Datasheet

SMU INSTRUMENTS
A Greater Measure of Confidence
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1.888.KEITHLEY
(U.S. only)
SOURCE SPECIFICATIONS (continued)
PULSE SPECIFICATIONS
Region
Maximum
Current Limit
Maximum
Pulse Width
12
Maximum
Duty Cycle
13
1 1 A @ 40 V DC, no limit 100%
1 3 A @ 6 V DC, no limit 100%
2 1.5 A @ 40 V 100 ms 25%
3 5 A @ 35 V 4 ms 4%
4 10 A @ 20 V 1.8 ms 1%
MINIMUM PROGRAMMABLE PULSE WIDTH
14, 15
: 100µs. NOTE: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100µs.
PULSE WIDTH PROGRAMMING RESOLUTION: 1µs.
PULSE WIDTH PROGRAMMING ACCURACY
15
: ±5µs.
PULSE WIDTH JITTER: 2µs (typical).
QUADRANT DIAGRAM:
+1.5A
+3A
+5A
–3A
–5A
+10A
–10A
–1A
+1A
–1.5A
+40V+6V
–6V
+20V–20V 0V
0A
+35V–35V–40V
DC
Pulse
Pulse
Pulse
4
4
3
3
3
3
2
2
1
2
2
NOTES
12. Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
Bias Level
Start t
on
Start t
off
90%
10%
t
on
t
off
10%
13. Thermally limited in sink mode (quadrants II and IV) and ambient temperatures above 30°C. See power equa-
tions in the reference manual for more information.
14. Typical performance for minimum settled pulse widths:
Source Value Load
Source Settling
(% of range) Min. Pulse Width
6 V 2 W 0.2% 150 µs
20 V 2 W 1% 200 µs
35 V 7 W 0.5% 500 µs
40 V 27 W 0.1% 400 µs
1.5 A 27 W 0.1% 1.5 ms
3 A 2 W 0.2% 150 µs
5 A 7 W 0.5% 500 µs
10 A 2 W 0.5% 200 µs
Typical tests were performed using remote operation, 4W sense, and best, fixed measurement range. For more
information on pulse scripts, see the Series 2600B Reference Manual.
15. Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
Bias Level
Start t
on
Start t
off
90%
10%
t
on
t
off
10%
2601B, 2602B,
2604B
System SourceMeter
®
SMU Instruments
METER SPECIFICATIONS
VOLTAGE MEASUREMENT ACCURACY
16, 17
Range
Default Display
Resolution
18
Input
Resistance
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
100 mV 100 nV >10 GW 0.015% + 150 µV
1 V 1 µV >10 GW 0.015% + 200 µV
6 V 10 µV >10 GW 0.015% + 1 mV
40 V 10 µV >10 GW 0.015% + 8 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
19
: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
CURRENT MEASUREMENT ACCURACY
17
Range
Default Display
Resolution
20
Voltage
Burden
21
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
100 nA 100 fA <1 mV 0.05% + 100 pA
1 µA 1 pA <1 mV 0.025% + 500 pA
10 µA 10 pA <1 mV 0.025% + 1.5 nA
100 µA 100 pA <1 mV 0.02% + 25 nA
1 mA 1 nA <1 mV 0.02% + 200 nA
10 mA 10 nA <1 mV 0.02% + 2.5 µA
100 mA 100 nA <1 mV 0.02% + 20 µA
1 A 1 µA <1 mV 0.03% + 1.5 mA
3 A 1 µA <1 mV 0.05% + 3.5 mA
10 A
22
10 µA <1 mV 0.4% + 25 mA (typical)
CURRENT MEASURE SETTLING TIME (Time for measurement to settle after a V
step
)
23
: Time
required to reach within 0.1% of final value after source level command is processed on a fixed
range. Values for V
out
= 1V unless noted. Current Range: 1mA. Settling Time: <100µs (typical).
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
24
: ±(0.15 × accuracy specification/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
CONTACT CHECK
25
(not available on Model 2604B)
Speed
Maximum Measurement
Time To Memory
For 60Hz (50Hz)
Accuracy (1 Year)
23°C ±5°C
±(%rdg. + ohms)
FAST 1 (1.2) ms 5% + 10 W
MEDIUM 4 (5) ms 5% + 1 W
SLOW 36 (42) ms 5% + 0.3 W
ADDITIONAL METER SPECIFICATIONS
MAXIMUM LOAD IMPEDANCE:
Normal Mode: 10nF (typical). High Capacitance Mode: 50µF (typical).
COMMON MODE VOLTAGE: 250VDC.
COMMON MODE ISOLATION: >1GW, <4500pF.
OVERRANGE: 101% of source range, 102% of measure range.
MAXIMUM SENSE LEAD RESISTANCE: 1kW for rated accuracy.
SENSE INPUT IMPEDANCE: >10GW.
NOTES
16. Add 50µV to source accuracy specifications per volt of HI lead drop.
17. De-rate accuracy specifications for NPLC setting < 1 by increasing error term.
Add appropriate % of range term using table below.
NPLC Setting
100mV
Range
1V–40V
Ranges
100nA
Range
1µA–100mA
Ranges
1A–3A
Ranges
0.1 0.01% 0.01% 0.01% 0.01% 0.01%
0.01 0.08% 0.07% 0.1% 0.05% 0.05%
0.001 0.8 % 0.6 % 1% 0.5 % 1.1 %
18. Applies when in single channel display mode.
19. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
20. Applies when in single channel display mode.
21. Four-wire remote sense only with current meter mode selected. Voltage measure set to 100mV or 1V range only.
22. 10A range accessible only in pulse mode.
23. Compliance equal to 100mA.
24. High Capacitance Mode accuracy is applicable for 23°C ±5°C only.
25. Includes measurement of SENSE HI to HI and SENSE LO to LO contact resistances.
Series 2600B specifications Series 2600B specifications