Specifications

Unpacking 1-3
SRS Residual Gas Analyzer
2. Option 02 Built-in power module for AC line operation (Option 02). Preinstalled at
the factory. Includes one power cord.
3. Option 03 Electron Multiplier Ion Counting Output (must also have Option 01.)
4. Option 04 NIST Traceable 5 % calibration (N
2
)
5. O100RF Replacement Thoriated Iridium Filament Kit.
6. O100RI Replacement Ionizer Kit (includes filament).
7. O100EM Replacement Electron Multiplier.
8. O100HJR 200
qC Heater Jacket for RGA (cannot be used with O100MAX)
9. O100MAX Maximum Insertion nipple with 4.5” CF Flange (Factory installed;
standard nipple not supplied when this option is ordered).
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Related Equipment
1. QMS100/200/300 Quadrupole Mass Sampler system.
2. PPR100/200/300 Vacuum Process Monitoring system.
3. CIS100/200/300 Closed Ion Source quadrupole mass spectrometer.
4. PPM100 Optional stand-alone Partial Pressure monitor for RGA.
5. IGC100 Ionization Gauge Controller