Specifications

Contents
SRS Residual Gas Analyzer
x
MGparam, param: 0.0000 - 2000.0000,?........................................................................ 6-55
MVparam, param: 0 - 2490,?.......................................................................................... 6-55
SPparam, param:0.0000 - 10.0000, ?.............................................................................. 6-56
STparam, param:0.0000 - 100.0000, ?............................................................................ 6-56
Mass Filter Control Commands............................................................................................... 6-58
MLparam, param: 0.0000 - M_MAX ............................................................................. 6-58
Error Reporting Commands..................................................................................................... 6-59
EC? .................................................................................................................................. 6-59
ED? .................................................................................................................................. 6-59
EF?................................................................................................................................... 6-60
EM?.................................................................................................................................. 6-60
EP?................................................................................................................................... 6-61
EQ? .................................................................................................................................. 6-61
ER? .................................................................................................................................. 6-62
Tuning Commands ................................................................................................................... 6-63
CE? .................................................................................................................................. 6-63
DIparam, param: 0 - 255, *, ?......................................................................................... 6-63
DSparam, param: -0.8500 - +0.8500, *, ?....................................................................... 6-64
RIparam, param: -86.0000 - +86.0000, *, ?, none.......................................................... 6-65
RSparam, param: 600.0000 - 1600.0000, *, ?, none....................................................... 6-67
Error Byte Definitions........................................................................................................................... 6-69
Chapter 7 RGA Tuning 7-1
Introduction............................................................................................................................................. 7-2
Tuning Options ....................................................................................................................................... 7-3
Peak Tuning Procedure.......................................................................................................................... 7-4
Introduction................................................................................................................................. 7-4
General Procedure...................................................................................................................... 7-5
Peak Position Tuning Algorithms ............................................................................................. 7-6
Peak Width Tuning Algorithms: ................................................................................................ 7-8
Temperature effects on the mass scale calibration:............................................................... 7-9
Sensitivity Tuning Procedure .............................................................................................................. 7-11
Electron Multiplier Tuning Procedure................................................................................................. 7-14
Chapter 8 RGA Maintenance 8-1
Warnings!................................................................................................................................................. 8-3
Probe Bakeout......................................................................................................................................... 8-5
Procedure .................................................................................................................................... 8-6
Ionizer Degas........................................................................................................................................... 8-7
Ionizer Replacement............................................................................................................................... 8-8
Equipment ................................................................................................................................... 8-8