Specifications

9-1
SRS Residual Gas Analyzer
Chapter 9
RGA Troubleshooting
This chapter describes basic troubleshooting procedures for the SRS RGA.
In This Chapter
Warnings.................................................................................................................................................. 9-2
Internal Error Detection in the SRS RGA ............................................................................................. 9-3
Basic Troubleshooting........................................................................................................................... 9-5
Built-in Hardware Checks .................................................................................................................... 9-10
24V DC Power Supply .............................................................................................................. 9-10
Electrometer .............................................................................................................................. 9-10
Quadrupole Mass Filter RF P/S ............................................................................................... 9-11
Filament’s Background Protection mode .............................................................................. 9-12