Specifications

1-1
SRS Residual Gas Analyzer
Chapter 1
Getting Started
This chapter describes the process of unpacking, checking and installing the SRS RGA on a
vacuum system.
Please read and follow all installation instructions to insure that the optimum performance of the
instrument is not compromised during the installation process.
In This Chapter
Unpacking................................................................................................................................................ 1-2
Before You Open the Box .......................................................................................................... 1-2
Checklist ...................................................................................................................................... 1-2
Standard Equipment / Supplies................................................................................................. 1-2
Accessories ............................................................................................................................... 1-2
Optional Equipment.................................................................................................................. 1-2
Related Equipment.................................................................................................................... 1-3
Installation ............................................................................................................................................... 1-4
Introduction ................................................................................................................................. 1-4
Probe Installation........................................................................................................................ 1-4
Hardware Requirements ...........................................................................................................1-5
Procedure .................................................................................................................................. 1-6
Electronics Control Unit Installation ........................................................................................ 1-8
Hardware Requirements ...........................................................................................................1-8
Procedure ................................................................................................................................ 1-10
RGA Windows Installation....................................................................................................... 1-11
Minimum System Requirements (Single Head Operation) .................................................... 1-11
Procedure ................................................................................................................................ 1-11
Turning on the RGA.................................................................................................................. 1-12
Running the SRS RGA System............................................................................................................ 1-13