Specifications

5-2 RGA Windows Software
SRS Residual Gas Analyzer
Sensitivity Factors.................................................................................................................... 5-13
Spectrum Analysis.................................................................................................................... 5-13
Background Data ...................................................................................................................... 5-13
RGA Head and Scan Parameters........................................................................................................ 5-14
Changing Scanning Parameters ............................................................................................. 5-14
Changing Head Parameters..................................................................................................... 5-14
Changing Scan Trigger Rates ................................................................................................. 5-15
Display Modes...................................................................................................................................... 5-16
Changing Display Modes......................................................................................................... 5-16
Running in Split Display Mode................................................................................................ 5-16
Manual Scaling of Graphs........................................................................................................ 5-16
Using Scan Data as Background ............................................................................................ 5-17
General Utilities.................................................................................................................................... 5-18
Using the Data Cursors............................................................................................................ 5-18
Cursor command..................................................................................................................... 5-18
Cursor Properties command ................................................................................................... 5-18
Scheduled Saving of Data........................................................................................................ 5-18
Logging Scans ........................................................................................................................ 5-18
Viewing Scans........................................................................................................................ 5-18
Browsing Through the Gas Library ........................................................................................ 5-19
Analyzing the Mass Spectrum................................................................................................. 5-20
Spectrum Analysis description............................................................................................... 5-20
Analysis Procedure................................................................................................................. 5-20
Averaging scan spectrum........................................................................................................ 5-20
Pressure Reduction ................................................................................................................ 5-21
Y-axis unit change .................................................................................................................... 5-21
Head Calibration and Security.............................................................................................................. 5-22
Tuning the RGA Sensitivity...................................................................................................... 5-22
Adjusting the CEM Gain........................................................................................................... 5-22
Peak Tuning the RGA Head ..................................................................................................... 5-23
Securing the RGA Head ........................................................................................................... 5-24
RGA On-line Help ................................................................................................................................. 5-25
Context Sensitive Help............................................................................................................. 5-25
Help Search ............................................................................................................................... 5-25
Help Index.................................................................................................................................. 5-25
Commonly Asked Questions................................................................................................... 5-25
Sample Scans............................................................................................................................ 5-25