Specifications

7-1
SRS Residual Gas Analyzer
Chapter 7
RGA Tuning
This chapter describes the tuning procedures needed to calibrate the RGA head and assure
accurate qualitative and quantitative measurements.
WARNING!
The Tuning procedures described in this chapter should be performed by
qualified personnel only. A mistuned RGA Head could give Erroneous
Readings until it is retuned properly.
In This Chapter
Introduction ............................................................................................................................................. 7-2
Tuning Options ....................................................................................................................................... 7-3
Peak Tuning Procedure.......................................................................................................................... 7-4
Introduction ................................................................................................................................. 7-4
General Procedure...................................................................................................................... 7-5
Peak Position Tuning Algorithms ............................................................................................. 7-6
Peak Width Tuning Algorithms: ................................................................................................ 7-8
Temperature effects on the mass scale calibration:............................................................... 7-9
Sensitivity Tuning Procedure .............................................................................................................. 7-11
Electron Multiplier Tuning Procedure................................................................................................. 7-14