Agilent B1500A Semiconductor Device Analyzer Self-paced Training Manual Agilent Technologies
Notices © Agilent Technologies 2005 - 2008 Manual Part Number No part of this manual may be reproduced in any form or by any means (including electronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Agilent Technologies, Inc. as governed by United States and international copyright laws.
In This Manual This document is the self-paced training manual to help you to understand what is Agilent B1500A, what functions the B1500A has, how to use the B1500A, and what applications the B1500A contributes to. CAUTION The test setup data described in this manual are only examples. If these example data damage your devices, Agilent is NOT LIABLE for the damage. • Module 1. Introduction This module explains the product concept and the key features of the B1500A/ EasyEXPERT.
• Module 11. Advanced Definitions and Operations This module explains how to control external GPIB devices, how to call an execution file, how to perform a repeat measurement, and how to use the prober control script. • Module 12. Miscellaneous Operations This module explains what is the status indicator, what is the automatic data export function and the automatic data record function, how to perform selftest and calibration, how to perform SMU zero offset cancel, and such. • Module 13.
Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the Manual CD-ROM.
Module Exercise Device Test setup/definition/data Page Module 8 C-V sweep measurement MOSFET CV-1MHz 8-6 Module 9 Modifying application test definition MOSFET Trng IdVd Vth.xtd 9-14 Trng idvd idvg2.xtd 9-29 Trng idvd idvg3.xtd 9-32 Using auto analysys twice MOSFET Vth gmMax and Id 9-34 Using vector data MOSFET Trng Cgg-Vg 9-42 Module 10 Creating application test definition MOSFET Trng idvd idvg.
Test Setup for Class Exercises The Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The following table lists the test setup name in alphabetical order. Test Setup Name Description ALWG monitor 511 kohm sampling measurement with SPGU ALWG output Charge Pumping 4T 0.
Test Setup Name Description Trng List MOSFET Vth-gmmax measurement using I/V List Sweep Trng Multi Multi Channel I/V Sweep (Bipolar transistor and LED) Trng Sampling 0.
Required Devices for Class Exercises To perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the following devices. Description Quantity N-channel MOSFET 2 ea. NPN Bipolar Transistor 1 ea. Red Miniature LED 1 ea. 0.1 μF Capacitor 50 V 1 ea. 1.0 Ω Resistor 1/8 W 1 ea. 1.1 kΩ Resistor 1/8 W 1 ea. 511 kΩ Resistor 1/8 W 1 ea. N-ch MOSFET NPN bipolar Transistor LED Brown Black Black Silver 1 ohm Resistor Brown Brown Black Brown 1.
Required Accessories for Class Exercises To perform the class exercises, you need the following accessories. Prepare the accessories shown below. Designation 1 Description Test Fixture Model No. Qty. 16442A/B a 1 ea. 28 pin socket module 1 ea. Connection wire 6 ea. 2 Triaxial Cable 16494A 4 ea. 3 Interlock Cable 16493J 1 ea. 4 Kelvin Triaxial Cable, for Module 5 16493K 1 ea. 5 CMU Cable, for Module 8 N1300A 1 ea. 6 Atto Sense/Switch Unit, for Module 6 E5288A 1 ea.
To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories. Description Model No. Qty. E5288A Total 3sets 16494A or equivalent Total 7ea. BNC-SMA Cable 16493P 3 ea. SMA-SMA Cable, for synchronization of SPGU 16493Q 2 ea. ASU (Atto Sense/Switch Unit) with control cable Triaxial Cable To perform the flash memory class exercise in Module 13 and if you use the selector, you need the following accessories. Description Model No. Qty.
Contents Module 1. Introduction • New Features • EasyEXPERT • To Perform Easy Application Test • User Interface • Modular Mainframe • SCUU/GSWU • ASU • SMU/Pulse Generator Selector • B2200/E5250 Switch Control • Desktop EasyEXPERT Module 2.
Contents Module 3. Data Display and Management • Data Display window • Graph Analysis Tools • Data Status • To Change Graph/List/Display Setup • To See Print Preview • To Print Display Data • To Copy Graph Plot/List Data • To Save Analysis Result • To Use Preview Window Module 4.
Contents Module 5. Basic Measurement • SMU Fundamentals • Classic Test Environment • SMUs Connected in Series or Parallel • Cabling and Fixture Issues • Kelvin and Driven Guard • Probes and Prober Connections • Triax and Coax Adapters • Safety Interlock Issues Module 6.
Contents Module 7. Measurement Functions • SMU Pulsed Sweep Measurement • I/V-t Sampling Measurement • Negative Hold Time for High Speed Sampling • Auto Analysis • SMU Filter • SMU Series Resistor • Standby Function • Bias Hold Function Module 8.
Contents Module 9. Modifying Application Test Definitions • To Open Application Test Definition • To Modify Test Definition • To Use Debug Tools • To Use Built-in Functions • To Add Data Display • To Use Auto Analysis • To Use Test Setup Internal Variables • To Use Auto Analysis twice (as Class Exercise) • To Use Vector Data (as Class Exercise) Module 10.
Contents Module 11. Advanced Definitions and Operations • To Control External GPIB Devices • To Call Execution Files • To Perform Repeat Measurements • Prober Control Script Module 12.
Contents Module 13.
Contents Contents-8
1 Introduction
Module 1 Introduction In This Module • Key Features • EasyEXPERT • To Perform Easy Application Test • User Interface • Modular Mainframe • SCUU/GSWU • ASU • SMU/Pulse Generator Selector • B2200/E5250 Switch Control • Desktop EasyEXPERT Note: 1-2
Module 1 Introduction Agilent B1500A Semiconductor Device Analyzer Revolutionary EasyEXPERT environment 10 Slots variable module configuration SCUU/GSWU for IV/CV combination ASU for 100 aA Comprehensive application library B2200/E5250 switch control 415x setup file converter Semi-auto prober control +/-40 Vpp pulse generator module The B1500A has many exciting new features and capabilities.
Module 1 Introduction Key Features • EasyEXPERT software • Application test environment (> 200 algorithms) • Classic test environment – 415x like setup • Quick test environment – multiple test execution • Semi-auto prober control and B2200/E5250 switch control • Modular mainframe • HPSMU, HRSMU, MPSMU for I/V sweep, multi channel I/V sweep, I/V list sweep, I/V-t sampling • MFCMU for C-V sweep, C-f sweep • SPGU for +/-40 Vpp pulse output or arbitrary linear waveform output • SMU CMU Unify Unit (SCUU)/Guard
Module 1 Introduction EasyEXPERT GaAs CMOS Bipolar Tr MOS FET Vth Idon Idoff Vg Ig Vd Id Technology classifications Nanotech WLR Res. Cap. Device type Device parameters gm Igleak Rg Vs Is Vsub Isub V/I on terminals SMU1 SMU2 SMU3 SMU4 CMU Mode Mode Mode Mode Mode V V V V AC V I I I I range Measurement resources Instead of setting up the instrument hardware, the EasyEXPERT software focuses on the real task at hand for the engineer ---device characterization.
Module 1 Introduction To Perform Easy Application Test List of test record Step 1: Click Application Test tab. Step 2: Select one or more technology categories, and select a desired test from the list of tests associated with the selected technology categories. Step 3: Change the setup parameters (Device parameters and Test parameters) if you want. Step 4: Connect DUT, and click the Start button. The B1500A starts the selected test.
Module 1 Introduction User Interface • Touch panel • Stylus pen (option) • Rotary knob • Softkeys • USB keyboard (option) • USB mouse (option) 1-7
Module 1 Introduction Modular Mainframe B1520A CMU 10 module slots B1511A MPSMU B1517A HRSMU B1510A HPSMU B1525A SPGU GNDU: 4.2 A 16440A Selector N1301A-100 SCUU N1301A-200 GSWU E5288A ASU The following modules and accessories are available for the B1500A: •B1520A CMU: 1 kHz to 5 MHz CV capability (1 slot) •B1511A MPSMU: 100 mA/100 V force capability, 10 fA/0.5 uV measurement resolution (1 slot) •B1517A HRSMU: 100 mA/100 V force capability, 1 fA/0.
Module 1 Introduction SCUU SMU CMU Unify Unit (SCUU) CMU Force1 or CMUH SMU Sense1 SMU SCUU cable Sense2 Force2 or CMUL GSWU Simple direct connection between SMU/CMU and manipulators (positioners) You have a very hard time switching between CV and IV measurements (you may actually devote separate probe stations to CV and IV just to avoid having to change cables).
Module 1 Introduction GSWU SCUU GSWU The GSWU must be connected to the outer conductors of the manipulators/positioners connected to the Force1/CMUH and Force2/CMUL connectors of the SCUU. And the GSWU control cable must be connected between the GSWU and the SCUU. When the SMU paths are available for the manipulators/positioners, the GSWU opens between the outer conductors. However, when the MFCMU paths are available, the GSWU shorts them together to make the return path of measurement current.
Module 1 Introduction ASU • 100 aA level sensing • Channel switching • C measurements • PG for charge pumping CMUH or Force Sense To CMU Hpot/Hcur ASU 1 To HRSMU 1 CMUL or Force CMU return path To CMU Lpot/Lcur Sense ASU 2 To HRSMU 2 The high-resolution SMU (HRSMU) has an innate 1 fA & 0.5 uV measurement resolution. The optional ASU extends the HRSMU measurement resolution to 0.1 fA. The ASU has another feature, built-in switching capability.
Module 1 Introduction SMU/Pulse Generator Selector Connection Example: 16440A #2 SMU7 SMU6 16440A #1 SPGU Digital I/O 16445A Selector Adapter Status indicator on Selector front panel AC power The SMU/Pulse Generator Selector provides the built-in switching capability to select a measurement path to the Output port. The Input ports should be connected to the measurement resources, a SMU and a SPGU channel. And the Output port should be connected to the DUT interface.
Module 1 Introduction B2200/E5250 Switch Control • Allows use of a probe card to facilitate probing of standardized device modules (usually 24-pin configuration) • Enables easy multiplexing between the triaxial outputs of SMUs and the coaxial outputs of other (BNC-based) instruments and modules Agilent B1500A Agilent B2200A/B2201A Triaxial (SMU) Triaxial 8 12 - 48 6 Wafer Prober Coaxial (CMU, other) GPIB cable GPIB cable Agilent B2200A/B2201A/E5250A switching matrix can be controlled by B1500A/Eas
Module 1 Introduction Desktop EasyEXPERT Software The Desktop EasyEXPERT software provides the following additional advantages to the B1500A, allowing you to minimize the amount of offline tasks performed on B1500A and increase the working ratio for measurements. •Allows B1500A/4155B/4155C/4156B/4156C to be controlled from an external computer via GPIB while online. •Allows test setup to be created on an external computer while offline.
2 Getting Started
Module 2 Getting Started In This Module • To Turn on/off B1500A • To Launch EasyEXPERT • To Specify/Create Workspace • To Perform Application Test • To Save/Recall Your Test Setup • To Export/Import Your Preset Group • To Export/Import Test Record • To Perform Quick Test • To Control Switching Matrix • To Manage Data Display Window This section explains the above tasks.
Module 2 Getting Started To Turn on/off B1500A The Standby button works to turn on the B1500A when it is turned off. When the B1500A is turned on, the Standby button works to terminate the EasyEXPERT software, Windows, and turn off the B1500A. After the B1500A is turned on, log on Windows. The default user is Agilent B1500 User with no password.
Module 2 Getting Started To Launch EasyEXPERT Start EasyEXPERT icon Start EasyEXPERT button/window After logging on, click Start EasyEXPERT button to launch the EasyEXPERT software. If you do not see the Start EasyEXPERT button, double click the Start EasyEXPERT icon to open the Start EasyEXPERT window. This window has the File menu and the Option menu. The File menu is used to close this window. The Option menu provides the following functions.
Module 2 Getting Started To Specify Workspace Case 1 Case 2 Case 3 After launching the EasyEXPERT, you will see one of the above screens. Case 1: If this is the first time to launch the EasyEXPERT The LCD displays the EasyEXPERT main screen. Case 2: If the B1500A has one workspace only Select Yes, and click OK if you use the existing workspace. The EasyEXPERT main screen is displayed. Select No, and click Next if you want to create a new workspace. See next slide.
Module 2 Getting Started To Create Workspace 1 Check this box for Public workspace 2 1: New workspace name to create 2: New workspace name to rename Enter the workspace name and click OK to create/rename the workspace. If you want to create a public workspace, check the Allow other users to access this workspace box. The public workspace can be used by all users. If you want to create a private workspace, delete the check from the Allow other users to access this workspace box.
Module 2 Getting Started Online Help Online Help is available for the B1500A and EasyEXPERT. Select Help > Agilent EasyEXPERT Help menu to display the online help window. The online help provides the following information. •Introduction describes overview, front view, rear view, and measurement units of the Agilent B1500A. •Using EasyEXPERT provides the reference information of the Agilent EasyEXPERT software. •Function Details explains the measurement functions of the B1500A with EasyEXPERT.
Module 2 Getting Started Application Test Description To know about the application test, click the ( i ) icon. This icon displays the message box that explains the application test definition. This function will help you to know what is and how to use the application test.
Module 2 Getting Started Typical Value Selection You do not need to hit the keyboard. Right clicking this field displays the menu. The values are defined as typical values in the Test Definition. When you set a test condition of application test, you do not need to use keyboard. You can select the value from the typical values as shown below. •Click the entry field of a setup parameter by using the touch screen or the mouse. This displays the typical values for the specified parameter on the softkeys.
Module 2 Getting Started Screen Keyboard When you need to enter numeric characters in an entry field, you will see the icon at the right side of the entry field. This icon opens the Numeric KeyPad. You can use this screen keypad instead of the USB keyboard. When you need to enter alphabetic characters in an entry field, you will see the icon at the right side of the entry field. This icon opens the On Screen Keyboard. You can use this screen keyboard instead of the USB keyboard.
Module 2 Getting Started To Perform Application Test Test Record List area Step 1: Click Application Test tab. Step 2: Select one or more technology categories, and select a desired test from the list of tests associated with the selected technology categories. Step 3: Change the setup parameters (Device parameters and Test parameters) if you want. Step 4: Connect DUT, and click the Single button. The B1500A starts the selected test.
Module 2 Getting Started Test Result Editor • Save/Delete • ! Important • # Valid • ? Questionable • Remarks • OK The Test Result Editor provides the following GUI to set a flag and remarks to the test result record. Set the flag and remarks to the test record. •Save button and Delete button Divides test records into groups, Save and Delete. Test records in Save-group are always listed in the lower area of the EasyEXPERT main screen.
Module 2 Getting Started Test Record List Area Results > Filter > Show Deleted Data Flag Setup Name Flag Setup Name … # … ! * A A S S A A S Vth gmMax ID-VD1 ID-VD1 Vth gmMax ID-VD1 Expand Application Test Results Flag Setup Name … # … # … ! ! * Vth gmMax Vth gmMax ID-VD1 ID-VD1 Vth gmMax Vth gmMax ID-VD1 # # ? ? ! ! * Vth gmMax Vth gmMax Vth gmMax Vth gmMax ID-VD1 ID-VD1 ID-VD1 ID-VD1 Vth gmMax Vth gmMax ID-VD1 Show All Append Data The test result records are listed in the test record list area.
Module 2 Getting Started Single/Append/Repeat measurement Append Single Repeat The EasyEXPERT provides three execution modes, Single, Append, and Repeat. Single button triggers a single measurement. Append button triggers an append measurement. The measurement results will be appended to the Data Display window that shows the previous measurement results. The Data Display window can have maximum 10 layers for displaying measurement results.
Module 2 Getting Started To Save/Recall Your Test Setup My Favorite Setup button Preset Group name. Use this field to select preset group. The test setups you create or modify MUST be saved in a preset group (My Favorite Setup). To save the setup, click the Save button. To recall the setup, click the Recall button. You can organize the setups by using the My Favorite Setup button. To select the available preset group, use the field below the My Favorite Setup button.
Module 2 Getting Started To organize preset group for test setup My Favorite Setup button This dialog box is opened by selecting the Organize Preset Group function of the My Favorite Setup button menu, and is used to organize the preset group. •Preset Group List Lists the preset groups saved in the workspace. The Add, Rename, Duplicate, Delete, Import, and Export buttons are available to organize the preset groups. •Copy Sets the operation of the >> button and the << button.
Module 2 Getting Started To Export/Import Your Preset Group My Favorite Setup button You can export/import your preset group. To export the present preset group, click the My Favorite Setup button, select Export, and specify the folder and the name of the preset group to export. To import the preset group, click the My Favorite Setup button, select Import, and specify the preset group to import.
Module 2 Getting Started To Export/Import Test Record 1. Select data record to export, and right click. 2. Select Transport Data > Export As xxxx. To export multiple data, select Transport Data > Folder Export. To export the test result record, specify the data records and select the Transport Data > Export As xxxx menu. You can save the data records as an EasyEXPERT file, a CSV file, a XML spreadsheet file, or a XML file created by using the specified XML style sheet.
Module 2 Getting Started Class Exercise Perform Application Test. 1. Connect device (MOSFET). See the following pages. 2. Open Id-Vd test definition in the CMOS library. 3. Change the setup (SMU, output value, etc.) 4. Create your preset group, and save your setup. 5. Click button to start a single measurement. 6. Perform this exercise for the Vth gmMax test definition.
Module 2 Getting Started SMU Triax Connection Force Lines to Fixture 1,2,3,4 Ports Force side Sense side CMU 16442A/B Fixture SMU4 SMU3 SMU2 SMU1 GNDU B1500A Rear View For the non-Kelvin connections, connect only the Force lines, leaving the Sense lines open. Connect corresponding numbers. On the 16442A/B fixture use the numbers labeled 1 - 6, not 1 - 3. Your B1500A may not match the SMU configuration shown in this figure. Note that SMU1 is the module top of the GNDU (ground unit).
Module 2 Getting Started Jumper Leads - MOS transistor F 1 G F F 2 1 1 PGU F VSU VMU SMU F 4 G G G 1 F 3 F 5 F G GNDU 6 F S G 2 2 2 4 5 6 9 10 11 12 14 15 16 17 18 20 21 22 23 1 2 7 8 13 19 28 3 15 24 25 26 27 28 14 1 16088-60002 Dual in line package (28 pin) For all class exercises, you need the 28-pin dual in line socket which comes standard with the 4145 fixture (16058A) or the newer fixture (16442A/B). Either fixture works fine.
Module 2 Getting Started Device Orientation and Insertion S Sub Insert the transistor last, AFTER connecting the cables and leads. Remove the shorting wire after insertion in the socket. D G 1 23 1: Substrate 2: Source 3: Gate 4: Drain 15 14 The MOS FET leads must be re-arranged into a straight line as shown. IMPORTANT: The MOS FET is highly sensitive to electrostatic damage. Touching the bare leads can definitely destroy the device. The device comes with a special shorting wire attached.
Module 2 Getting Started Result Example 1. check 4. create 2. select 3. change 3. change 5. save 3. change 3. change Test result data (record) is automatically saved after measurement. 1. Check the CMOS check box. 2. Select Id-Vd (or Vth gmMax) and click the Select button. 3. Change the SMU setting as follows. Substrate: SMU1 Source: SMU2 Gate: SMU3 Drain: SMU4 4. Create your preset group (ex. Exercise). 5. Save the changed setup to your preset group.
Module 2 Getting Started Result Example This is the Id-Vd measurement result example of the following source setup. Gate voltage: 0.5 V to 2 V, 0.5 V step Drain voltage: 0 V to 2 V, 0.
Module 2 Getting Started To Perform Quick Test Softkeys for single measurement Step 1: Click Quick Test tab. Step 2: Select the Preset Group. Step 3: Mark (check) the test setups to be executed while the Quick Test is executed. Step 4: Connect DUT, and click the Single button. The B1500A starts the selected tests from top to bottom in the list. After the test, the test result data is displayed on the Data Display window.
Module 2 Getting Started To organize preset group for test setup My Favorite Setup banner This dialog box is opened by selecting the Organize Preset Group function of the My Favorite Setup banner menu, and is used to organize the test preset group. •Preset Group List Lists the preset groups saved in the workspace. The Add, Rename, Duplicate, Delete, Import, and Export buttons are available to organize the preset groups. •Copy Sets the operation of the >> button and the << button.
Module 2 Getting Started Class Exercise Perform Quick Test. 1. Use the device connection of the previous exercise. 2. Open your preset group. 3. Edit your preset group as you want (changing the test execution order etc.). 4. Save your preset group. 5. Perform Quick Test.
Module 2 Getting Started Result Example Note: 2-28
Module 2 Getting Started To Control Switching Matrix Step 1: Click Switching Matrix button to open the Switching Matrix Operation Panel. Step 2: Enter the switch setup name. Step 3: Define the switch setup by using the matrix on the operation panel window. Label can be set to input ports and output channels. Step 4: Click the Apply Switch Setup button to send the switch setup to the B2200/E5250 switching matrix.
Module 2 Getting Started To organize preset group for switch setup Preset List button This dialog box is opened by selecting the Organize Preset Group function of the Preset List button menu, and is used to organize the switch preset group. •Preset Group List Lists the preset groups saved in the workspace. The Add, Rename, Duplicate, and Delete buttons are available to organize the preset groups. •Copy Sets the operation of the >> button and the << button.
Module 2 Getting Started To add switch setup to test preset group Switch setups can be saved in the preset group for test setups. Click the Export to Current My Favorite Group button. The switch setup will be converted to a classic test setup and saved in the My Favorite Setup group opened in the main screen. To select the available preset group, use the Preset Group field. In the above example, the Demo group is selected and listed in the quick test setup list.
Module 2 Getting Started Class Exercise Add switch setup to test preset group. 1. Create a switch setup. 2. Create your switch preset group, and save your setup. 3. Add the switch setup to your test preset group. 4. Save your test preset group.
Module 2 Getting Started To Manage Data Display Window Data Display > Default Data Display Properties… The Data Display Properties window is used to set the default setting of the Data Display window. This window is opened by selecting the Data Display > Default Data Display Properties... menu of the main screen. The Effective Area is used to select the area effective when the Data Display window is opened, and provides the following check box. •X-Y Graph: Check this box to enable the X-Y Graph area.
Module 2 Getting Started To Manage Data Display Window Data Display > Manage Data Display… The Data Display Manager is used to control the appearances of the Data Display windows. This window is opened by selecting the Data Display > Manage Data Display... menu of the main screen. The Data Display Window Order area lists the Setup Name of the Data Display windows opened. The list items from top to bottom correspond to the windows from front to back in the screen image.
Module 2 Getting Started Tiling This is a display example of Tiling.
Module 2 Getting Started Stacking This is a display example of Stacking.
Module 2 Getting Started Overlaying This is a display example of Overlaying.
Module 2 Getting Started To tile/stack/overlay windows Stacking Overlaying Tiling When some Data Display windows are opened, the following Windows menu functions are useful. Tiling Tiles all Data Display windows on the screen. Stacking Stacks all Data Display windows on the screen. Overlaying Overlays all Data Display windows on the screen. Then the position, window size, and visibility of the most front window are applied to all windows on the screen.
3 Data Display and Management
Module 3 Data Display and Management In This Module • Data Display window • Graph Analysis Tools • Data Status • To Change Graph/List/Display Setup • To See Print Preview • To Print Display Data • To Copy Graph Plot/List Data • To Save Analysis Result • To Use Preview Window This section describes the above topics. You will understand how to use analysis tools, how to change display setup, and how to print/export test result data.
Module 3 Data Display and Management Data Display window Parameters X-Y Graph PLot List Display The Data Display window is opened after measurement automatically, or by clicking the Data Display button. And the window is used to display measurement data and analyze the data. The Show X-Y Graph icon displays/hides the X-Y Graph Plot area. This is the same as the View > X-Y Graph menu. The Show List Display icon displays/hides the List Display area. This is the same as the View > List Display menu.
Module 3 Data Display and Management Graph Analysis Tools This bar indicates which axis is effective for marker control and auto scaling. (X value, Y1 value, Yx value) cursor/marker position Y1 marker cursor active line (normal line) active cursor Yx (x : 2 to 8) line (tangent line) marker The Data Display window provides marker, cursors, and lines for analyzing test result data. Marker is used to read measurement data and draw a tangent line.
Module 3 Data Display and Management Graph Analysis Tools Text Pointer Pointer Text Text and pointer are the tools to decorate the X-Y Graph. The text is used to leave notes on the graph. The notes will be measurement conditions, device information, operator name, and so on. Up to 20 texts can be added to a graph. The pointer is used to indicate the remarkable measurement point and show the X and Y coordinates like the marker.
Module 3 Data Display and Management Graph Analysis Tools Show Graph Legend Show Line Information Line Information: Y1 intercept and gradient of active line Line Information: Yx intercept and gradient of active line Line Information: X intercept of active line Graph Legend When a line is displayed, the line information can be displayed in the graph plot area. The Show Line Information icon displays/hides the line information. This is the same as the View > Line Information ON/OFF menu.
Module 3 Data Display and Management Graph Analysis Tools Hold this layer Close All Displays Switch Display Mode Close this layer Layer selection tab. This example has three layers. Y1 If the append measurement is performed, the data display layer is added to the Data Display window. In this example, the Data Display window has three layers. Use the icons shown above to organize the data display layers. Switch Display Mode icon switches the mode, overwrite or append.
Module 3 Data Display and Management Graph Analysis Tools Graph control (X value, Y1 value, Yx value) marker line (tangent line) marker Graph control: Auto Scale icon will change the graph scale automatically to fit the trace in the graph. The right arrow button opens the menu for enabling or disabling the run time auto scaling. This function is set independently for the X and Y axes.
Module 3 Data Display and Management Graph Analysis Tools Marker control (X value, Y1 value, Yx value) marker line (tangent line) marker Marker control: Marker ON/OFF icon enables or disables the marker. Interpolation ON/OFF icon enables or disables the interpolation function of measurement data. You can read the interpolation data between two actual measurement points. Marker Skip icon moves the marker to the next measurement curve that is added by the VAR2 variable.
Module 3 Data Display and Management Graph Analysis Tools Line control cursor active line (normal line) active cursor line (tangent line) marker Line control: Line 1 State icon enables or disables line 1 and its function: normal, gradient, tangent, or regression. Line 2 State icon enables or disables line 2 and its function: normal, gradient, tangent, or regression. Cursor to Marker icon moves the cursor to the marker position. Adjust Gradient icon is available when a gradient line is active.
Module 3 Data Display and Management To Enable Marker and Line Line > Line 1 ON/OFF Line 2 ON/OFF Marker > Marker ON/OFF Marker ON/OFF Line 1 & Line 2 To enable maker, click the Marker ON/OFF icon, or select the Marker > Marker ON/OFF menu. To enable the Line 1, click Line 1 icon and select one of the line mode. Or select the Line > Line 1 ON/OFF menu and select one of the line mode. To enable the Line 2, click Line 2 icon and select one of the line mode.
Module 3 Data Display and Management To Draw Normal Line Line N > Normal Cursor To Marker 2 cursors line Enable the Normal line by clicking the Line 1 (or Line 2) icon and Normal. Move cursors to draw the line. The line passes through the cursor points. To move the cursor, you can use the Cursor To Marker icon. The cursor will move to the marker point.
Module 3 Data Display and Management To Draw Gradient Line Line N > Gradient Cursor To Marker Adjust Gradient 1 cursor gradient line Enable the Gradient line by clicking the Line 1 (or Line 2) icon and Gradient. Move the cursor to specify the point that the line passes through. And click the Adjust Gradient icon. Use the rotary knob or the mouse scroll button to adjust the gradient of the line. To move the cursor, you can use the Cursor To Marker icon. The cursor will move to the marker point.
Module 3 Data Display and Management To Set Gradient Value This is another way to draw the gradient line. Set the line 1 or 2 ON and select the gradient line mode. Then click Line > Gradient… to open the Gradient Value dialog box. On the dialog box, enter the desired gradient value, and click OK to draw the gradient line.
Module 3 Data Display and Management To Draw Tangent Line Line N > Tangent marker data curve Enable the Tangent line by clicking the Line 1 (or Line 2) icon and Tangent. Move marker to draw the line. The tangent line will pass through the marker point.
Module 3 Data Display and Management To Draw Regression Line Line N > Regression Cursor To Marker 2 cursors measured data line Enable the Regression line by clicking the Line 1 (or Line 2) icon and Regression. Move cursors to specify the region of the measurement data used for the regression calculation. To move the cursor, you can use the Cursor To Marker icon. The cursor will move to the marker point.
Module 3 Data Display and Management To Fix a Line Line N > Fix The specified line cannot move while the Line Mode is set to Fix. To fix a line, click the Line 1 (or Line 2) icon and Fix, or select the Line > Line Mode > Fix menu. While the Line Mode is set to Fix, the specified line cannot move.
Module 3 Data Display and Management To Add Text Text > New To add a text, click Text > New. A text editor appears. Then enter the text you desire. The following functions are available for the selected text(s) via the Text menu, the Text icons, or the right-click menu. Clicking on a text will select the text. To select the multiple texts, click the text while holding down the Shift key on the keyboard. Edit Mode: Edits the selected text. Size: Sets the font size of the selected text(s).
Module 3 Data Display and Management To Add Pointers Pointer > New To add a pointer, set Marker ON, click Pointer > New. A pointer and description (pointer ID and XY coordinate values) appear. Then move the pointer you desire by using the rotary knob or the mouse wheel. The following functions are available for the selected pointer(s) or description(s) via the Pointer menu, the Pointer icons, or the right-click menu. Clicking on a pointer will select the pointer.
Module 3 Data Display and Management Data Status If measurement unit detects any status while measurement, the status code is recorded with the measurement data. In this example, a SMU detected the compliance condition in the drain channel, so the status code C is put just before the Idrain value.
Module 3 Data Display and Management To Change Graph Properties The Graph Properties dialog box is used to set the following setting of the selected Data Display window. This dialog box is opened by clicking the Properties... button in the X-Y Graph Plot area or by selecting the Edit > Graph Properties... menu of the Data Display window. The Grid ON check box in the Effective Area is used to display the grid in the X-Y Graph. The Graph Color area is used to set the color map for the Data Display window.
Module 3 Data Display and Management To Change List Display Properties Edit > List Display Properties… Data Status Physical Unit Example: C -1.2345 V Example: -1.2345 mA Example: -1.23456789012345E-003 A This dialog box is used to set the data display format in the List Display area. This dialog box is opened by clicking the Properties... button in the List Display area or by selecting Edit > List Display Properties... menu of the Data Display window.
Module 3 Data Display and Management To Change Display Setup View > Display Setup… This dialog box is used to change the graph scale and data to be displayed in the Data Display window. The X-Y Graph area sets the X and Y1 to Y8 axes of the X-Y Graph Plot area. Name: Specifies the parameter for the axis •Sharing: Specifies the group for sharing the Y axis scale. Select from Group 1, Group 2, Group 3, Group 4, or None (no grouping). The Scale, Min, and Max values are shared by the Y axes in the same group.
Module 3 Data Display and Management To See Print Preview File > Print Preview… The Data Display window provides the File > Print Preview… function to show the print preview. This is an example of the print preview. •Select the File > Print Preview menu to open the Print Preview dialog box. •Set the Print Range, Data to print, and Scaling. •Click Preview button. The Print preview window is displayed.
Module 3 Data Display and Management To Print Display Data File > Print File > Save Image As… bmp, emf, gif, or png format The Data Display window provides the display image output capability to a printer or a file. Before printing, connect a printer to the B1500A via the parallel interface or the LAN, and set up it by using the Add Printer Wizard of Windows. After that, do following. •Select the File > Print menu to open the Print dialog box. •Set the Print Range, Data to print, and Scaling.
Module 3 Data Display and Management To Copy Graph Plot Paste to WordPad You can copy graph image to the clipboard, and paste it to a word processing software. In the above example, the graph image is pasted to the WordPad. This is an example of the copy and paste operation. •Select the Edit > Copy Graph menu on the Data Display window. •Select the Edit > Paste menu on the WordPad.
Module 3 Data Display and Management To Copy List Data Paste to Notepad Open by a spreadsheet software You can copy the data list to the clipboard, and paste it to a word processing software. In the above example, the data list is pasted to the Notepad. This is an example of the copy and paste operation. •Select the Edit > Copy List menu on the Data Display window. •Select the Edit > Paste menu on the Notepad. You can save the data as a text file, and read it by using a spreadsheet software.
Module 3 Data Display and Management To Save Analysis Result Select File > Update Test Result Select File > Save Image As… Saves graph information to data record. Saves graph image as a file. To leave the graph modification information such as scaling, marker, cursor, and line on the graph, select the File > Update Test Result menu. You can see the all information when you open the graph again. Note that the modification information will be destroyed if you did not do it.
Module 3 Data Display and Management Class Exercise Use the analysis tools. 1. Use your test setup (for example, GMMAX in the Demo preset group) and perform measurement . 2. Enable marker and draw line. Try it for all line types. 3. Copy/paste/save data list, and open it by using a spreadsheet software (optional, if you can). 4. Save analysis condition. Re-open the test record. 5. Export your test record. And import it.
Module 3 Data Display and Management To Use Preview Window The Data Display window provides the File > Print… function to print the graph image. However, you may want to set the graph title and change the line style. Then use the Preview window. The Preview window is used to see and print the graph image you modified. Select the View > Open Preview Window to open the Preview window and the Preview Settings dialog box.
Module 3 Data Display and Management To Use Preview Window This example is result of the changes shown in the previous page. Line style was changed as shown above. The titles are set as follows. Graph title: ID-VG Characteristics X axis title: Gate Voltage Y1 axis title: Drain Current Y2 axis title: Transconductance Y3 axis title: Drain Current Also color of line1 was changed to red, and thickness of trace was changed.
Module 3 Data Display and Management Class Exercise Use the Preview window. 1. Use your test record used in the previous exercise. 2. Change the graph image as you want. - Add graph title and change axis title. - Change line style - Change color and thickness 3. Print the graph image if a printer is available.
