User`s guide

Agilent 4155C/4156C User’s Guide Vol.2, Edition 6 4-7
Quasi-static C-V Measurements
Measurement Functions
Specify the following parameters to define the measurement conditions on the
MEASURE: QSCV MEASURE SETUP screen. See also Setup Screen Reference
for setting these parameters.
Parameter Description
unit Unit used to measure capacitance
range Measurement range. 1 nA or 10 nA for the MPSMU/HPSMU.
10 pA, 100 pA, 1 nA, or 10 nA for the HRSMU.
cname Variable name of the capacitance data
iname Variable name of the leakage current data.
qscv time Integration time for the capacitance measurement
leak time Integration time for the leakage current measurement
leak compensation Leakage current compensation ON or OFF
zero cancel Capacitance offset cancel ON or OFF
NOTE Integration Time
The QSCV measurement uses the integration time that is set by the INTEGRATION
TIME table on the MEASURE: QSCV MEASURE SETUP screen. The
Short,
Medium, and Long front-panel keys have no effect for the QSCV measurement.
NOTE Selecting Measurement Conditions
For the accurate measurement, estimate the characteristics of the leakage current of
your device. And select the optimum values of the range, QSCV meas voltage, and
the voltage sweep range. The delay time and qscv time settings are also important.