Specifications

ManualsBrandsAddison ManualsFurnaceUHA 300

Contents

SRS Residual Gas Analyzer

viii

Running in Split Display Mode................................................................................................ 5-16

Manual Scaling of Graphs........................................................................................................ 5-16

Using Scan Data as Background............................................................................................. 5-17

General Utilities..................................................................................................................................... 5-18

Using the Data Cursors............................................................................................................ 5-18

Cursor command..................................................................................................................... 5-18

Cursor Properties command ................................................................................................... 5-18

Scheduled Saving of Data........................................................................................................ 5-18

Logging Scans ........................................................................................................................ 5-18

Viewing Scans........................................................................................................................ 5-18

Browsing Through the Gas Library ........................................................................................ 5-19

Analyzing the Mass Spectrum................................................................................................. 5-20

Spectrum Analysis description............................................................................................... 5-20

Analysis Procedure................................................................................................................. 5-20

Averaging Scan Spectrum ....................................................................................................... 5-20

Pressure Reduction.................................................................................................................. 5-21

Y-Axis Unit Change................................................................................................................... 5-21

Head Calibration and Security.............................................................................................................. 5-22

Tuning the RGA Sensitivity...................................................................................................... 5-22

Adjusting the CEM Gain........................................................................................................... 5-22

Peak Tuning the RGA Head ..................................................................................................... 5-23

Securing the RGA Head ........................................................................................................... 5-24

RGA On-line Help.................................................................................................................................. 5-25

Context Sensitive Help............................................................................................................. 5-25

Help Search ............................................................................................................................... 5-25

Help Index.................................................................................................................................. 5-25

Commonly Asked Questions................................................................................................... 5-25

Sample Scans............................................................................................................................ 5-25

Chapter 6 Programming the RGA Head 6-1

Introduction............................................................................................................................................. 6-4

The RGA COM Utility .............................................................................................................................. 6-4

Intoduction .................................................................................................................................. 6-4

Communicating with a Head...................................................................................................... 6-4

RS232 Interface ....................................................................................................................................... 6-6

LED Indicators......................................................................................................................................... 6-6

Command Syntax.................................................................................................................................... 6-7

Examples of command formats ................................................................................................ 6-7

Programming tips...................................................................................................................... 6-8