Specifications

Appendix B
SRS Residual Gas Analyzer
5
tubing will use the kinetic energy of the sampled gas to mix the dead volume (in a sense
keeping the volume alive). Figure 5 shows the response to bursts of gas at the inlet of an
atmospheric sampler designed with the above considerations. The sub-second response
and cleanup are almost as fast as the RGA can acquire data.
Sample Valve
Aperature
Inlet
Hybrid Turbo Pump
Diaphragm Pump
Bypass Valve
1-5 mbar
Capillary
10 mbar
-6
1000 mbar
RGA
Figure 4: High Pressure Sampling Using Bypass Pumping
0.00e+0
1.00e-7
2.00e-7
3.00e-7
4.00e-7
5.00e-7
time (s)
pressure
01234 5
Figure 5: Response of Bypass Pumped System to Gas Bursts.