Specifications

Vacuum References
SRS-Vacuum Technology References
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34. M. McKeown, “What you should know about traps, valves and gauges”,
Semiconductor International, March 1991, p. 109.
35. M. Lenzen and R.E. Collins, “Hermetic indium metal-to-glass tube seal”, J. Vac. Sci.
Technol A18(2) (2000) 552.
36. Adam M. Hawkridge et. al. “Cryogenic ultrahigh vacuum manipulator for angle
dependent x-ray photelectron spectroscopy studies”, J. Vac. Sci. Technol. A 18(2)
(2000)567.
37. William Wuertz, “Welding system Improves Quality Assurance”, R&D Magazine,
March 2000, p. 26. Note: Orbital TIG Welders let you weld tubes all by yourself!
38. Rich Combs, “New RF Feedthrus Minimize Coupling Effects”, R&D Magazine,
March 2000, p. 47.
39. Kimo M. Welch, “Finger Ponting in the FAB”, Vacuum Technology and Coating,
May 2000, p. 12-16.
40. Gerald Murphy and Kathryn Whitenack, “Chilled Water Options Vary for
Laboratory Equipment”, R&D Magazine, May 2000, p. 55.
41. Vic Comello, “Viewport Shutter Designs Meet Deposition Requirements”, R&D
Mag. June 2000, p. 87.
42. C. Biscardi, et. al. “Application of Porcelain Enamel as an UHV-compatible
electrical insulator”, JVST A 18(4) (2000) 1751.
43. Vincenc Nemanic et. al. “Experiments with a thin walled stainless steel vacuum
chamber”, JVST A 18(4) (2000) 1789.
44. Phil Danielson, “Improve your vacuum system performance and behavior”, R&D
Magazine, August 2000, p.39.
45. Kaveh H. Zarkar, et. al. “Designing High-Performance Vacuum Control Systems”,
R&D Magazine, Sept 2000, S-3.
46. Phil Danielson, “Assessing Gas Loads in Vacuum System Design”, R&D Magazine,
Oct. 2000, p. 39
47. Dan Goodman et. al., “Etch and CVD process improvements via heated vacuum
throttle valves”, Solid State Technology, December 2000, p. 80.
48. Boude C. Moore, “Thin-walled chambers of austenitic steel”, J. Vac. Sci. Technol. A
19(1) (2001) 228.
49. Z. Celinski , “Molecular Beam epitaxy system at an undergraduate institution”, J.
Vac. Sci. Technol. A 19(1) (2001) 383.
50. D. L. Miller et. al. , “All metal ultrahigh vacuum optical fiber feedthru”, J. Vac. Sci.
Technol. A 19(1) (2001) 386.