User`s guide

Scanner Maintenance and Calibration 8
Agilent 5500 SPM User’s Guide 143
Calibrating the Multi-Purpose Scanner
Regular calibration ensures that Agilent multi-purpose scanners will
provide high performance imaging for many years of service. The
following calibration procedure is recommended once or twice per year,
if the system is moved, and before critical measurements.
1 Make sure the correct scanner file is selected under the PicoView
Scanner menu.
2 Place a calibration target on a sample plate and mount the plate on
the microscope.
3 Follow the procedures for Contact Mode measurements to obtain an
image of the calibration target. Use the following settings:
a Deflection = -0.8 to -1.0 V.
b Setpoint voltage = 0.8.
c Scan Size = 90 microns.
d Resolution = 256.
e Scan Speed to 1 ln/s.
4 Make sure that the target is positioned such that its features are
aligned in both the X and Y directions. Use the Crosshairs tool in
the Realtime Images window (Controls > Crosshair) as an aid. If
the target is not aligned, withdraw the tip, adjust the target, and
approach again.
5 In the Realtime Images window choose File > Autosave. During
calibration this provides a useful way to review the effects of applied
changes to the calibration file.