Specifications

ManualsBrandsAddison ManualsFurnaceUHA 300

Contents

SRS Residual Gas Analyzer

Procedure.....................................................................................................................................8-8

Filament Replacement ..........................................................................................................................8-11

Handling and care of the filament............................................................................................8-11

Equipment..................................................................................................................................8-11

Procedure...................................................................................................................................8-11

CDEM Handling and Care .....................................................................................................................8-14

Handling and mounting ............................................................................................................8-14

Operating pressure ...................................................................................................................8-14

Operating temperature..............................................................................................................8-14

Bakeout temperature ................................................................................................................8-14

Operating voltage......................................................................................................................8-14

Initial pump-down......................................................................................................................8-14

Contamination ...........................................................................................................................8-15

Storage .......................................................................................................................................8-15

CDEM Pre-conditioning ........................................................................................................................8-16

CDEM Refreshment...............................................................................................................................8-17

Materials.....................................................................................................................................8-17

Procedure...................................................................................................................................8-17

CDEM Replacement ..............................................................................................................................8-18

Equipment..................................................................................................................................8-18

Procedure...................................................................................................................................8-18

Quadrupole filter cleaning....................................................................................................................8-21

Equipment..................................................................................................................................8-21

Procedure...................................................................................................................................8-22

SRS Probe Refurbishing Service.........................................................................................................8-25

Chapter 9 RGA Troubleshooting 9-1

Warnings ..................................................................................................................................................9-2

Internal Error Detection in the SRS RGA ..............................................................................................9-3

Basic Troubleshooting ...........................................................................................................................9-5

Built-in Hardware Checks.....................................................................................................................9-10

24V DC Power Supply ...............................................................................................................9-10

Electrometer...............................................................................................................................9-10

Quadrupole Mass Filter RF P/S................................................................................................9-11

Filament’s Background Protection mode...............................................................................9-12