Specifications

Sensitivity Tuning Procedure 7-13
SRS Residual Gas Analyzer
The sensitivity factors used by SRS RGA are all for Faraday Cup detection. A separate
Electron Multiplier Gain Factor, stored in the non-volatile memory of the RGA Head, is
used by the RGA Windows program to correct the ion signals when the electron
multiplier is turned on (i.e. all data acquired while the electron multiplier is on gets
divided by the gain automatically before it is displayed by the program). See the Electron
Multiplier Tuning section of this chapter for details.