Technical Data Sheet No. TD0701M Rev.
TABLE OF CONTENTS 1. UNPACKING THE XFM MASS FLOW METER......................................... 1 1 1.1 Inspect Package for External Damage................................................. 1 1.2 Unpack the Mass Flow Meter............................................................... 1 1.3 Returning Merchandise for Repair....................................................... 2. INSTALLATION........................................................................................ 1 2.
7. CALIBRATION PROCEDURES................................................................. 22 7.1 Flow Calibration...............................................................................22 7.2 Gas Calibration of XFM Mass Flow Meters........................................ 23 7.2.1 Connections and Initial Warm Up.....................................................23 7.2.2 ZERO Check/Adjustment Adjustment................................................. 24 7.2.3 Gas Linearization Table Adjustment.....
1. UNPACKING THE XFM MASS FLOW METER 1.1 Inspect Package for External Damage Your XFM Mass Flow Meter was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately. 1.2 Unpack the Mass Flow Meter Open the carton carefully from the top and inspect for any sign of concealed shipping damage.
CAUTION: XFM TRANSDUCERS SHOULD NOT BE USED FOR MONITORING OXYGEN GAS UNLESS SPECIFICALLY CLEANED AND PREPARED FOR SUCH APPLICATION. For more information, contact your distributor or Aalborg7. Attitude limit of the Mass Flow Meter is ±15F from calibration position (standard calibration is in horizontal position). This means that the gas flow path of the Flow Meter must be within this limit in order to maintain the original calibration accuracy.
2.2 Electrical Connections XFM is supplied with a 15 pin "D" connector. Pin diagram is presented in Figure b-1. 2.2.1 Power Supply Connections The power supply requirements for XFM transducers are: 11 to 26 Vdc, (unipolar power supply) DC Power (+) --------------- pin 7 of the 15 pin "D" connector DC Power (-) --------------- pin 5 of the 15 pin "D" connector CAUTION: Do not apply power voltage above 26Vdc. Doing so will cause XFM damage or faulty operation. 2.2.
2.2.3 Communication Parameters and Connections The digital interface operates via RS485 (optional RS-232 or Profibus DP available) and provides access to applicable internal data including: flow, CPU temperature reading, auto zero, totalizer and alarm settings, gas table, conversion factors and engineering units selection, dynamic response compensation and linearization table adjustment.
Figure b-1 - XFM 15 PIN "D" CONNECTOR CONFIGURATION PIN XFM FUNCTION 1 Common, Signal Ground For Pin 2 (4-20 mA return) 2 0-5 Vdc or 4-20mA Flow Signal Output 3 Relay No. 2 - Normally Open Contact 4 Relay No. 2 - Common Contact 5 Common, Power Supply (- DC power for 11 to 26 Vdc) 6 Relay No. 1 - Common Contact 7 Plus Power Supply (+ DC power for 11 to 26 Vdc) 8 RS485 (-) (Optional RS232 TX) 9 RS232 Signal GND (RS-485 GND Optional) 10 Do not connect (Test/Maintenance terminal) 11 Relay No.
3. PRINCIPLE OF OPERATION The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube. The remainder of the gas flows through the primary flow conduit. The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch. According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another.
4. SPECIFICATIONS FLOW MEDIUM: Please note that XFM Mass Flow Meters are designed to work only with clean gases. Never try to measure flow rates of liquids with any XFM. CALIBRATIONS: Performed at standard conditions [14.7 psia (101.4 kPa) and 70FF (21.1FC)] unless otherwise requested or stated. ENVIRONMENTAL (PER IEC 664): Installation Level II; Pollution Degree II. FLOW ACCURACY (INCLUDING LINEARITY): ±1% of FS at calibration temperature and pressure. REPEATABILITY: ±0.15% of full scale.
CAUTION: Aalborg makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models.
FLOW RANGES TABLE I XFM 17 LOW FLOW MASS FLOW METER* CODE scc/min [N2] CODE std liters/min [N2] 00 0 to 5 07 0 to 1 01 0 to 10 08 0 to 2 02 0 to 20 09 0 to 5 03 0 to 50 10 0 to 10 04 0 to 100 05 0 to 200 06 0 to 500 TABLE II XFM 37 MEDIUM FLOW MASS FLOW METER* CODE std liters/min [N2] 30 20 31 32 30 40 33 50 TABLE III XFM XFM 47/57/67/77 HIGH FLOW MASS FLOW METERS* CODE std liters/min [N2] 40 60 41 42 80 100 50 200 60 500 70 1000 *Flow rates are stated for Nitrog
TABLE IV PRESSURE DROPS MODEL FLOW RATE [std liters/min] XFM 17 up to 10 MAXIMUM PRESSURE DROP [mm H2O] [psid] [kPa] 20 130 TBD 0.18 TBD 1.275 TBD 30 TBD TBD TBD 40 TBD TBD TBD 50 TBD TBD TBD 60 TBD TBD TBD 100 TBD TBD TBD 200 TBD TBD TBD XFM 67 500 TBD TBD TBD XFM 77 1000 TBD TBD TBD XFM 37 XFM 47 XFM 57 TABLE V APPROXIMATE WEIGHTS MODEL WEIGHT SHIPPING WEIGHT XFM 17 transmitter 2.20 lbs. (1.00 kg) 3.70 lbs. (1.
5. OPERATING INSTRUCTIONS 5.1 Preparation and Warm Up It is assumed that the Mass Flow Meter has been correctly installed and thoroughly leak tested as described in section 2. Make sure the flow source is OFF. When applying power to a flow meter within the first two seconds, you will see on the LCD display: the product name, the software version, and revision of the EEPROM table (applicable for LCD option only). AALBORG XFM 485 S: Ver1.4 Rev.
Note: Allow the Digital Mass Flow Meter to warm-up for a MINIMUM of 6 minutes. During initial powering of the XFM transducer, the flow output signal will be indicating a higher than usual output. This is an indication that the XFM transducer has not yet attained its minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually indicate zero.
5.3 XFM Parameters Settings 5.3.1 Engineering Units Settings The XFM Mass Flow Meter is capable of displaying flow rate with 23 different Engineering Units. Digital interface commands (see paragraph 8.3 ASCII Command Set “XFM SOFTWARE INTERFACE COMMANDS”) are provided to: - get currently active Engineering Units set desired Engineering Units.
Note: Once Flow Unit of Measure is changed, the Totalizer’s Volume/Mass based Unit of Measure will be changed automatically. 5.3.2 Gas Table Settings. The XFM Mass Flow Meter is capable of storing calibration data for up to 10 different gases. Digital interface commands are provided to: - get currently active Gas Table number and Gas name set desired Gas Table. Note: By default the XFM is shipped with at least one valid calibration table (unless optional additional calibrations were ordered).
Local maintenance push button is available for manual Totalizer reset on the field. The maintenance push button is located on the right side of the flow meter inside the maintenance window above the 15 pin D-connector (see Figure c-1 “XFM configuration jumpers”). Note: In order to locally Reset Totalizer, the reset push button must be pressed during power up sequence. The following sequence is recommended: 1. 2. 3. 4. Disconnect XFM from the power. Press maintenance push button (do not release).
Latch Mode- Controls Latch feature when Relays are assigned to Alarm event. Following settings are available: 0123- Latch feature is disabled for both relays Latch feature is enabled for Relay#1 and disabled for Relay#2 Latch feature is enabled for Relay#2 and disabled for Relay#1 Latch feature is enabled for both relays. Note: If the alarm condition is detected, and the Relay is assigned to Alarm event, the corresponding Relay will be energized. Note: By default, flow alarm is non-latching.
5.3.6 K Factors Settings Conversion factors relative to Nitrogen for up to 36 gases are stored in the XFM (see APPENDIX II). In addition, provision is made for a user-defined conversion factor. Conversion factors may be applied to any of the ten gas calibrations via digital interface commands. The available K Factor settings are: • • • Disabled (K = 1). Internal Index The index [0-35] from internal K factor table (see APPENDIX II). User Defined User defined conversion factor.
AUTOZERO IS ON! Figure b-6: XFM Screen in the beginning of Auto Zero procedure. The Auto Zero procedure normally takes 1 - 2 minutes during which time the DP Zero counts and the Sensor reading changes approximately every 3 to 6 seconds. AUTOZERO IS ON! S: 405 DP: 512 Figure b-7: XFM during the Auto Zero procedure. The nominal value for a fully balanced sensor is 120 Counts.
5.3.8 Self Diagnostic Alarm XFM series Mass Flow Meters are equipped with a self-diagnostic alarm which is available via multicolor LED, digital interface and on screen indication (for devices with optional LCD).
Analog output signals of 0-5 Vdc and 4-20 mA are attained at the appropriate pins of the 15-pin "D" connector (see Figure b-1) on the side of the XFM transducer. Table VI Analog Output Jumper Configuration ANALOG SIGNAL OUTPUT Flow Rate Output Jumper Header J7 0-5 Vdc J7.A J7.B J7.C 4-20 mA 5-9 6-10 7-11 J7.A J7.B J7.C 1-5 2-6 3-7 See APPENDIX IV for actual jumpers layout on the PCB. Note: Digital output (communication) is simultaneously available with analog output. 6. MAINTENANCE 6.
6.2 Flow Path Cleaning Before attempting any disassembly of the unit for cleaning, try inspecting the flow paths by looking into the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter. Remove debris as necessary. If the flow path is clogged, proceed with steps below. Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids, please return meter for servicing. 6.2.
The 60 micron filter screen will now become visible. Remove the screen. DO NOT remove the RFE inside the flow transducer. Clean or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying. Inspect the flow path inside the transducer for any visible signs of contaminants. If necessary, flush the flow path with alcohol. Thoroughly dry the flow paths by flowing clean dry gas through. Re-install the inlet parts and filter screen.
Generally, calibrations are performed using dry nitrogen gas. The calibration can then be corrected to the appropriate gas desired based on relative correction [K] factors shown in the gas factor table (see APPENDIX III). A reference gas, other than nitrogen, may be used to better approximate the flow characteristics of certain gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration.
7.2.2 ZERO Check/Adjustment Using Aalborg® supplied calibration and maintenance software open Back Door access: Query/BackDoor/Open When software prompts with Warning, click the [YES] button. This will open the access to the rest of the Query menu. Start Sensor Compensated Average reading: Query/Read/ SensorCompAverage This will display Device Sensor Average ADC counts. With no flow conditions, the sensor Average reading must be in the range 120± 10 counts.
Sensor readings are entered in counts of 12 bits ADC output and should always be in the range of 0 to 4095. There are 11 elements in the table so the data should be obtained at an increment of 10.0 % of full scale (0.0, 10.0, 20.0, 30.0, 40.0, 50.0, 60.0, 70.0, 80.0, 90.0 and 100.0 % F.S.). Note: Do not alter memory index 113 (must be 120 counts) and 114 (must be 0.0). These numbers represent zero flow calibration points and should not be changed.
7.3 Analog output Calibration of XFM Mass Flow Meters XFM series Mass Flow Meters are equipped with calibrated 0-5 Vdc and 4-20 mA output signals. The set of the jumpers (J7A, J7B, J7C) on the printed circuit board is used to switch between 0-5 Vdc and 4-20 mA output signals (see Figure c-1 “XFM configuration jumpers). AutoZero/Reset push button.
7.3.1 Initial Setup Power up the Mass Flow Meter for at least 15 minutes prior to commencing the calibration procedure. Make sure absolutely no flow takes place through the meter. Establish digital RS-485/RS-232 communication between PC (communication terminal) and XFM. The commands provided below assume that calibration will be performed manually (w/o Aalborg® supplied calibration and maintenance software) and the device has RS-485 address 11.
7. Save AoutScale_mA in to the EEPROM: Save AoutOffset_mA in to the EEPROM: !11,MW,27,Y[CR] !11,MW,28,Z[CR] Where: Y – the calculated AoutScale_mA value. Z – the calculated AoutOffset_mA value. Note: When done with the analog output calibration make sure the DAC update is enabled and the BackDoor is closed (see command below).
Several examples of commands follow. All assume that the XFM has been configured for address 18 (12 hex) on the RS485 bus: 1. To get current calibration tables: !12,G The XFM will reply: !12,G 0 AIR > (Assuming Current Gas table is #0, calibrated for AIR ) 2. To get current Alarm status: The XFM will reply: !12,A,R !12,N (Assuming no alarm conditions) 3. To get a flow reading: !12,FThe XFM will reply: !12,50.0 (Assuming the flow is at 50% FS) 4.
30 4 Gas Select G N D G0 through G9, NO ARGUMENT (read status) N:D Or N:E NO ARGUMENT (read current mode of the N2 Roll back ) G0 through G9, N:D D (enable Roll back to N2)* 0 (gas 0)* to 9 (gas 9) N:E D:0x0,L:9,E 0x0 – diagnostic word 9 - current LED status E - LCD mode (enabled) NO ARGUMENT (read current status of the diagnostic word) E (enable Roll back to N2) D:D (Actual flow in current engineering units) Response D (disable LCD ** Diagnostic Messages)
31 Alarm conditions: Flow > High Limit = H Flow < Low Limit = L Low < Flow < High = N Sets / reads the status of the gas flow alarms. Note: High and Low limits have to be entered in the %F.S. High alarm value has to be more than Low alarm value. Flow Alarms 6 Starts /reads the status of 5 the auto zero feature (Note: The Z,N command can be used only when absolutely no flow thru the meter and no earlier then 6 minutes after power up. It can take several minutes to complete.
32 Totalizer Relay Action NOTE: If Warm Up Delay option is set to E (enabled) the Totalizer will not totalize the flow during first 6 minutes after power up. Sets and controls action of the flow totalizer. Assigns action of the two SPDT relays. The coil is energized when the condition specified by an Argument 2 becomes true.
33 9 K Factors See list of the internal K-factors in the operating manual. (NOTE: does not work with % F.S. engineering unit.) Applies a gas correction factor to the currently selected primary gas calibration table. No.
34 10 Units Note: The units of the totalizer output are not per unit time. Set the units of measure for gas flow and totalizer reading. No. COMMAND DESCRIPTION NAME U Command No Argument Returns current EU.
35 14 13 1 2 3 4 - MW MR B E C 5 6 7 8 9 Command Response - Attempt to Alter Write Protected Area in the EEPROM. Proper Command or Argument is not found. Wrong value of the Argument. Reserved. Manufacture specific info EE KEY (wrong key or key is disabled). 0000 to 999 (Table Index) MW,XXX, where: XXX=Table Index B: where: Value (0 – 100.
9. TROUBLESHOOTING 9.1 Common Conditions Your XFM Digital Mass Flow Meter was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was calibrated according to your desired flow and pressure conditions for a given gas or a mixture of gases. It was carefully packed to prevent damage during shipment.
9.2 Troubleshooting Guide NO. INDICATION LIKELY REASON SOLUTION 1 No zero reading after 15 min. warm up time and no flow condition. Embedded temperature has been changed. Perform Auto Zero Procedure (see section 5.3.6 “Zero Calibration”). 2 Status LED indicator Power supply is bad or and LCD Display polarity is reversed. remains blank when unit is powered up. No response when flow is introduced from analog outputs 0-5 Vdc or 4-20 mA. Measure voltage on pins 7 and 5 of the 15 pin D-connector.
NO. INDICATION 8 Gas flows through the XFM, but LCD Display reading and the output voltage 0-5 Vdc signal do not respond to flow. LIKELY REASON The gas flow is too low Check maximum flow range on transducer’s for particular model of front panel and make required flow XFM. adjustment. XFM 17 models: RFE is Unscrew the inlet compression fitting of the not connected properly meter and reinstall RFE (see section 6.2.2). to the inlet fitting. NOTE: Calibration accuracy can be affected.
9.3 Technical Assistance Aalborg® Instruments will provide technical assistance over the phone to qualified repair personnel. Please call our Technical Assistance at 845-770-3000. Please have your Serial Number and Model Number ready when you call. 10. CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor. The K factor is derived from gas density and coefficient of specific heat.
APPENDIX I AALBORG7 XFM EEPROM Variables Rev.A0 [12/19/2006] Gas Independent Variables INDEX NAME DATA TYPE NOTES 0 BlankEEPROM char[10] Do not modify. Table Revision [PROTECTED] 1 SerialNumber char[20] Serial Number [PROTECTED] 2 ModelNumber char[20] Model Number [PROTECTED] 3 SoftwareVer char[10] Firmware Version [PROTECTED] 4 TimeSinceCalHr float Time since last calibration in hours. 5 Options1 uint Misc.
INDEX NAME DATA TYPE NOTES 35 Klag [5] float DRC Lag Constant [Do Not Alter] 36 Kgain[0] float Gain for DRC Lag Constant [Do Not Alter] 37 Kgain[1] float Gain for DRC Lag Constant [Do Not Alter] 38 Kgain[2] float Gain for DRC Lag Constant [Do Not Alter] 39 Kgain[3] float Gain for DRC Lag Constant [Do Not Alter] 40 Kgain[4] float Gain for DRC Lag Constant [Do Not Alter] 41 Kgain[5] float Gain for DRC Lag Constant [Do Not Alter] 42 Zero_T float Resistance when last AutoZero
Calibration Table: Gas Dependent Variables.
APPENDIX II INTERNAL "K" FACTORS CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. INDEX ACTUAL GAS K Factor Relative to N2 Cp [Cal/g] 0.5829 1.000 0.4346 .4036 0.24 0.352 DENSITY [g/I] 0 1 2 Acetylene C2H2 Air Allene (Propadiene) C3H4 3 Ammonia NH3 .7310 .492 4 Argon Ar 1.4573 .1244 1.782 5 Arsine AsH3 0.6735 0.1167 3.478 6 Boron Trichloride BCl3 0.4089 0.1279 5.
APPENDIX III GAS FACTOR TABLE (“K FACTORS”) CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that require accuracy better than +/- 5 to 10%. ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] .5829 1.0000 .4346 .7310 1.4573 1.205 .6735 .4089 .5082 .8083 .38 .26 .3855 .3697 .3224 .2631 .2994 .324 .291 .7382 .658 .4036 .240 .352 .492 .1244 .1244 .1167 .1279 .1778 .0539 .0647 .1369 .1161 .1113 .3514 .4007 .3648 .336 .374 .2016 .2016 1.162 1.
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] 1.00 .4357 .1947 .3538 .4252 .2522 .4044 .2235 .4271 .3714 .3896 .2170 .50 .3918 .3225 .3891 .60 .5191 .9784 .4967 .3287 .3538 .3834 .3697 .4210 .4252 .4589 .2031 .2240 .2418 .1760 .5696 .2668 1.454 2.43 2.05 .2421 .1792 1.0106 1.35 1.9 1.722 .508 .15 .1432 .140 .1882 .150 .1604 .224 .366 .3414 .3914 .420 .3395 .3513 .244 .365 .268 .1873 .176 .1357 .1432 .153 .1113 .1654 .140 .1544 .161 .160 .164 .185 .1404 .1071 1.241 1.241 1.241 .1834 .
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] 1.000 1.000 .764 .9998 .9987 .7893 .80 .2492 .27 .2951 1.453 .7175 .75 .0861 .1912 .3171 .3479 .0545 .1025 .2397 .1108 .3872 .3701 .0593 .5328 .5328 3.610 1.627 1.206 .893 5.707 3.613 1.520 9.90 3.593 2.503 3.739 .715 .715 .5843 .4313 .5835 .6299 .68 .5180 .2499 .2126 .3512 .51 1.46 .990 1.000 .737 .4802 .6134 .7128 .176 .9926 .6337 .446 .2554 .2134 .3950 .174 .4438 .759 .3274 .3547 .1106 .1926 .3221 .2459 .164 .1373 .387 .4343 .246 .2328 .
ACTUAL GAS K FACTOR Relative to N2 Cp [Cal/g] Density [g/I] .36 .3021 .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .1324 .1610 .1250 .399 .366 .3189 .1270 .1691 .1488 .1592 .1543 .127 .182 .1357 .1380 6.843 5.620 6.127 1.967 1.877 1.433 7.580 4.643 2.858 6.516 4.562 4.224 4.64 6.129 6.043 .2031 .161 8.
APPENDIX IV COMPONENT DIAGRAM TOP COMPONENT SIDE Aug.
BOTTOM COMPONENT SIDE Aug 09, 2007 49
APPENDIX V DIMENSIONAL DRAWINGS XFM WITHOUT READOUT 50
XFM WITH PROFIBUS CAPABILITY 51
XFM WITH READOUT OPTION 52
APPENDIX VI WARRANTY Aalborg7 Mass Flow Systems are warranted against parts and workmanship for a period of one year from the date of purchase. Calibrations are warranted for up to six months after date of purchase, provided calibration seals have not been tampered with. It is assumed that equipment selected by the customer is constructed of materials compatible with gases used. Proper selection is the responsibility of the customer.
