Specifications

xiv Specifications
SRS Residual Gas Analyzer
Specifications
Operational
Mass Range:
RGA100 1 to 100 amu
RGA200 1 to 200 amu
RGA300 1 to 300 amu
Mass filter type
Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”)
Detector type
Faraday cup (FC) - standard
Electron multiplier (CDEM) - optional
Resolution
(per AVS standard 2.3).
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass
range.
Sensitivity (A/Torr)*
2
.
10
-4
(FC)
<200 (CDEM). User adjustable throughout high voltage range.
Minimum detectable
partial pressure
(MDPP)*
5
.
10
-11
Torr (FC).
5
.
10
-14
Torr (CDEM).
Operating pressure
range
10
-4
Torr to UHV (FC)
10
-6
Torr to UHV (CDEM)
Max. bakeout
temperature (without
ECU)
300°C
Operating Temperature
70°C (max.)
Recommended bakeout
temperature
200°C (O100HJR Heater Jacket recommended)
Total press.
measurement
Available with FC measurements only
* Measured with N
2
@ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV
ion energy and 1 mA electron emission current.
Ionizer
Design
Open ion source, cylindrical symmetry.
Operation
Electron impact ionization.
Material
Stainless steel, type 304.