Specifications

10-2
SRS Residual Gas Analyzer
A/D Conversion ......................................................................................................................10-8
Power-up Conditioning ...........................................................................................................10-9
Schematic name: QMSE_T3)....................................................................................................10-9
DC Control Voltages...............................................................................................................10-9
RF Amplitude Detection .........................................................................................................10-9
RF Amplitude Control...........................................................................................................10-10
Foldback Current Limiting....................................................................................................10-10
Schematic name: QMSE_B1. .................................................................................................10-11
Mass filter RF Supply ...........................................................................................................10-11
DC Potentials ........................................................................................................................10-12
Schematic name: QMSE_B2. .................................................................................................10-12
Filament Heater Supply.........................................................................................................10-12
Bias Regulators .....................................................................................................................10-13
Schematic name: QMSE_B3 ..................................................................................................10-14
Power Supplies......................................................................................................................10-14
Schematic name: QMSE_V1...................................................................................................10-14
Signal Conditioning ..............................................................................................................10-14
Schematic name: QMSE_V2...................................................................................................10-15
Electron Multiplier High Voltage Power Supply..................................................................10-15