Specifications

8-1
SRS Residual Gas Analyzer
Chapter 8
RGA Maintenance
This chapter describes how to maintain the components of the quadrupole probe. The ECU
does not have any serviceable parts and should not require any routine maintenance.
In This Chapter
Warnings! ................................................................................................................................................ 8-3
Probe Bakeout......................................................................................................................................... 8-5
Procedure .................................................................................................................................... 8-6
Ionizer Degas........................................................................................................................................... 8-7
Ionizer Replacement............................................................................................................................... 8-8
Equipment ................................................................................................................................... 8-8
Procedure .................................................................................................................................... 8-8
Filament Replacement.......................................................................................................................... 8-11
Handling and care of the filament........................................................................................... 8-11
Equipment ................................................................................................................................. 8-11
Procedure .................................................................................................................................. 8-11
CDEM Handling and Care .................................................................................................................... 8-14
Handling and mounting............................................................................................................ 8-14
Operating pressure................................................................................................................... 8-14
Operating temperature ............................................................................................................. 8-14
Bakeout temperature................................................................................................................ 8-14
Operating voltage ..................................................................................................................... 8-14
Initial pump-down ..................................................................................................................... 8-14
Contamination........................................................................................................................... 8-14
Storage....................................................................................................................................... 8-15
CDEM Pre-conditioning........................................................................................................................ 8-16
CDEM Refreshment .............................................................................................................................. 8-17
Materials .................................................................................................................................... 8-17
Procedure .................................................................................................................................. 8-17
CDEM Replacement.............................................................................................................................. 8-18