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Table Of Contents

D6F-A1
A Compact, High-Acuracy Sensor That Measures Low Flow Rates.
- . High accuracy of ±3% FS.
- . Flow rates can be measured without being affected by temperature or pressure.
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - D6F-N2/-L2
- A Compact, High-Acuracy Sensor That Measures Low Flow Rates.
  - . High accuracy of ±3% FS.
  - . Flow rates can be measured without being affected by temperature or pressure.
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - D6F-A3
- High-Acuracy Sensing with a Thin, Compact Body.
  - . A thin, lightweight flow sensor.
  - . Unique flow path structure provides high precision and fast response.
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - D6F-A5
- High-Acuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min.
  - . Accurately detects a mass flow rate of 10 to 50 L/min.
  - . A compact size of 30 ¥ 78 ¥ 30 mm (H ¥ W ¥ D).
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - D6F-A6
- High-Acuracy Sensing with a Compact Body for Flow Rates up to 50 L/min.
  - . Accurately measures an air mass flow rate of 10 to 50 L/min.
  - . A compact size of 30 ¥ 78 ¥ 30 mm (H ¥ W ¥ D).
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - D6F-A7/-L7/-N7
- Reduction of Piping Time by Quick Joint Connection
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Note: 2. Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
- Note: 3. Reference (typical)
- Note: 4. With no condensation or icing.
Dimensions (Unit: mm)
- Note. The Port type of pipe fitting based on “Quick Joint P10 Type”.
- * P10 shows the name of an O-ring prescribed by JIS B 2401.
- * The port of O-ring ditch is based on P10 of JIS B 2406.
- * Please obtain a male joint separately.
- D6F-A7D/-AB71D
- Digital Compensation for High Accuracy
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Note: 2. Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
- Note: 3. -10 £ Operating Temperature £ 60°C
- Note: 4. Reference (typical)
- Note: 5. Refer to the MEMS Flow Sensor D6F-A7D/-AB71D User's Manual for details.
- Note: 6. With no condensation or icing.
- Note: 7. The following custom options are available. Ask your OMRON representative for details. - Temperature measurement - Address settings (up to four addresses) - Fault detection - Threshold setting
- Communication
Dimensions (Unit: mm)
- D6F-AB71
- Reduction of Piping Time by Quick Joint Connection
  - . Reduce the influence of pulsation flow by bypass flow path
  - . Compact size of 30 ° 84.6 ° 32 mm (H ° W ° D).
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
- Note: 2. Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
- Note: 3. Reference (typical)
- Note: 4. With no condensation or icing.
Dimensions (Unit: mm)
- D6F-P
- A Compact, High-Acuracy Flow Sensor with Superior Resistance to Environments.
Characteristics/Performance
- Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Tubing
Connections/Dimensions (Unit: mm)
- D6F-PH
- A Compact, High-Acuracy Differential Pressure Sensor with Superior Resistance to Environments.
Characteristics/Performance
- Note: 1. At standard atmospheric pressure (1013.25 hPa)
- Note: 2. Dry gas must not contain large particles, e.g., dust, oil, or mist.
- Note: 3. The zero point tolerance and span tolerance are independent uncertainties and add according to the principles of error propagation.
- Note: 4. With no condensation or icing.
- Note: 5. Type D6F-PH is based on thermal flow principle. Air flow is needed to measure the differential pressure. Typical characteristic of air flow by differential pressure is below.
Tubing (Example for Bamboo Joint)
Connections/Dimensions (Unit: mm)
- Note. Use M1.8 panhead screws or tapping screws for installation, and tighten the screws to a maximum torque of 0.36 N·m. Use the following connectors to connect to the Sensor.
- Connector : GHR-04V-S (made by J.S.T. Mfg. Co.)
- Terminals : SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
- Wires AWG26 to AWG30
- Electrical connection
- Communication
  - D6F-W
- A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-Performance Flow Velocity* Measurement.
  - . Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure.
  - . High accuracy of ±5% FS.
    - * The flow velocity is the value calculated from the mass flow rate in OMRON's specified wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of JAPAN.
    - Ordering Information
      - Note: Refer to Accessories for the D6F Series on page 38.
Connections
- Output Voltage Characteristics
- Characteristics/Performance
  - Note: 1. Volumetric flow rate at 25°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - D6F-V
- A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-Performance Flow Velocity* Measurement.
  - . Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure.
  - . Extremely compact, measuring only 24 ¥ 14 ¥ 8 mm.
Characteristics/Performance
- Note: 1. Volumetric flow rate at 25°C, 101.3 kPa.
- Dimensions (Unit: mm)
  - Accessories for the D6F Series
- Dimensions (Unit: mm)
  - Common Precautions for the D6F Series
- Safety Precautions
  - Precautions for Correct Use
  - RoHS Directive
    - * RoHS marking may be terminated if it is later determined that parts that were previously treated as RoHS compliant are not compliant due to circumstances at the supplier of the parts.

MEMS Flow Sensors

D6 F

Series Catalog

Faster and more accurate than ever before

MEMS ﬂow sensor : the ideal means for mass ﬂow measurement

Omron ﬂow sensor

so precise

even the ﬂap of a butterﬂy’s

wings will not be missed.

Summary of content (42 pages)

PAGE 1
MEMS Flow Sensors D6F Series Catalog Faster and more accurate than ever before MEMS flow sensor : the ideal means for mass flow measurement Omron flow sensor so precise even the flap of a butterfly’s wings will not be missed.
PAGE 2
Realizing a highly accurate flow measurement, Omron’s MEMS flow sensor accurately detects minute airflow so much as a single flap of a butterfly’s butterfly butterf y s wings. win w ngs. A gas flow sensor is capable of "measuring mass flow" independent nt of temperature and d pressure. pressure sure. D6F-A6 D6F-W Q&A on Mass Flow Measurement Q1 There are two balloons; each having different volumes. But these balloons have the same mass.
PAGE 3
sensing even a single flap of a butterfly’s wings Operating characteristic Error Output voltage (V) Standard lower limit -4% -6% 0 4 6 Magnified 5 view 1.04 4 3 1.02 2 1 1.00 0 -0.2 0.0 0.2 0.4 0.6 0.8 1.0 Flow rate(SLM) Flow rate of 1L: Output corresponding to flow rate change below 1/1000 of full scale.
PAGE 4
Applications Omron flow sensors cover a wide range of applications and can be used for different purposes.
PAGE 5
Selection of Products Select the most suitable sensor from many variations.
PAGE 6
List of D6F series MEMS Flow Sensor Air Minute flow Analog Air Applicable gas Items Model D6F-01A1-110 D6F-P0010A D6F-P0010AM2 D6F-P0001A1 D6F-02A1-110 D6F-03A3-000 Shape 5 4 0〜3L/min 3 Flow rate range (L/mim) 0〜2L/min 2 1 0〜0.
PAGE 7
MEMS Flow Sensor Air Flow velocity Analog Applicable gas Items Air Model D6F-W01A1 D6F-V03A1 D6F-W04A1 D6F-W10A1 Shape 0〜10m/s 10 8 6 4 Flow velocity range (m/s) 0〜3m/s 0〜4m/s 36 34 0〜1m/s 2 0 -2 34 Page 34 MEMS Differential Pressure Sensor Air Differential pressure Digital Digital type only Applicable gas Items Model Air D6F-PH0505AD3 D6F-PH0505AD4 D6F-PH0505AMD4 D6F-PH0025AD1 D6F-PH0025AD2 D6F-PH0025AMD2 D6F-PH5050AD3 D6F-PH5050AD4 D6F-PH5050AMD4 Shape -500〜500Pa 500 250
PAGE 8
D6F-A1 MEMS Flow Sensor A Compact, High-Acuracy Sensor That Measures Low Flow Rates. • High accuracy of ±3% FS. • Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01A1-110 0 to 1 L/min Air 0 to 2 L/min 6.0 6.0 D6F-01A1-110 5.0 5.
PAGE 9
D6F-A1 MEMS Flow Sensor Characteristics/Performance Model D6F-01A1-110 Flow Range (See note 1.) D6F-02A1-110 0 to 1 L/min 0 to 2 L/min Calibration Gas (See note 2.) Air Flow Port Type Bamboo joint Maximum outside diameter: 8.6 mm, Minimum outside diameter: 7.4 mm Electrical Connection Three-pin connector Power Supply 10.8 to 26.
PAGE 10
D6F-N2/-L2 MEMS Flow Sensor A Compact, High-Acuracy Sensor That Measures Low Flow Rates. • High accuracy of ±3% FS. • Flow rates can be measured without being affected by temperature or pressure. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-01N2-000 Natural gas (13A) LP gas 6.0 6.0 0 to 1 L/min D6F-01N2-000 5.0 5.0 0 to 5 L/min D6F-05N2-000 0 to 2 L/min D6F-02L2-000 4.0 3.0 2.0 1.0 0.
PAGE 11
D6F-N2/-L2 MEMS Flow Sensor Characteristics/Performance Model D6F-01N2-000 Flow Range (See note 1.) D6F-05N2-000 0 to 1 L/min Calibration Gas (See note 2.) Natural gas (13A) Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC 0 to 2 L/min Propane gas Current Consumption 15 mA max.
PAGE 12
D6F-A3 MEMS Flow Sensor High-Acuracy Sensing with a Thin, Compact Body. • A thin, lightweight flow sensor. • Unique flow path structure provides high precision and fast response. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39. Ordering Information Output Voltage Characteristics MEMS Flow Sensor D6F-03A3-000 Flow rate range Air 0 to 3 L/min Model 6.0 D6F-03A3-000 5.
PAGE 13
D6F-A3 MEMS Flow Sensor Characteristics/Performance Model D6F-03A3-000 Flow Range (See note 1.) 0 to 3 L/min Calibration Gas (See note 2.) Air Flow Port Type M5 thread Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±0.
PAGE 14
D6F-A5 MEMS Flow Sensor High-Acuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min. • Accurately detects a mass flow rate of 10 to 50 L/min. • A compact size of 30 × 78 × 30 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39.
PAGE 15
D6F-A5 MEMS Flow Sensor Characteristics/Performance Model D6F-10A5-000 Flow Range (See note 1.) D6F-20A5-000 0 to 10 L/min 0 to 20 L/min Calibration Gas (See note 2.) Air Flow Port Type Manifold Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±3% FS (25°C characteristic) Repeatability (See note 3.
PAGE 16
D6F-A6 MEMS Flow Sensor High-Acuracy Sensing with a Compact Body for Flow Rates up to 50 L/min. • Accurately measures an air mass flow rate of 10 to 50 L/min. • A compact size of 30 × 78 × 30 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39. Ordering Information Output Voltage Characteristics MEMS Flow Sensor Rc 1/4 thread Air NPT 1/8 thread Flow rate range D6F-10A6-000 6.0 6.0 D6F-20A6-000 5.0 5.
PAGE 17
D6F-A6 MEMS Flow Sensor Characteristics/Performance Model D6F-10A6-000 Flow Range (See note 1.) D6F-20A6-000 0 to 10 L/min 0 to 20 L/min Calibration Gas (See note 2.) Air Flow Port Type Rc 1/4 thread Electrical Connection Three-pin connector D6F-50A6-000 0 to 50 L/min D6F-10A61-000 0 to 10 L/min 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10kΩ min.
PAGE 18
D6F-A7/-L7/-N7 MEMS Flow Sensor Reduction of Piping Time by Quick Joint Connection • Low -flow rate of natural gas and LP gas can be measured. • 10 L/min and 30 L/min of Air can be measured. • Compact size of 30 × 84.6 × 30 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39.
PAGE 19
D6F-A7/-L7/-N7 MEMS Flow Sensor Characteristics/Performance Model D6F-05N7-000 Flow Range (See note 1.) D6F-02L7-000 D6F-10A7-000 0 to 5 L/min 0 to 2 L/min 0 to 10 L/min Calibration Gas (See note 2.) Natural gas (13A) LP gas Air Flow Port Type Quick joint P10 Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max.
PAGE 20
D6F-A7D/-AB71D MEMS Flow Sensor Digital Compensation for High Accuracy • Temperature compensation and linear compensation produce high accuracy (±3% RD (25% to 100% FS)). • Compact models for 10 to 70 L/min. • Reduced piping work with quick-fastening feature. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39.
PAGE 21
D6F-A7D/-AB71D MEMS Flow Sensor Characteristics/Performance Model D6F-10A7D-000-0 Flow Range (See note 1.) 0 to 10L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P10 Electrical Connection Four-pin connector D6F-20A7D-000-0 0 to 20 L/min D6F-50A7D-000-0 0 to 50 L/min Quick joint P14 Power Supply 3.0 to 3.6 VDC Current Consumption 10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C Resolution 15 bit Accuracy (See note 3.) ±5%RD (10%F.S. ≤ Flow rate < 25%F.S.
PAGE 22
D6F-A7D/-AB71D Dimensions MEMS Flow Sensor (Unit: mm) CAD Data Please visit our CAD Data website, which is noted on the last page. ● MEMS Flow Sensors D6F-10A7D-000-0 D6F-20A7D-000-0 D6F-50A7D-000-0 CAD Data Lot No. Display A Recommended Quick joint male P10 type 9 max. A 1.6 max 2.5±0.05 2 min. (4.4) 84.6±0.5 X X 2 min. R0.4 R0.4 (60.6) (66.6) 10 +0 -0.05 dia. 17 dia. 20 dia. max. 12.85±0.05 dia. C0.1 (34.9) Y B 2.5 C0.3 +0.25 -0 C0.
PAGE 23
D6F-AB71 MEMS Flow Sensor Reduction of Piping Time by Quick Joint Connection • Reduce the influence of pulsation flow by bypass flow path • Compact size of 30 × 84.6 × 32 mm (H × W × D). RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39.
PAGE 24
D6F-AB71 MEMS Flow Sensor Characteristics/Performance Model D6F-30AB71-000 Flow Range (See note 1.) D6F-70AB71-000 0 to 30 L/min 0 to 70 L/min Calibration Gas (See note 2.) Air Flow Port Type Quick joint P14 Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC Current Consumption 15 mA max. with no load and Vcc of 12 to 24 VDC, GND = 0 VDC, 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ min.) Accuracy ±3%F.S.
PAGE 25
D6F-P MEMS Flow Sensor A Compact, High-Acuracy Flow Sensor with Superior Resistance to Environments. • Anti-dust performance is improved using the Cyclon method. • A full lineup of models with different connector types: bamboo joints, lead terminals for direct mounting on-board, and manifolds. • High accuracy of ±5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39. Ordering Information MEMS Flow Sensor Flow Port Type Connection Applicable fluid Flow Rate Change 0 to 0.
PAGE 26
D6F-P MEMS Flow Sensor Characteristics/Performance Model D6F-P0001A1 Flow Range (See note 1.) 0 to 0.1 L/min Calibration Gas (See note 2.) Air D6F-P0010A1 D6F-P0010A2 Bamboo joint Flow Port Type Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm Electrical Connection Lead terminals Power Supply 4.75 to 5.25 VDC Current Consumption 15 mA max. with no load and a Vcc of 5.0 V 0.5 to 2.
PAGE 27
D6F-P MEMS Flow Sensor Connections/Dimensions (Unit: mm) CAD Data Please visit our CAD Data website, which is noted on the last page. ● Lead Terminals Two, 3-dia. through hole 10 23.3 Two, 4.9 dia. 2.6 dia. 11.7 7.3 7.2 Two, 1.1 dia. 13.5 4.76 Three, 1.3-dia. lands Label 2.54 MADE IN JAPAN D6F 27.2 CAD Data Label: Gives model and lot numbers. D6F-P0001A1/D6F-P0010A1 Three, 0.8-dia. through holes 5.04 7.6±0.2 14 Recommended Dimensions for Connector Mounting Holes (Bottom view) 16.
PAGE 28
D6F-PH MEMS Differential Pressure Sensor A Compact, High-Acuracy Differential Pressure Sensor with Superior Resistance to Environments. • High accuracy of ±3% RD • Linearized and temperature compensated • Digital output (I2C communication) • High flow impedance to reduce the influence of bypass configuration RoHS Compliant Refer to the Common Precautions for the D6F Series on page 39. Ordering Information Applicable fluid (See note 1.) Differential pressure range (See note 3.
PAGE 29
D6F-PH MEMS Differential Pressure Sensor Output Characteristics D6F-PH0505AD3 D6F-PH0505AD4 D6F-PH0505AMD4 70000 70000 60000 60000 Output (count) Output (count) D6F-PH0025AD1 D6F-PH0025AD2 D6F-PH0025AMD2 50000 40000 30000 20000 10000 0 0 50 100 150 200 50 13024 (32E0) 40000 30000 20000 10000 0 -50 250 Differential pressure (Pa) Differential pressure (Pa) 0 Output 1024 (HEX) (0400) 50000 -30 -10 10 30 50 Differential pressure (Pa) 100 25024 (61C0) 150 37024 (90A0) 200 49024 (BF80)
PAGE 30
D6F-PH MEMS Differential Pressure Sensor Characteristics/Performance D6FD6FD6FD6FD6FD6FD6FD6FD6FPH0025AD1 PH0025AD2 PH0025AMD2 PH0505AD3 PH0505AD4 PH0505AMD4 PH5050AD3 PH5050AD4 PH5050AMD4 Differential pressure range (See note 1) 0 to 250 Pa ±50 Pa ±500 Pa Calibration Gas (See note 2.) Air Bamboo joint Bamboo joint Bamboo joint Maximum outside diameter: Maximum outside diameter: Maximum outside diameter: Port Type Manifold Manifold Manifold 4.9 mm, minimum outside 4.9 mm, minimum outside 4.
PAGE 31
D6F-PH MEMS Differential Pressure Sensor Connections/Dimensions (Unit: mm) CAD Data Please visit our CAD Data website, which is noted on the last page. ● Lead Terminals CAD Data D6F-PH0025AD1 D6F-PH0505AD3 D6F-PH5050AD3 18 7.05 High pressure side 26 20 16.5 10 Low pressure side Two, through hole 2 dia 22 Two, 4 dia. Two, 4.9 dia 6.5 Two, 4 dia. 12 10.5 4 Recommendation size for pin header installation (tolerrances: ±0.1) Two, through h Two, through ole 2.2 dia hole 2 dia. 16.5 10.
PAGE 32
D6F-PH MEMS Differential Pressure Sensor ● Connectors D6F-PH0025AD2 D6F-PH0505AD4 D6F-PH5050AD4 Note. Use M1.8 panhead screws or tapping screws for installation, and tighten the screws to a maximum torque of 0.36 N·m. Use the following connectors to connect to the Sensor. Connector : GHR-04V-S (made by J.S.T. Mfg. Co.) Terminals : SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.) Wires AWG26 to AWG30 18 7.05 High pressure side 26 20 16.5 10 Two, through hole 2 dia Low pressure side 22 Two, 4 dia. Two, 4.
PAGE 33
D6F-PH MEMS Differential Pressure Sensor Electrical connection Vcc pull-up resister 2.2 kΩ SDA Sensor (slave) GND Vcc 3.3 V Master SCL pull-up resister 2.2 kΩ Vcc Communication Serial Interface Slave address I2C HEX BIN (7bit) Speed mode Signal 0x6C 0b110_1100 Max.
PAGE 34
D6F-W MEMS Flow Sensor A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-Performance Flow Velocity* Measurement. • Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure. • High accuracy of ±5% FS. * The flow velocity is the value calculated from the mass flow rate in OMRON's specified wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of JAPAN.
PAGE 35
D6F-W MEMS Flow Sensor Characteristics/Performance Model D6F-W01A1 Flow Range (See note 1.) 0 to 1 m/s Calibration Gas (See note 2.) Air D6F-W04A1 D6F-W10A1 0 to 4 m/s Electrical Connection Three-pin connector Power Supply 10.8 to 26.4 VDC 0 to 10 m/s Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±5% FS (25°C characteristic) Repeatability (See note 3.) ±0.
PAGE 36
D6F-V MEMS Flow Sensor A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-Performance Flow Velocity* Measurement. • Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure. • Extremely compact, measuring only 24 × 14 × 8 mm. * The flow velocity is the value calculated from the mass flow rate in OMRON's specified wind tunnel. It does not indicate the flow velocity determined by the Measurement Law of JAPAN.
PAGE 37
D6F-V MEMS Flow Sensor Characteristics/Performance Model D6F-V03A1 Flow Range (See note 1.) 0 to 3 m/s Calibration Gas (See note 2.) Air Electrical Connection Three-pin connector Power Supply 3.15 to 3.45 VDC Current Consumption 15 mA max. with no load, with a Vcc of 3.3 VDC, and at 25°C Output Voltage 0.5 to 2 VDC (non-linear output, load resistance of 10 kΩ) Accuracy ±10% FS (25°C characteristic) Repeatability (See note 3.) ±1.5% FS Output Voltage (Max.) 2.
PAGE 38
Accessories for the D6F Series Dimensions (Unit: mm) CAD Data Please visit our CAD Data website, which is noted on the last page. ● Cable (Sold separately) D6F-CABLE1 Brown wire Black wire CAD Data 1. Vcc 2. Vout 3. GND 100±15 Blue wire 200±35 Connector :51021 (Manufactured by Molex, LLC) Terminal :50079 (Manufactured by Molex, LLC) Wire :0.
PAGE 39
Common Precautions for the D6F Series Safety Precautions Precautions for Correct Use ● Sensor Applications The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
PAGE 40
Common Precautions for the D6F Series D6F-A7/-L7/-N7/-A7D/-AB71/-AB71D D6F-P0010AM2 (1) Use male quick couplings for the piping, and secure them with the applicable quick fasteners. (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above.
PAGE 41
Common Precautions for the D6F Series D6F-PHAMD2/-PHAMD4 ● Operating Environment (1) Depending on the ambient environment and installation location, dust, dirt, and other foreign matter may come in inside the Sensor and block a part or all of the flow path or accumulate on internal components. This may result in the Sensor not being able to perform to the specifications given above.
PAGE 42
For correct way of use, please check respective User's Manuals below. 1) MEMS Flow Sensor D6F Series User's Manual (Manual No. A286-E1) 2) MEMS Flow Sensor D6F-A7D/-AB71D User's Manual (Manual No. A302-E1) 3) MEMS Flow Sensor D6F-P User's Manual (Manual No. A299-E1) 4) MEMS Flow Sensor D6F-W/D6F-V User's Manual (Manual No. A300-E1) 5) MEMS Flow Sensor D6F-PH User's Manual (Manual No. A288-E1) Please check each region's Terms & Conditions by region website.