Technical data

Agilent B1500A Configuration and Connection Guide, Edition 5 3- 7
Connection Guide for Wafer Prober
SMU/GNDU connection with prober
Kelvin to non-Kelvin connection
These instructions apply when the connections up to the Connector Plate are Kelvin, but
the probe is a non-Kelvin connection. Connect an Agilent 16493K Kelvin triaxial cable (or
two Agilent 16494A triaxial cables) between the SMU and the Connector plate. Connect
the triaxial connector on the probe cable as shown in
Figure 3-7. Connect the FORCE and
SENSE lines on this side of the probe input terminal. A Tee Triaxial BNC adapter can be
used. For parts information, see
Table 3-6.
NOTE To prevent oscillations, do not use longer than 1.5m, if user uses two 16494A triaxial
cables with Kelvin connections.
NOTE When connecting the cable and tee connector as shown in Figure 3-7, space restrictions
make an adjacent connector unusable. Since three connectors are necessary for a Kelvin
connection a connector plate must be used. Select the correct connector plate for your
application. To make two Kelvin connections, use an Agilent 16495H. To make three
Kelvin connections, use an Agilent 16495J.
Figure 3-7 Example of an SMU Kelvin to non-Kelvin connection
Table 3-6 Item number information for SMU Kelvin to non-Kelvin connection with B1500A
Description Qty Product Number Part number
Kelvin triaxial cable (1.5 m) - max 3.0 A 1 16493K-001 N/A
Kelvin triaxial cable (3.0 m) - max 2.6 A 1 16493K-002 N/A
Triaxial cable (0.4 m) 1 16494A-004 N/A
Triaxial tee-connector 1 N/A 1250-1551