Specifications

SRS-Vacuum Technology References
Vacuum References
TABLE OF CONTENTS
VACUUM TECHNOLOGY BOOKS ................................................................................................................................2
R
ESIDUAL GAS ANALYSIS ......................................................................................................................................... 2
A
PPLICATIONS OF RESIDUAL GAS ANALYZERS TO PROCESS/QUALITY CONTROL ..................................................... 4
S
PECIALIZED/UNUSUAL APPLICATIONS OF RGAS ..................................................................................................... 7
H
IGH PRESSURE SAMPLING/DIFFERENTIAL PUMPING ............................................................................................... 9
Q
UANTITATIVE MEASUREMENTS WITH RESIDUAL GAS ANALYZERS......................................................................... 9
M
ULTIPLE LINEAR REGRESSION ANALYSIS ALGORITHMS....................................................................................... 10
V
ACUUM SYSTEM DESIGN....................................................................................................................................... 10
V
ACUUM SYSTEM CONTAMINATION ....................................................................................................................... 15
V
ACUUM PUMPS...................................................................................................................................................... 18
T
OTAL PRESSURE MEASUREMENT........................................................................................................................... 22
B
AYARD-ALPERT IONIZATION GAUGES .................................................................................................................. 23
P
IRANI/THERMOCOUPLE GAUGES ........................................................................................................................... 26
P
RESSURE CALIBRATION/SPINNING ROTOR GAUGE ................................................................................................ 26
T
EMPERATURE PROGRAMMED DESORPTION ........................................................................................................... 28
M
EMBRANE INTRODUCTION MASS SPECTROMETRY (MIMS).................................................................................. 29
V
ARIABLE LEAK VALVES........................................................................................................................................ 30
V
ACUUM AND PROCESS CONTROL PUBLICATIONS .................................................................................................. 30
V
ACUUM AND PROCESS CONTROL WEBSITES ......................................................................................................... 31