Datasheet

SMU INSTRUMENTS
A Greater Measure of Confidence
www.keithley.com
1.888.KEITHLEY
(U.S. only)
METER SPECIFICATIONS
VOLTAGE MEASUREMENT ACCURACY
16, 17
Range
Default Display
Resolution
18
Input
Resistance
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
200 mV 100 nV >10
14
W 0.015% + 225 µV
2 V 1 µV >10
14
W 0.02% + 350 µV
20 V 10 µV >10
14
W 0.015% + 5 mV
200 V 100 µV >10
14
W 0.015% + 50 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
19
: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
CURRENT MEASUREMENT ACCURACY
17
Range
Default Display
Resolution
20
Voltage
Burden
21
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
*100 pA
22, 23
0.1 fA <1 mV 0.15% + 120 fA
1 nA
22, 24
1 fA <1 mV 0.15% + 240 fA
10 nA 10 fA <1 mV 0.15% + 3 pA
100 nA 100 fA <1 mV 0.06% + 40 pA
1 µA 1 pA <1 mV 0.025% + 400 pA
10 µA 10 pA <1 mV 0.025% + 1.5 nA
100 µA 100 pA <1 mV 0.02% + 25 nA
1 mA 1 nA <1 mV 0.02% + 200 nA
10 mA 10 nA <1 mV 0.02% + 2.5 µA
100 mA 100 nA <1 mV 0.02% + 20 µA
1 A 1 µA <1 mV 0.03% + 1.5 mA
1.5 A 1 µA <1 mV 0.05% + 3.5 mA
10 A
25
10 µA <1 mV 0.4 % + 25 mA
* 100 pA range not available on Model 2634B.
CURRENT MEASURE SETTLING TIME (Time for measurement to settle after a Vstep)
26
: Time
required to reach within 0.1% of final value after source level command is processed on a fixed
range. Values for V
out
= 2V unless noted. Current Range: 1mA. Settling Time: <100µs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
27
: ±(0.15 × accuracy specfication)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
CONTACT CHECK
28
(Not available on Model 2634B)
Speed
Maximum Measurement
Time to Memory
For 60Hz (50Hz)
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
FAST 1 (1.2) ms 5% + 10 W
MEDIUM 4 (5) ms 5% + 1 W
SLOW 36 (42) ms 5% + 0.3 W
ADDITIONAL METER SPECIFICATIONS
MAXIMUM LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >10
14
W.
SOURCE SPECIFICATIONS (continued)
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer
to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation, refer
to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
6. 10A range accessible only in pulse mode.
7. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
8. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power
derating information.
9. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.
10. Add 50µV to source accuracy specifications per volt of HI lead drop.
11. Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
Bias Level
Start t
on
Start t
off
90%
10%
t
on
t
off
10%
12. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equa-
tions in the Reference Manual for more information.
13. Voltage source operation with 1.5 A current limit.
14. Typical performance for minimum settled pulse widths:
Source Value Load
Source Settling
(% of range) Min. Pulse Width
5 V 0.5 W 1% 300 µs
20 V 200 W 0.2% 200 µs
180 V 180 W 0.2% 5 ms
200 V (1.5 A Limit) 200 W 0.2% 1.5 ms
100 mA 200 W 1% 200 µs
1 A 200 W 1% 500 µs
1 A 180 W 0.2% 5 ms
10 A 0.5 W 0.5% 300 µs
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600B Reference Manual.
15. Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
Bias Level
Start t
on
Start t
off
90%
10%
t
on
t
off
10%
2634B, 2635B,
2636B
System SourceMeter
®
SMU Instruments
Series 2600B specifications Series 2600B specifications