Specifications

Contents
SRS Residual Gas Analyzer
vii
Mass Filter Power Supply.....................................................................................................................4-10
Maintenance and Service .....................................................................................................................4-11
Chapter 5 RGA Windows Software 5-1
Overview ..................................................................................................................................................5-3
Program Structure.......................................................................................................................5-3
RGA Files .....................................................................................................................................5-3
RGA files (.rga).........................................................................................................................5-3
RGA Scan log files (.ana .hst .tbl) ............................................................................................5-3
RGA ASCII Data files (.asc).....................................................................................................5-4
RGA Graph Metafiles (.wmf)...................................................................................................5-4
System Requirements.................................................................................................................5-4
Getting Started.........................................................................................................................................5-5
Starting the RGA Software .........................................................................................................5-5
Connecting to a Head .................................................................................................................5-5
Shutting Down the RGA System................................................................................................5-5
Features and Operation ..........................................................................................................................5-7
The RGA Window ........................................................................................................................5-7
Multiple Head Operation.............................................................................................................5-7
Display Modes .............................................................................................................................5-7
Analog (Mode Menu)................................................................................................................5-7
Histogram (Mode Menu) ..........................................................................................................5-8
Table (Mode Menu) ..................................................................................................................5-8
P vs T (Mode Menu).................................................................................................................5-9
Leak Test (Mode Menu) .........................................................................................................5-10
Annunciator (Mode Menu) .....................................................................................................5-10
Library (Mode Menu) .............................................................................................................5-11
Data Acquisition ........................................................................................................................5-11
Scan Data Logging....................................................................................................................5-11
Graph Management...................................................................................................................5-12
Head Management.....................................................................................................................5-12
Sensitivity Factors.....................................................................................................................5-13
Spectrum Analysis ....................................................................................................................5-13
Background Data.......................................................................................................................5-13
RGA Head and Scan Parameters .........................................................................................................5-14
Changing Scanning Parameters..............................................................................................5-14
Changing Head Parameters .....................................................................................................5-14
Changing Scan Trigger Rates..................................................................................................5-15
Display Modes .......................................................................................................................................5-16
Changing Display Modes..........................................................................................................5-16