Specifications

Contents
SRS Residual Gas Analyzer
ix
Communication Errors............................................................................................................................6-9
Command errors........................................................................................................................6-9
Parameter errors........................................................................................................................6-9
Jumper Protection violation......................................................................................................6-9
Troubleshooting the RGA communications.......................................................................................6-11
Programming the RGA Head................................................................................................................6-12
Initializing the RGA Head..........................................................................................................6-12
Programming the Ionizer..........................................................................................................6-13
Programming the Detector .......................................................................................................6-14
Setting up Analog Scans ..........................................................................................................6-16
Setting up Histogram Scans ....................................................................................................6-18
Single Mass Measurements .....................................................................................................6-20
Total Pressure Measurements .................................................................................................6-22
Storing information in the RGA Head......................................................................................6-23
Programming the Quadrupole Mass Filter .............................................................................6-24
Error Checking the RGA ...........................................................................................................6-25
RGA Command Set ...............................................................................................................................6-29
Initialization Commands...........................................................................................................6-30
ID?....................................................................................................................................6-30
IN0, IN1, IN2 ...................................................................................................................6-30
Ionizer Control Commands ......................................................................................................6-32
DGparam, param: 0 - 20,*...............................................................................................6-32
EEparam, param: 25 - 105, *, ?.......................................................................................6-33
FLparam, param: 0.00 - 3.50, *, ?...................................................................................6-34
IEparam, param: 0,1, *, ? ................................................................................................6-36
VFparam, param: 0 - 150, *, ?.........................................................................................6-36
Detection Control Commands..................................................................................................6-38
CA ....................................................................................................................................6-38
CL.....................................................................................................................................6-39
HVparam, param: 0 - 2490, *, ?......................................................................................6-40
MO?..................................................................................................................................6-42
NFparam, param: 0 - 7, *, ?.............................................................................................6-42
Scan and Measurement Commands........................................................................................6-44
AP?...................................................................................................................................6-44
HP?...................................................................................................................................6-44
HSparam, param:0 - 255,* ..............................................................................................6-45
MFparam, param: 1 - M_MAX, *, ?...............................................................................6-47
MIparam, param: 1 - M_MAX, *, ?................................................................................6-48
MRparam, param:0 - M_MAX .......................................................................................6-48
SAparam, param: 10 - 25, *, ?.........................................................................................6-50
SC[param], param: 0 - 255, *..........................................................................................6-51
TP?, TP0, TP1..................................................................................................................6-53
Parameter Storage Commands................................................................................................6-55