Technical data

Module 8
Capacitance Measurement
8-11
Open terminalsCorrects phase error caused
by extending measurement
cables.
Phase
Compensation
Connect standardCorrects any error by using
the working standard.
Load Correction
Connect terminals
together
Corrects for residual
impedance. Effective for low
impedance measurement.
Short Correction
Open terminalsCorrects for stray admittance.
Effective for high impedance
measurement.
Open Correction
Measurement
terminals
Effectiveness
Type
Perform before
measurement
Recommended
Recommended
Perform before
measurement
CMU Calibration
CMU is equipped with the error correction function used to realize accurate impedance
measurements. The correction function minimizes the effects of the error elements in the extension
cables and the DUT interface such as manipulator and probe card.
At least perform the phase compensation and the open correction. They only need to open the
measurement terminals.
Performing the short correction and the load correction is recommended.
If it is easy to make the short condition in your test environment, perform the short correction.
If you have the load standard, perform the load correction.
The standard must have the reference value. And the reference value must be defined in the
Advanced Options for CMU Calibration window. This window is opened by clicking the Advanced
Options… button. See the next page.