Specifications

SRS Probe Refurbishing Service 8-25
SRS Residual Gas Analyzer
SRS Probe Refurbishing Service
The procedures described in this chapter are designed to guide the user through the
various steps needed to maintain and/or repair the different components of the RGA
probe. These procedures should only be carried out by qualified personnel who fully
understand the critical alignment aspects of the instrument. Users who do not feel
comfortable or simply do not have the time to go through the different maintenance steps
can choose to send the RGA unit back to the factory for a complete Probe Refurbishing
Service. Please contact SRS to obtain information on this very fast and convenient
service. All refurbished probes are fully tested and calibrated before being returned.
Important: All users returning an RGA Probe back to the factory for repair and/or
service must submit a correctly completed “Declaration of Contamination of Vacuum
Equipment” form along with the instrument. The SRS personnel carrying out the repair
and service of vacuum equipment must be informed of the condition of the components
before any work is done on the parts. A copy of the form is attached at the end of this
manual.