Specifications

2-1
SRS Residual Gas Analyzer
Chapter 2
RGA General Operation
This chapter describes the basic properties of the Stanford Research Systems Residual Gas
Analyzer (SRS RGA).
In This Chapter
What is an RGA?..................................................................................................................................... 2-2
The SRS RGA .......................................................................................................................................... 2-3
Basic Operating Modes of the SRS RGA ............................................................................................. 2-5
The SRS RGA as a Mass spectrometer .................................................................................... 2-5
The SRS RGA as a Single Gas monitor.................................................................................... 2-6
The SRS RGA as a Total Pressure Gauge................................................................................ 2-6
Residual Gas Analysis Basics............................................................................................................... 2-8
How Mass Spectra are Interpreted............................................................................................ 2-8
Partial Pressure Measurement .................................................................................................. 2-9
Partial Pressure Sensitivity Factors ....................................................................................... 2-11