Technical data

Module 7
Measurement Functions
7-36
Series Resistor
(1 M ohm)
SMU
Force
Sense
Guard
Sense line is internally disconnected
during the series resistor is connected
GNDU
Use short cable to minimize
the guard capacitance
SMU Series Resistor
The series resistor (approx. 1 Mohm) is mounted on each SMU. The series resistor may be used for
the device protection, negative resistance measurement, and so on. It depends on the characteristics
of test device and measurement environment.
Note that the series resistor may not effective for device protection. For example, the breakdown
measurement may damage the device even if the series resistor is used.
If you use a series resistor, the voltage you set is applied to the near side of the series resistor. Thus,
the voltage will be divided by the series resistor and the device under test. Then, the measurement
data is not compensated.
Restrictions:
The series resistor cannot be used for the measurements that use the HRSMU connected to the ASU
or the measurements that use 1 A range of the HPSMU.