Technical data

Module 8

Capacitance Measurement

8-16

CMU cable or

SCUU cable

Extension cable

CMU

Manipulator

or Positioner

DUT

4TP configuration

Shielded 2T

configuration

3T configuration

Return path

GSWU

– for Accurate Capacitance Measurement

This slide shows the typical cable connections for the capacitance measurement. Note the following

tips to perform the measurement accurately.

-Extend the four terminal pair configuration as close as possible to the device side

-Make the return path at the end of the extension cables (coaxial cables)

The return path is effective for:

-reducing the residual inductance of the measurement cable

-stabilizing the residual inductance when measurement cable distance is changed (moved)

The residual inductance will be roughly 1/10 to 1/30 compared with no return path.

To make the return path, use the GSWU (Guard Switch Unit) which was developed to make the

setup easily. The GSWU is the accessory available only for the B1500A equipped with the CMU

and the SCUU.

Note:

For the accurate measurement, it is recommended to make the return path at the point as close as

possible to the device side.