Technical Data Sheet No. TD9709M Rev.
TABLE OF CONTENTS 1. UNPACKING THE GFC MASS FLOW CONTROLLER........................1 1.1 Inspect Package for External Damage.............................................. 1 1 1.2 Unpack the Mass Flow Controller....................................................... 1.3 Returning Merchandise for Repair.....................................................1 2 2. INSTALLATION.................................................................... 2.1 Primary Gas Connections..........................................
7.2.5 7.2.6 7.2.7 7.2.8 7.2.9 7.2.10 7.2.11 7.2.11.1 7.2.11.2 7.2.12 7.2.13 7.2.14 7.2.15 7.2.16 7.2.17 7.2.17.1 7.2.17.2 7.2.17.3 Connections and Initial Warm Up.................................. 18 ZERO Adjustment.......................................................... 18 25% Flow Adjustment.....................................................18 50% Flow Adjustment.....................................................18 75% Flow Adjustment....................................................
1. UNPACKING THE GFC MASS FLOW CONTROLLER 1.1 Inspect Package for External Damage Your GFC Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately. 1.
2. INSTALLATION 2.1 Primary Gas Connections Please note that the GFC Mass Flow Controller will not operate with liquids. Only clean gases are allowed to be introduced into the instrument. Contaminated gases must be filtered to prevent the introduction of impediments into the sensor. CAUTION: It is the users responsibility to determine if the instrument is appropriate for their OXYGEN application, and for specifying O2 cleaning service if required.
PIN FUNCTION 1 2 3 4 5 6 7 8 9 10 11 12 13 0 to 5 VDC Flow Signal Common 0 to 5 VDC Flow Signal Output Common Open (Purge) Common, Power Supply (unassigned) +12 VDC (+24 VDC*) Power Supply Remote Setpoint Input 4 to 20 mA (-) Flow Signal Return (use with 14) Remote Setpoint Common (use with 8) +5VDC Reference Output for Remote Setpoint Valve Off Control Auxiliary +12 VDC (+24 VDC*) Power Output (For Loads <100 mA) 4 to 20 mA (+) Flow Signal Output Chassis Ground 14 15 1&2 0-5 VDC OUTPUT 5&7 +12 VDC (+2
FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS 2.2.1 Valve Control Configuration There are three basic valve control options. (a) LOCAL or REMOTE control. (b) 0 to 5 VDC or 4 to 20 mA setpoint signal *Note: this only applies for the REMOTE control configuration; (c) 2% cutoff active or not active. Note: 2% cutoff not available for GFC 57/67/77. When active, the 2% cutoff will shut off the power to the valve when a setpoint of less than 2% of the full scale flow range is set.
2.2.3 Panel Mounting Readouts Another option for the GFC Mass Flow Controller is the Panel Mounting Remote Readout. In this configuration the LCD readout is supplied with a three foot long extension wire, and no aluminum housing around the LCD. The LCD readout for panel mounting includes a bezel with two plastic screws which conveniently fit into a rectangular cut-out for panel mounting (see Figure 2-3). FIGURE 2-3 CUTOUT DIMENSIONS FOR LCD PANEL MOUNTING 3.
4. SPECIFICATIONS FLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work with clean gases only. Never try to meter or control flow rates of liquids. CALIBRATIONS: Supplied at Standard Conditions (14.7 psia and 70F F), or Normal Conditions (0 FC and 1.01 bar abs) unless otherwise requested or stated. ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II. ACCURACY: ACCURACY % FS OPTIONAL ENHANCED ACCURACY % FS MODEL GFC 17, 37 FLOW RANGE FLOW 2.
LEAK INTEGRITY: 1 x 10-7 sccs He max to the outside environment. ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal. Standard calibration is in horizontal position. OUTPUT SIGNALS: Linear 0 to 5 VDC (1000 Ω minimum load impedance) and 4 to 20 mA (0 to 500 Ω loop resistance); 20 mV peak to peak max noise for GFC 17/37/47 and 100 mV peak to peak max noise for GFC 57/67/77. 263COMMAND SIGNAL: Analog 0 to 5 VDC (100 K minimum input impedance) or 4 to 20 mA (250 Ω input impedance).
4.1 CE Compliance GFC Mass Flow Controllers are in compliance with CE test standards stated below: EMC Compliance with 89/336/EEC as amended; Emission Standard: EN 55011:1991, Group 1, Class B Immunity Standard: EN 55082-1:1992 4.
TABLE IV PRESSURE DROPS MAXIMUM PRESSURE DROP FLOW RATE [liters/min] [mm H2O] [psid] [mbar] UP to 10 15 20 30 40 720 2630 1360 2380 3740 1.06 3.87 2.00 3.50 5.50 75 266 138 241 379 GFC 57 GFC 67 50 60 100 200 500 5440 7480 12850 7031 8437 8.00 11.00 18.89 10.00 12.00 551 758 1302 690 827 GFC 77 1000 10547 15.00 1034 MODEL GFC 17 GFC 37 GFC 47 5. OPERATING INSTRUCTIONS 5.
5.2 Flow Signal Output Readings The flow signal output can be viewed on the LCD display, remote panel meter, digital multimeter, or other display device connected as shown in Figure 2.1. If an LCD display has been ordered with the GFC, the observed reading is in direct engineering units, for example, 0 to 10 sccm or 0 to 100 slpm (0 to 100% indication is optional). Engineering units for a specific GFC are shown on the flow transducer's front label.
Setpoints are controlled locally or remotely. Setpoints inputs respond to analog 0 to 5 VDC or 4 to 20 mA reference voltages (default jumper setting is 0 to 5 VDC). Voltage is a linear representation of 0 to 100% of the full scale mass flow rate. Response times to setpoint changes are 1 second (GFC 17), 2 seconds (GFC 37/47) and 5 seconds (GFC 57/67/77) within 2% of the final flow over 25 to 100% of full scale.
Conversely, when the connection is left open or pin [12] remains unconnected the valve remains active. The valve will remain active when the VALVE OFF pin remains “floating”. This feature is compatible with open collector NPN transistor switches, as found in DC output ports of programmable controllers and similar devices. The simplest means for utilizing the VALVE OFF control feature, is to connect a toggle switch between the COMMON and VALVE OFF pins of the GFC transducer.
6.2 Flow Path Cleaning Inspect visually the flow paths at the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter. Remove debris carefully using tweezers and blowing low pressure clean air or Nitrogen from the inlet side. If the flow path is not unclogged, please return meter to Aalborg7 for servicing. 6.2.1 Do not attempt to disassemble the sensor. Disassembly will invalidate calibration.
FIGURE 6-1 SOLENOID VALVE Various corrosive gases may demand more frequent replacement of VITON7 O-rings and seals inside the valve. Be sure to use an elastomer material, appropriate for your specific gas application. Contact your distributor or Aalborg7 for optional sealing materials available. Set the GFC into PURGE mode (see Figure 2-1), and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen.
7. , 7.1 CALIBRATION PROCEDURES NOTE: Removal of the factory installed calibration seals and/or any adjustments made to the meter, as described in this section, will void any calibration warranty applicable. Flow Calibration Aalborg7 Instruments' Flow Calibration Laboratory offers professional calibration support for Mass Flow Meters and Controllers, using precision calibrators under strictly controlled conditions. NIST traceable calibrations are available.
FIGURE 7-1 CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS (BACK OF GFC) 7.2 Calibration of GFC Mass Flow Controllers All adjustments in this section are made from the outside of the meter, there is no need to disassemble any part of the instrument. GFC Mass Flow Controllers may be field recalibrated/checked for the same range they were originally factory calibrated for. When linearity adjustment is needed, or flow range changes are being made proceed to step 7.2.4.
7.2.2 ZERO Adjustment Shut off the flow of gas into the Mass Flow Controller. To ensure that no seepage or leak occurs into the meter, temporarily disconnect the gas source. Using the multimeter and the insulated screwdriver, adjust the ZERO potentiometer [R34] through the access window for 0 VDC (or 4 mA respectively) at zero flow. 7.2.3 SPAN Adjustment Reconnect the gas source. Adjust the control setpoint to 100% of full scale flow. Check the flow rate indicated against the flow calibrator.
7.2.5 Connections and Initial Warm Up Connect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and [14] for 4 to 20 mA) of the 15-pin “D” connector - (see Figure 2-1). If calibration to a new flow range or different gas is being performed, it may be necessary to remove any jumpers at J1A, J1B, and J1C before beginning linearizing procedure. Power up the Mass Flow Controller for at least 30 minutes prior to commencing the calibration procedure. 7.2.
7.2.9 75% Flow Adjustment Using the flow regulator, increase the flow rate to 75% of full scale flow. Check the flow rate indicated against the flow calibrator. The output of the flow meter should read 3.75VDC ±63mV (or 16mA ±0.25mA). If the reading is outside of that range, place the jumper at [J1B] as appropriate to increase or decrease the signal. Adjust the setting for potentiometer [R39] by using the insulated screwdriver through the access window, until reading is within specification. 7.2.
7.2.14 50% Flow Adjustment Change the setpoint to 2.50 VDC to control at 50% of full scale flow. Check the flow rate indicated against the flow calibrator. If the flow rate is not within ±0.75% of full scale, re-adjust the setting for potentiometer [R38], until the flow output is correct. 7.2.15 75% Flow Adjustment Change the setpoint to 3.75 VDC to control at 75% of full scale flow. Check the flow rate indicated against the flow calibrator. If the flow rate is not within ±0.
7.2.17.2 Adjust Scaling Using a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA signal at the 15-pin “D” connector, set the flow rate on the GFC to full scale flow (5 VDC or 20mA). Maintain full scale flow, and adjust the potentiometer [R3] on the LCD printed circuit board to desired full scale flow reading. 7.2.17.3 Change Decimal Point To change the decimal place on the LCD display readout, simply move the jumper to the appropriate location on the [8] pin header block.
8.
INDICATION calibration off LIKELY REASON REMEDY gas metered is not the same as what meter was calibrated for use matched calibration composition of gas changed see K factor tables in APPENDIX 2 gas leak locate and correct pc board defective return to factory for replacement RFE dirty flush clean or disassemble to remove impediments occluded sensor tube flush clean or disassemble to remove impediments or return to factory for replacement filter screen obstructed at inlet flush clean or disass
For best results it is recommended that instruments are returned to the factory for servicing. See section 1.3 for return procedures. 8.3 Technical Assistance Aalborg7 Instruments will provide technical assistance over the phone to qualified repair personnel. Please call our Technical Assistance at 845-770-3000. Please have your Serial Number and Model Number ready when you call. 9. CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor.
APPENDIX 1 COMPONENTS DIAGRAM aalborg7 GFC METERING PC BOARD (TOP SIDE) 25
COMPONENTS DIAGRAM METERING PC BOARD (BOTTOM SIDE) 26
APPENDIX 2 GAS FACTOR TABLE (“K” FACTORS) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] .5829 1.0000 .4346 .7310 1.4573 1.205 .6735 .4089 .5082 .8083 .38 .26 .3855 .3697 .3224 .2631 .2994 .324 .291 .7382 .658 .4036 .240 .352 .492 .1244 .1244 .1167 .1279 .1778 .0539 .0647 .1369 .1161 .1113 .3514 .4007 .3648 .336 .374 .2016 .2016 1.162 1.
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] 1.00 .4357 .1947 .3538 .4252 .2522 .4044 .2235 .4271 .3714 .3896 .2170 .50 .3918 .3225 .3891 .60 .5191 .9784 .4967 .3287 .3538 .3834 .3697 .4210 .4252 .4589 .2031 .2240 .2418 .1760 .5696 .2668 1.454 2.43 2.05 .2421 .1792 1.0106 1.35 1.9 1.722 .508 .15 .1432 .140 .1882 .150 .1604 .224 .366 .3414 .3914 .420 .3395 .3513 .244 .365 .268 .1873 .176 .1357 .1432 .153 .1113 .1654 .140 .1544 .161 .160 .164 .185 .1404 .1071 1.241 1.241 1.241 .1834 .
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] 1.000 1.000 .764 .9998 .9987 .7893 .80 .2492 .27 .2951 1.453 .7175 .75 .0861 .1912 .3171 .3479 .0545 .1025 .2397 .1108 .3872 .3701 .0593 .5328 .5328 3.610 1.627 1.206 .893 5.707 3.613 1.520 9.90 3.593 2.503 3.739 .715 .715 .5843 .4313 .5835 .6299 .68 .5180 .2499 .2126 .3512 .51 1.46 .990 1.000 .737 .4802 .6134 .7128 .176 .9926 .6337 .446 .2554 .2134 .3950 .174 .4438 .759 .3274 .3547 .1106 .1926 .3221 .2459 .164 .1373 .387 .4343 .246 .2328 .
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] .36 .3021 .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .1324 .1610 .1250 .399 .366 .3189 .1270 .1691 .1488 .1592 .1543 .127 .182 .1357 .1380 6.843 5.620 6.127 1.967 1.877 1.433 7.580 4.643 2.858 6.516 4.562 4.224 4.64 6.129 6.043 .2031 .161 8.
APPENDIX 3 DIMENSIONAL DRAWINGS 2.38 0.95 DIMENSIONS: INCH [mm] GFC17 MASS FLOW CONTROLLER NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
2.38 0.95 5.98 [151.8] 4.88 [123.8] 3.94 [99.9] 1.38 [34.9] 0.63 [15.9] 5.19 [131.8] * 0.63 [15.9] 7.21 [183.1] 7.33 [186.2] 1.25 [31.8] 0.28 [7.1] 2.69 [68.3] 0.69 [17.5] 6-32 * FOR HIGH FLOW MASS FLOW CONTROLLER ONLY DIMENSIONS: INCH [mm] GFC37/47 MASS FLOW CONTROLLER NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
2.72 (69,1) 2.38 0.95 6.9" (175,3) 0.875 (22,2) 7" (177,8) 9.98 (253,5) 12.30 (312,4) 0.18 (4,6) SAE/MS SWAGELOK 3/8 TUBE CONNECTOR 10-24 UNC 0.25 1.39 (35,3) 1.39 (35,3) 1" (25,4) 1" (25,4) 2.15 (54,6) 4.
control valve 50.00 CE 7.55 (191.8 mm) 3.00 (76.2 mm) 3.00 (76.2 mm) 7.25 (184.1 mm) 10.42 (264.7 mm) 12.62 (320.5 mm) 2.50 (63.5 mm) 2 x 1/2 compression fittings 6.75 (171.5 mm) 4 x 1/4-20 UNC-2B 0.35 GFC67 MASS FLOW CONTROLLER NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
8.54 (217 mm) control valve 50.00 CE 4.00 (101.6 mm) 4.00 (101.6 mm) 3/4-14 NPT (both sides) 7.30 (185.4 mm) 10.47 (266 mm) 3.00 (76.2 mm) 6.80 (172.7 mm) 1/4-20 UNC-2B 0.35 GFC77 MASS FLOW CONTROLLER NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Aalborg7.
APPENDIX 4 WARRANTY Aalborg7 Mass Flow Systems are warranted against parts and workmanship for a period of one year from the date of purchase. Calibrations are warranted for up to six months after date of purchase, provided calibration seals have not been tampered with. It is assumed that equipment selected by the customer is constructed of materials compatible with gases used. Proper selection is the responsibility of the customer.
