Specifications

8-24 Quadrupole filter cleaning
SRS Residual Gas Analyzer
If the RGA probe has a CDEM, mount the multiplier at this time. Adjust the HV
connect rod as needed, and tighten all the necessary screws (The threaded hole on the
side slot of the rod lines up with the CDEM Clamp hole, and the top groove should
be correctly lined up with the edge of the alumina spacer’s alignment hole.)
Install new bowed e-clips in all the grooves located above the alignment holes of the
bottom alumina spacer. The clips hold the filter tightly against the exit plate. Finally,
install the filament and the repeller cage.
11. Visually inspect the probe to make sure all the parts are in place and correctly
aligned. Use an ohmmeter to make sure the electrodes are electrically isolated from
each other and from the body of the flange (ground).
12. Once satisfied, install the probe back in the vacuum system and perform a complete
“Probe Bakeout” before using the RGA for measurements.
13. Perform a peak tuning procedure on the unit.