Specifications

4 Appendix A
SRS Residual Gas Analyzer
1 4 7 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52 55 58 61 64
0
-9
1.2x10
-9
2.4x10
-9
3.6x10
-9
4.8x10
-9
6.0x10
-9
7.2x10
-9
8.4x10
-9
9.6x10
-8
1.1x10
-8
1.2x10
Atomic Mass Units
Torr
Vacuum Diagnosis
Figure 2a: Pump Oil Contamination
1 4 7 10 13 16 19 22 25 28 31 34 37 40 43 46 49 52 55 58 61 64
0
-6
1.0x10
-6
2.0x10
-6
3.0x10
-6
4.0x10
-6
5.0x10
-6
6.0x10
-6
7.0x10
-6
8.0x10
-6
9.0x10
-5
1.0x10
amu
Torr
Mechanical Pump Oil
MP OIL
Figure 2b: Library Pump Oil Data