA
10 µA 200 pA 0.03% + 5 nA 60 pA
100 µA 2 nA 0.03% + 60 nA 3 nA
1 mA 20 nA 0.03% + 300 nA 6 nA
10 mA 200 nA 0.03% + 6 µA 200 nA
100 mA 2 µA 0.03% + 30 µA 600 nA
1 A
5
20 µA 0.05% + 1.8 mA 70 µA
1.5 A
5
50 µA 0.06% + 4 mA 150 µA
10 A
5, 6
200 µA 0.5 % + 40 mA (typical)
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
7
: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS
8
: 30.3W per channel maximum.
±1.515A @ ±20V, ±101mA @ ±200V, four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE
9
: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 20mV. Accuracy is the same as voltage source.
OV ERSHOOT: <±0.1% typical (step size = 10% to 90% of range, resistive load, maximum
current limit/compliance; see Current Source Output Settling Time for additional
test conditions).
2634B, 2635B,
2636B
System SourceMeter
®
SMU Instruments
Series 2600B specifications Series 2600B specifications