Datasheet

SMU INSTRUMENTS
A Greater Measure of Confidence
www.keithley.com
1.888.KEITHLEY
(U.S. only)
ADDITIONAL SOURCE SPECIFICATIONS
TRANSIENT RESPONSE TIME: <70µs for the output to recover to within 0.1% for a 10% to 90%
step change in load.
VOLTAGE SOURCE OUTPUT SETTLING TIME: Time required to within reach 0.1% of final value
after source level command is processed on a fixed range.
Range Settling Time
200 mV <50 µs (typical)
2 V <50 µs (typical)
20 V <110 µs (typical)
200 V <700 µs (typical)
CURRENT SOURCE OUTPUT SETTLING TIME: Time required to reach within 0.1% of final value after
source level command is processed on a fixed range. Values below for I
out
· R
load
= 2V unless noted.
Current Range Settling Time
1.5 A – 1 A <120 µs (typical) (R
load
> 6W)
100 mA – 10 mA <80 µs (typical)
1 mA <100 µs (typical)
100 µA <150 µs (typical)
10 µA <500 µs (typical)
1 µA <2 ms (typical)
100 nA <20 ms (typical)
DC FLOATING VOLTAGE: Output can be floated up to ±250VDC from chassis ground.
REMOTE SENSE OPERATING RANGE
11
: Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V .
VOLTAGE OUTPUT HEADROOM:
200V Range: Max. output voltage = 202.3V – total voltage drop across source leads (maximum
1W per source lead).
20V Range: Max. output voltage = 23.3V – total voltage drop across source leads (maximum
1W per source lead).
OVER TEMPERATURE PROTECTION: Internally sensed temperature overload puts unit in
standby mode.
VOLTAGE SOURCE RANGE CHANGE OVERSHOOT: <300mV + 0.1% of larger range (typical).
Overshoot into a 200kW load, 20MHz BW.
CURRENT SOURCE RANGE CHANGE OVERSHOOT: <5% of larger range + 300mV/R
load
(typical
– With source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling
Time for additional test conditions.
NOTES
1. Add 50µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
3. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit
accuracy specifications. Specifications apply with sink mode operation enabled.
5. Accuracy specifications do not include connector leakage. Derate accuracy by V
out
/2E11 per °C when operating
between 18°–28°C. Derate accuracy by V
out
/2E11 + (0.15·V
out
/2E11) per °C when operating <18°C and >28°C.
6. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
7. 10A range accessible only in pulse mode.
8. High Capacitance Mode accuracy is applicable at 23°C ±5°C only.
9. Full power source operation regardless of load to 30°C ambient. Above 30°C and/or power sink operation,
refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
10. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to
corresponding voltage source specification. For 200mV range add an additional 120mV of uncertainty.
11. Add 50µV to source accuracy specifications per volt of HI lead drop.
PULSE SPECIFICATIONS
Region
Maximum
Current Limit
Maximum
Pulse Width
12
Maximum
Duty Cycle
13
1 100 mA @ 200 V DC, no limit 100%
1 1.5 A @ 20 V DC, no limit 100%
2 1 A @ 180 V 8.5 ms 1%
3
14
1 A @ 200 V 2.2 ms 1%
4 10 A @ 5 V 1 ms 2.2%
MINIMUM PROGRAMMABLE PULSE WIDTH
15, 16
: 100µs. NOTE: Minimum pulse width for settled
source at a given I/V output and load can be longer than 100µs.
PULSE WIDTH PROGRAMMING RESOLUTION: 1µs.
PULSE WIDTH PROGRAMMING ACCURACY
16
: ±5µs.
PULSE WIDTH JITTER: 2µs (typical).
SPECIFICATION CONDITIONS
This document contains specifications and supplemental information for the Models 2611B, 2612B,
and 2614B System SourceMeter
®
SMU instruments. Specifications are the standards against which
the Models 2611B, 2612B, and 2614B are tested. Upon leaving the factory the 2611B, 2612B, and
2614B meet these specifications. Supplemental and typical values are non- warranted, apply at
23°C, and are provided solely as useful information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2611B,
2612B, and 2614B) or SourceMeter CHANNEL B (2612B, 2614B) terminals under the following
conditions:
1. 23°C ± 5°C, <70% relative humidity.
2. After 2 hour warm-up.
3. Speed normal (1 NPLC).
4. A/D auto-zero enabled.
5. Remote sense operation or properly zeroed local sense operation.
6. Calibration period = 1 year.
SOURCE SPECIFICATIONS
VOLTAGE SOURCE SPECIFICATIONS
VOLTAGE PROGRAMMING ACCURACY
1
Range
Programming
Resolution
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + volts)
Typical Noise
(Peak-Peak)
0.1Hz–10Hz
200 mV 5 µV 0.02% + 375 µV 20 µV
2 V 50 µV 0.02% + 600 µV 50 µV
20 V 500 µV 0.02% + 5 mV 300 µV
200 V 5 mV 0.02% + 50 mV 2 mV
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
2
: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS
3
: 30.3W per channel maximum.
±20.2V @ ±1.5A, ±202V @ ±100mA, four quadrant source or sink operation.
VOLTAGE REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100µV).
NOISE 10Hz–20MHz: <20mV peak-peak (typical), <3mV RMS (typical), 20V range.
CURRENT LIMIT/COMPLIANCE
4
: Bipolar current limit (compliance) set with single value.
Minimum value is 10nA. Accuracy is the same as current source.
OV ERSHOOT: <±(0.1% + 10mV) (typical). Step size = 10% to 90% of range, resistive load, maxi-
mum current limit/compliance.
GUARD OFFSET VOLTAGE: <4mV (current <10mA).
CURRENT SOURCE SPECIFICATIONS
CURRENT PROGRAMMING ACCURACY
5
Range
Programming
Resolution
Accuracy (1 Year)
23°C ±5°C
±(% rdg. + amps)
Typical Noise
(Peak-Peak)
0.1Hz–10Hz
100 nA 2 pA 0.06% + 100 pA 5 pA
1 µA 20 pA 0.03% + 800 pA 25 pA
10 µA 200 pA 0.03% + 5 nA 60 pA
100 µA 2 nA 0.03% + 60 nA 3 nA
1 mA 20 nA 0.03% + 300 nA 6 nA
10 mA 200 nA 0.03% + 6 µA 200 nA
100 mA 2 µA 0.03% + 30 µA 600 nA
1 A
6
20 µA 0.05% + 1.8 mA 70 µA
1.5 A
6
50 µA 0.06% + 4 mA 150 µA
10 A
6, 7
200 µA 0.5% + 40 mA (typical)
TEMPERATURE COEFFICIENT (0°–18°C and 28°–50°C)
8
: ±(0.15 × accuracy specification)/°C.
Applicable for normal mode only. Not applicable for high capacitance mode.
MAXIMUM OUTPUT POWER AND SOURCE/SINK LIMITS
9
: 30.3W per channel maximum.
±1.515A @ ±20V , ±101mA @ ±200V , four quadrant source or sink operation.
CURRENT REGULATION: Line: 0.01% of range. Load: ±(0.01% of range + 100pA).
VOLTAGE LIMIT/COMPLIANCE
10
: Bipolar voltage limit (compliance) set with a single value.
Minimum value is 20mV. Accuracy is the same as voltage source.
OV ERSHOOT: <±0.1% (typical). Step size = 10% to 90% of range, resistive load; see Current
Source Output Settling Time for additional test conditions.
2611B, 2612B,
2614B
System SourceMeter
®
SMU Instruments
Series 2600B specifications Series 2600B specifications