Specifications

8-6 Probe Bakeout
SRS Residual Gas Analyzer
Procedure
1. The quadrupole probe must be mounted on the vacuum system and at a base pressure
under 10
-6
Torr.
2. Turn off the RGA and disconnect the ECU from the probe.
3. Wrap a heating tape or heating jacket around the entire probe and cover with
fiberglass insulation if necessary. Make sure the entire probe, including flanges, is
evenly covered.
4. Bake the probe to at least 200qC for several hours (i.e. overnight).
5. After bakeout wait for the probe to cool down to room temperature before mounting
the ECU back on its flange.
6. Run the peak tuning procedure.