Specifications

Contents
SRS Residual Gas Analyzer
v
Contents
Safety and Preparation For Use...............................................................................................................iii
Contents......................................................................................................................................................v
Specifications ..........................................................................................................................................xiv
Command List..........................................................................................................................................xvi
Chapter 1 Getting Started 1-1
Unpacking ................................................................................................................................................1-2
Before You Open the Box...........................................................................................................1-2
Checklist.......................................................................................................................................1-2
Standard Equipment / Supplies.................................................................................................1-2
Accessories................................................................................................................................1-2
Optional Equipment..................................................................................................................1-2
Related Equipment....................................................................................................................1-3
Installation................................................................................................................................................1-4
Introduction .................................................................................................................................1-4
Probe Installation ........................................................................................................................1-4
Hardware Requirements............................................................................................................1-5
Procedure ..................................................................................................................................1-6
Electronics Control Unit Installation .........................................................................................1-8
Hardware Requirements............................................................................................................1-8
Procedure ................................................................................................................................1-10
RGA Windows Installation........................................................................................................1-11
Minimum System Requirements (Single Head Operation) ....................................................1-11
Procedure ................................................................................................................................1-12
Turning on the RGA ..................................................................................................................1-12
Running the SRS RGA System ............................................................................................................1-13
Chapter 2 RGA General Operation 2-1
What is an RGA? .....................................................................................................................................2-2
The SRS RGA...........................................................................................................................................2-3
Basic Operating Modes of the SRS RGA ..............................................................................................2-5
The SRS RGA as a Mass spectrometer.....................................................................................2-5
The SRS RGA as a Single Gas monitor.....................................................................................2-6
The SRS RGA as a Total Pressure Gauge ................................................................................2-6
Residual Gas Analysis Basics................................................................................................................2-8
How Mass Spectra are Interpreted ............................................................................................2-8
Partial Pressure Measurement...................................................................................................2-9
Partial Pressure Sensitivity Factors........................................................................................2-11